Jonghoon Baek

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck with multiple radio frequency meshes to control...
- Patent number 12,136,536
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Edward P. Hammond
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and method for tuning plasma distribution using phase control
- Patent number 11,908,662
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Xiaopu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film stack overlay improvement
- Patent number 11,339,475
- Issue date May 24, 2022
- Applied Materials, Inc.
- Xinhai Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle generation suppresor by DC bias modulation
- Patent number 10,504,697
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Jonghoon Baek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing with DC assisted RF power for improved con...
- Patent number 10,032,606
- Issue date Jul 24, 2018
- Applied Materials, Inc.
- Jang-Gyoo Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle generation suppresor by DC bias modulation
- Patent number 9,892,888
- Issue date Feb 13, 2018
- Applied Materials, Inc.
- Jonghoon Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anti-arc zero field plate
- Patent number 9,850,576
- Issue date Dec 26, 2017
- Applied Materials, Inc.
- Jonghoon Baek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle generation suppressor by DC bias modulation
- Patent number 9,593,421
- Issue date Mar 14, 2017
- Applied Materials, Inc.
- Jonghoon Baek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry-etch selectivity
- Patent number 9,384,997
- Issue date Jul 5, 2016
- Applied Materials, Inc.
- He Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing with DC assisted RF power for improved con...
- Patent number 9,373,517
- Issue date Jun 21, 2016
- Applied Materials, Inc.
- Jang-Gyoo Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tightly fitted ceramic insulator on large area electrode
- Patent number 9,068,262
- Issue date Jun 30, 2015
- Applied Materials, Inc.
- Jozef Kudela
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Off-center ground return for RF-powered showerhead
- Patent number 9,039,864
- Issue date May 26, 2015
- Applied Materials, Inc.
- Jonghoon Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry-etch selectivity
- Patent number 8,969,212
- Issue date Mar 3, 2015
- Applied Materials, Inc.
- He Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Balancing RF bridge assembly
- Patent number 8,875,657
- Issue date Nov 4, 2014
- Applied Materials, Inc.
- Jonghoon Baek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mixing frequency at multiple feeding points
- Patent number 8,312,839
- Issue date Nov 20, 2012
- Applied Materials, Inc.
- Jonghoon Baek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK WITH MULTIPLE RADIO FREQUENCY MESHES TO CONTROL...
- Publication number 20240222081
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- Edward P. HAMMOND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK WITH MULTIPLE RADIO FREQUENCY MESHES TO CONTROL...
- Publication number 20210166915
- Publication date Jun 3, 2021
- Applied Materials, Inc.
- Edward P. HAMMOND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM STACK OVERLAY IMPROVEMENT FOR 3D NAND APPLICATION
- Publication number 20200173022
- Publication date Jun 4, 2020
- Applied Materials, Inc.
- Xinhai HAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR TUNING PLASMA DISTRIBUTION USING PHASE CONTROL
- Publication number 20200161093
- Publication date May 21, 2020
- Applied Materials, Inc.
- Xiaopu LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTI-ARC ZERO FIELD PLATE
- Publication number 20180119281
- Publication date May 3, 2018
- Applied Materials, Inc.
- Jonghoon BAEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARTICLE GENERATION SUPPRESOR BY DC BIAS MODULATION
- Publication number 20170236689
- Publication date Aug 17, 2017
- Applied Materials, Inc.
- Jonghoon BAEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE GENERATION SUPPRESOR BY DC BIAS MODULATION
- Publication number 20170148611
- Publication date May 25, 2017
- Applied Materials, Inc.
- Jonghoon BAEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING WITH DC ASSISTED RF POWER FOR IMPROVED CON...
- Publication number 20160300694
- Publication date Oct 13, 2016
- Applied Materials, Inc.
- Jang-Gyoo Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TIGHTLY FITTED CERAMIC INSULATOR ON LARGE AREA ELECTRODE
- Publication number 20150273490
- Publication date Oct 1, 2015
- Applied Materials, Inc.
- Jozef KUDELA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DRY-ETCH SELECTIVITY
- Publication number 20150132968
- Publication date May 14, 2015
- Applied Materials, Inc.
- He Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE GENERATION SUPPRESSPR BY DC BIAS MODULATION
- Publication number 20150123541
- Publication date May 7, 2015
- Applied Materials, Inc.
- Jonghoon BAEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRY-ETCH SELECTIVITY
- Publication number 20140141621
- Publication date May 22, 2014
- Applied Materials, Inc.
- He Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING WITH DC ASSISTED RF POWER FOR IMPROVED CON...
- Publication number 20140057447
- Publication date Feb 27, 2014
- Applied Materials, Inc.
- Jang-Gyoo Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA MONITORING AND MINIMIZING STRAY CAPACITANCE
- Publication number 20130071581
- Publication date Mar 21, 2013
- Jonghoon Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIGHTLY FITTED CERAMIC INSULATOR ON LARGE AREA ELECTRODE
- Publication number 20110284100
- Publication date Nov 24, 2011
- Applied Materials, Inc.
- JOZEF KUDELA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTI-ARC ZERO FIELD PLATE
- Publication number 20110197814
- Publication date Aug 18, 2011
- Applied Materials, Inc.
- JONGHOON BAEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BALANCING RF BRIDGE ASSEMBLY
- Publication number 20110185972
- Publication date Aug 4, 2011
- Applied Materials, Inc.
- Jonghoon Baek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Off-Center Ground Return for RF-Powered Showerhead
- Publication number 20110126405
- Publication date Jun 2, 2011
- Jonghoon Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MIXING FREQUENCY AT MULTIPLE FEEDING POINTS
- Publication number 20100245214
- Publication date Sep 30, 2010
- Applied Materials, Inc.
- Jonghoon Baek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF RETURN PATH FOR LARGE PLASMA PROCESSING CHAMBER
- Publication number 20100089319
- Publication date Apr 15, 2010
- Applied Materials, Inc.
- Carl A. Sorensen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Jonghoon Baek

Person

Patents Grantslast 30 patents

Electrostatic chuck with multiple radio frequency meshes to control...

Device and method for tuning plasma distribution using phase control

Film stack overlay improvement

Particle generation suppresor by DC bias modulation

Semiconductor processing with DC assisted RF power for improved con...

Particle generation suppresor by DC bias modulation

Anti-arc zero field plate

Particle generation suppressor by DC bias modulation

Dry-etch selectivity

Semiconductor processing with DC assisted RF power for improved con...

Tightly fitted ceramic insulator on large area electrode

Off-center ground return for RF-powered showerhead

Dry-etch selectivity

Balancing RF bridge assembly

Mixing frequency at multiple feeding points

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCK WITH MULTIPLE RADIO FREQUENCY MESHES TO CONTROL...

ELECTROSTATIC CHUCK WITH MULTIPLE RADIO FREQUENCY MESHES TO CONTROL...

FILM STACK OVERLAY IMPROVEMENT FOR 3D NAND APPLICATION

DEVICE AND METHOD FOR TUNING PLASMA DISTRIBUTION USING PHASE CONTROL

ANTI-ARC ZERO FIELD PLATE

PARTICLE GENERATION SUPPRESOR BY DC BIAS MODULATION

PARTICLE GENERATION SUPPRESOR BY DC BIAS MODULATION

SEMICONDUCTOR PROCESSING WITH DC ASSISTED RF POWER FOR IMPROVED CON...

TIGHTLY FITTED CERAMIC INSULATOR ON LARGE AREA ELECTRODE

DRY-ETCH SELECTIVITY

PARTICLE GENERATION SUPPRESSPR BY DC BIAS MODULATION

DRY-ETCH SELECTIVITY

SEMICONDUCTOR PROCESSING WITH DC ASSISTED RF POWER FOR IMPROVED CON...

PLASMA MONITORING AND MINIMIZING STRAY CAPACITANCE

TIGHTLY FITTED CERAMIC INSULATOR ON LARGE AREA ELECTRODE

ANTI-ARC ZERO FIELD PLATE

BALANCING RF BRIDGE ASSEMBLY

Off-Center Ground Return for RF-Powered Showerhead

MIXING FREQUENCY AT MULTIPLE FEEDING POINTS

RF RETURN PATH FOR LARGE PLASMA PROCESSING CHAMBER