Jonathan D. Mohn

Person

Saratoga, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for UV flowable dielectric
- Patent number 11,270,896
- Issue date Mar 8, 2022
- Lam Research Corporation
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for UV flowable dielectric
- Patent number 10,388,546
- Issue date Aug 20, 2019
- Lam Research Corporation
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low k dielectric deposition via UV driven photopolymerization
- Patent number 9,916,977
- Issue date Mar 13, 2018
- Lam Research Corporation
- Patrick A. Van Cleemput
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual-plenum showerhead with interleaved plenum sub-volumes
- Patent number 9,728,380
- Issue date Aug 8, 2017
- Novellus Systems, Inc.
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and apparatus for flowable deposition in semiconductor fabri...
- Patent number 9,719,169
- Issue date Aug 1, 2017
- Novellus Systems, Inc.
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced multi-workpiece processing chamber
- Patent number 9,184,072
- Issue date Nov 10, 2015
- Mattson Technology, Inc.
- Daniel J. Devine
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Variable showerhead flow by varying internal baffle conductance
- Patent number 9,121,097
- Issue date Sep 1, 2015
- Novellus Systems, Inc.
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Workpiece support with fluid zones for temperature control
- Patent number 7,972,444
- Issue date Jul 5, 2011
- Mattson Technology, Inc.
- Martin L. Zucker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mirror structure with single crystal silicon cross-member
- Patent number 7,369,297
- Issue date May 6, 2008
- Miradia Inc.
- Brian K. McGinley
- G02 - OPTICS
Information Patent Grant
Spatial light modulator with perforated hinge
- Patent number 7,355,781
- Issue date Apr 8, 2008
- Gehode Corporation
- Jonathan David Mohn
- G02 - OPTICS
Information Patent Grant
Mirror structure with single crystal silicon cross-member
- Patent number 7,042,619
- Issue date May 9, 2006
- Miradia Inc.
- Brian K. McGinley
- G02 - OPTICS
Information Patent Grant
Multi-purpose processing chamber with removable chamber liner
- Patent number 7,011,039
- Issue date Mar 14, 2006
- Applied Materials, Inc.
- Jonathan D. Mohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact independent pressure control and vacuum isolation for a tur...
- Patent number 6,598,615
- Issue date Jul 29, 2003
- Applied Materials, Inc.
- John Holland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor with heated source of a polymer-hardening precursor...
- Patent number 6,440,866
- Issue date Aug 27, 2002
- Applied Materials, Inc.
- Kenneth S. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma reactor inductive coil antenna with flat surface facing the...
- Patent number 6,401,652
- Issue date Jun 11, 2002
- Applied Materials, Inc.
- Jonathan D. Mohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment of etching chambers using activated cleaning gas
- Patent number 6,379,575
- Issue date Apr 30, 2002
- Applied Materials, Inc.
- Gerald Zheyao Yin
- B08 - CLEANING
Information Patent Grant
Plasma reactor with heated source of a polymer-hardening precursor...
- Patent number 6,218,312
- Issue date Apr 17, 2001
- Applied Materials Inc.
- Kenneth S. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Center gas feed apparatus for a high density plasma reactor
- Patent number 6,193,836
- Issue date Feb 27, 2001
- Applied Materials, Inc.
- Jon Mohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High density plasma process chamber
- Patent number 6,095,084
- Issue date Aug 1, 2000
- Applied Materials, Inc.
- Shamouil Shamouilian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma reactor with heated source of a polymer-hardening precursor...
- Patent number 6,036,877
- Issue date Mar 14, 2000
- Applied Materials, Inc.
- Kenneth S. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Center gas feed apparatus for a high density plasma reactor
- Patent number 6,027,606
- Issue date Feb 22, 2000
- Applied Materials, Inc.
- John Mohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor with heated source of a polymer-hardening precursor...
- Patent number 6,024,826
- Issue date Feb 15, 2000
- Applied Materials, Inc.
- Kenneth Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor with heated source of a polymer-hardening precursor...
- Patent number 5,990,017
- Issue date Nov 23, 1999
- Applied Materials, Inc.
- Kenneth Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma guard for chamber equipped with electrostatic chuck
- Patent number 5,762,714
- Issue date Jun 9, 1998
- Applied Materials, Inc.
- Jon Mohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamp ring for domed pedestal in wafer processing chamber
- Patent number 5,437,757
- Issue date Aug 1, 1995
- Applied Materials, Inc.
- Michael Rice
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR UV FLOWABLE DIELECTRIC
- Publication number 20190333790
- Publication date Oct 31, 2019
- LAM RESEARCH CORPORATION
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD TO CONTROL THE UNIFORMITY OF A GAS FLOW IN A CVD...
- Publication number 20180128647
- Publication date May 10, 2018
- AIXTRON SE
- Gi Youl Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR UV FLOWABLE DIELECTRIC
- Publication number 20170137943
- Publication date May 18, 2017
- LAM RESEARCH CORPORATION
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VARIABLE SHOWERHEAD FLOW BY VARYING INTERNAL BAFFLE CONDUCTANCE
- Publication number 20160020074
- Publication date Jan 21, 2016
- Novellus Systems, Inc.
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VARIABLE SHOWERHEAD FLOW BY VARYING INTERNAL BAFFLE CONDUCTANCE
- Publication number 20140061324
- Publication date Mar 6, 2014
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND APPARATUS FOR FLOWABLE DEPOSITION IN SEMICONDUCTOR FABRI...
- Publication number 20120161405
- Publication date Jun 28, 2012
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Workpiece Support With Fluid Zones For Temperature Control
- Publication number 20090114158
- Publication date May 7, 2009
- Mattson Technology, Inc.
- Martin L. Zucker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADVANCED MULTI-WORKPIECE PROCESSING CHAMBER
- Publication number 20090028761
- Publication date Jan 29, 2009
- Daniel J. Devine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for stripping
- Publication number 20070051471
- Publication date Mar 8, 2007
- APPLIED MATERIALS, INC.
- Mark N. Kawaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Spatial light modulator with perforated hinge
- Publication number 20070019278
- Publication date Jan 25, 2007
- Jonathan David Mohn
- G02 - OPTICS
Information Patent Application
Mirror structure with single crystal silicon cross-member
- Publication number 20060087717
- Publication date Apr 27, 2006
- Miradia Inc.
- Brian K. McGinley
- G02 - OPTICS

Jonathan D. Mohn

Person

Patents Grantslast 30 patents

Apparatus for UV flowable dielectric

Apparatus for UV flowable dielectric

Low k dielectric deposition via UV driven photopolymerization

Dual-plenum showerhead with interleaved plenum sub-volumes

System and apparatus for flowable deposition in semiconductor fabri...

Advanced multi-workpiece processing chamber

Variable showerhead flow by varying internal baffle conductance

Workpiece support with fluid zones for temperature control

Mirror structure with single crystal silicon cross-member

Spatial light modulator with perforated hinge

Mirror structure with single crystal silicon cross-member

Multi-purpose processing chamber with removable chamber liner

Compact independent pressure control and vacuum isolation for a tur...

Plasma reactor with heated source of a polymer-hardening precursor...

Plasma reactor inductive coil antenna with flat surface facing the...

Treatment of etching chambers using activated cleaning gas

Plasma reactor with heated source of a polymer-hardening precursor...

Center gas feed apparatus for a high density plasma reactor

High density plasma process chamber

Plasma reactor with heated source of a polymer-hardening precursor...

Center gas feed apparatus for a high density plasma reactor

Plasma reactor with heated source of a polymer-hardening precursor...

Plasma reactor with heated source of a polymer-hardening precursor...

Plasma guard for chamber equipped with electrostatic chuck

Clamp ring for domed pedestal in wafer processing chamber

Patents Applicationslast 30 patents

APPARATUS FOR UV FLOWABLE DIELECTRIC

DEVICE AND METHOD TO CONTROL THE UNIFORMITY OF A GAS FLOW IN A CVD...

APPARATUS FOR UV FLOWABLE DIELECTRIC

VARIABLE SHOWERHEAD FLOW BY VARYING INTERNAL BAFFLE CONDUCTANCE

VARIABLE SHOWERHEAD FLOW BY VARYING INTERNAL BAFFLE CONDUCTANCE

SYSTEM AND APPARATUS FOR FLOWABLE DEPOSITION IN SEMICONDUCTOR FABRI...

Workpiece Support With Fluid Zones For Temperature Control

ADVANCED MULTI-WORKPIECE PROCESSING CHAMBER

Methods and apparatus for stripping

Spatial light modulator with perforated hinge

Mirror structure with single crystal silicon cross-member