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Soft MEMS
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Patent number 8,431,080
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Issue date Apr 30, 2013
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The Board of Trustees of the University of Illinois
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Chang Liu
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Artificial lateral line
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Patent number 8,056,419
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Issue date Nov 15, 2011
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The Board of Trustees of the University of Illinois
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Chang Liu
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G01 - MEASURING TESTING
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Micromachined artificial haircell
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Patent number 7,661,319
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Issue date Feb 16, 2010
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The Board of Trustees of the University of Illinois
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Chang Liu
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Artificial lateral line
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Patent number 7,644,624
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Issue date Jan 12, 2010
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The Board of Trustees of the University of Illinois
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Chang Liu
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G01 - MEASURING TESTING
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