JOUNG JOO LEE

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Low resistivity tungsten film and method of manufacture
- Patent number 12,191,198
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Feihu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for copper doped hybrid metallization for line and via
- Patent number 12,183,631
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Suketu Parikh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 12,104,243
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Annamalai Lakshmanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 12,094,699
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual silicide process using ruthenium silicide
- Patent number 12,094,785
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Thomas Anthony Empante
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low resistivity DRAM buried word line stack
- Patent number 12,022,650
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Yixiong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for forming dual metal interconnects
- Patent number 11,948,885
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Suketu A Parikh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 11,810,770
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective oxidation and simplified pre-clean
- Patent number 11,776,805
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low resistivity DRAM buried word line stack
- Patent number 11,587,936
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Yixiong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing multilayer stack including copper over feature...
- Patent number 11,562,925
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Shirish Pethe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for semi-dynamic bottom up reflow
- Patent number 11,222,816
- Issue date Jan 11, 2022
- Applied Materials, Inc.
- Lanlan Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for forming dual metal interconnects
- Patent number 11,075,165
- Issue date Jul 27, 2021
- Applied Materials, Inc.
- Suketu A Parikh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 11,037,768
- Issue date Jun 15, 2021
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film quality control in a linear scan physical vapor deposition pro...
- Patent number 10,950,448
- Issue date Mar 16, 2021
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for patterning substrates using asymmetric ph...
- Patent number 10,927,450
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for patterning substrates using asymmetric ph...
- Patent number 10,927,451
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for asymmetric selective physical vapor deposi...
- Patent number 10,815,561
- Issue date Oct 27, 2020
- Applied Materials, Inc.
- Joung Joo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for asymmetric deposition of metal on high aspect ratio nan...
- Patent number 10,636,655
- Issue date Apr 28, 2020
- Applied Materials, Inc.
- Ben-Li Sheu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for filling substrate features with cobalt
- Patent number 10,304,732
- Issue date May 28, 2019
- Applied Materials, Inc.
- Wenting Hou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for pre-cleaning conductive materials on a substrate
- Patent number 10,283,345
- Issue date May 7, 2019
- Applied Materials, Inc.
- Xiangjin Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for igniting a plasma in a substrate processing chamber
- Patent number 10,157,733
- Issue date Dec 18, 2018
- Applied Materials, Inc.
- Shouyin Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming cobalt-copper selective fill for an interconnect
- Patent number 10,014,179
- Issue date Jul 3, 2018
- Applied Materials, Inc.
- Rong Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for improved metal ion filtering
- Patent number 9,953,813
- Issue date Apr 24, 2018
- Applied Materials, Inc.
- Xianmin Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reflective deposition rings and substrate processing chambers incor...
- Patent number 9,905,443
- Issue date Feb 27, 2018
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bipolar collimator utilized in a physical vapor deposition chamber
- Patent number 9,831,074
- Issue date Nov 28, 2017
- Applied Materials, Inc.
- Joung Joo Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for pre-cleaning conductive interconnect structures
- Patent number 9,460,959
- Issue date Oct 4, 2016
- Applied Materials, Inc.
- Xiangjin Xie
- B08 - CLEANING
Information Patent Grant
Methods for processing a substrate using multiple substrate support...
- Patent number 9,315,891
- Issue date Apr 19, 2016
- Applied Materials, Inc.
- Joung Joo Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming interconnect structures
- Patent number 8,841,211
- Issue date Sep 23, 2014
- Applied Materials, Inc.
- Joung Joo Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming layers on substrates
- Patent number 8,476,162
- Issue date Jul 2, 2013
- Applied Materials, Inc.
- Tae Hong Ha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MICROWAVE PRECLEAN APPARATUS AND PROCESSING METHOD FOR IMPURITY REM...
- Publication number 20240404803
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Yoon Ah SHIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL SILICIDE PROCESS USING RUTHENIUM SILICIDE
- Publication number 20240404888
- Publication date Dec 5, 2024
- Applied Materuals, Inc.
- Thomas Anthony Empante
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERRUPTION LAYER FILL FOR LOW RESISTANCE CONTACTS
- Publication number 20240371771
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Sahil Jaykumar PATEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW-TEMPERATURE DEPOSITION PROCESSES TO FORM MOLYBDENUM-BASED MATER...
- Publication number 20240360549
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MAKING SILICIDE IN HIGH-ASPECT RATIO STRUCTURES BY HYBRID...
- Publication number 20240332023
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Ying-Bing JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR NANOHOLE WET CLEANS
- Publication number 20240331999
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Ying-Bing Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW-K AND TANTALUM NITRIDE BARRIER RECOVERY USING A SOAK PROCESS
- Publication number 20240327991
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Mohammad Mahdi TAVAKOLI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTACT RESISTANCE REDUCTION BY INTEGRATION OF MOLYBDENUM WITH TITA...
- Publication number 20240234209
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Avgerinos V. Gelatos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POST-TREATMENT FOR REMOVING RESIDUES FROM DIELECTRIC SURFACE
- Publication number 20240194605
- Publication date Jun 13, 2024
- Applied Materials, Inc.
- Mohammad Mahdi TAVAKOLI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROCHEMICAL REDUCTION OF SURFACE METAL OXIDES
- Publication number 20240191353
- Publication date Jun 13, 2024
- Applied Materials, Inc.
- Yoon Ah Shin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Selective Metal Deposition Using Separated Reactant Activ...
- Publication number 20240191354
- Publication date Jun 13, 2024
- Ying-Bing JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL CAP FOR CONTACT RESISTANCE REDUCTION
- Publication number 20240038859
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20230402271
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FIELD SUPPRESSED METAL GAPFILL
- Publication number 20230326744
- Publication date Oct 12, 2023
- Applied Materials, Inc.
- Annamalai Lakshmanan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Non-Halide Oxygen-Free Organometallic Precursors for ALD/CVD of Met...
- Publication number 20230287022
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Byunghoon Yoon
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD OF DEPOSITING METAL FILMS
- Publication number 20230227975
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL SILICIDE PROCESS USING RUTHENIUM SILICIDE
- Publication number 20230187282
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Thomas Anthony Empante
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW RESISTIVITY DRAM BURIED WORD LINE STACK
- Publication number 20230141748
- Publication date May 11, 2023
- Applied Materials, Inc.
- Yixiong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING LAYERS
- Publication number 20230122969
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Shirish PETHE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERHANG REDUCTION USING PULSED BIAS
- Publication number 20230113961
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Bencherki Mebarki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR REMOVING ETCH STOP LAYERS
- Publication number 20230035288
- Publication date Feb 2, 2023
- Suketu PARIKH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR REMOVING ETCH STOP LAYERS
- Publication number 20230031381
- Publication date Feb 2, 2023
- Suketu PARIKH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED METHODS FOR GRAPHENE FORMATION
- Publication number 20230017035
- Publication date Jan 19, 2023
- Applied Materials, Inc.
- Bencherki Mebarki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20230017383
- Publication date Jan 19, 2023
- Bencherki MEBARKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURES WITH COPPER DOPED HYBRID METALLIZATION FOR LINE AND VIA
- Publication number 20230005844
- Publication date Jan 5, 2023
- Applied Materials, Inc.
- Suketu PARIKH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR COPPER DOPED HYBRID METALLIZATION FOR LINE AND VIA
- Publication number 20230005789
- Publication date Jan 5, 2023
- Suketu PARIKH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220403505
- Publication date Dec 22, 2022
- Annamalai LAKSHMANAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAP FILL METHODS USING CATALYZED DEPOSITION
- Publication number 20220325410
- Publication date Oct 13, 2022
- Applied Materials, Inc.
- Byunghoon Yoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low Resistivity DRAM Buried Word Line Stack
- Publication number 20220278108
- Publication date Sep 1, 2022
- Applied Materials, Inc.
- Yixiong Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low Resistivity Metal Contact Stack
- Publication number 20220277961
- Publication date Sep 1, 2022
- Applied Materials, Inc.
- Annamalai Lakshmanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

JOUNG JOO LEE

Person

Patents Grantslast 30 patents

Low resistivity tungsten film and method of manufacture

Methods for copper doped hybrid metallization for line and via

Methods and apparatus for processing a substrate

Methods and apparatus for controlling ion fraction in physical vapo...

Dual silicide process using ruthenium silicide

Low resistivity DRAM buried word line stack

Methods and apparatus for forming dual metal interconnects

Methods and apparatus for controlling ion fraction in physical vapo...

Selective oxidation and simplified pre-clean

Low resistivity DRAM buried word line stack

Method of depositing multilayer stack including copper over feature...

Methods and apparatus for semi-dynamic bottom up reflow

Methods and apparatus for forming dual metal interconnects

Methods and apparatus for controlling ion fraction in physical vapo...

Film quality control in a linear scan physical vapor deposition pro...

Methods and apparatus for patterning substrates using asymmetric ph...

Methods and apparatus for patterning substrates using asymmetric ph...

Method and apparatus for asymmetric selective physical vapor deposi...

Methods for asymmetric deposition of metal on high aspect ratio nan...

Methods and apparatus for filling substrate features with cobalt

Methods for pre-cleaning conductive materials on a substrate

Methods for igniting a plasma in a substrate processing chamber

Methods for forming cobalt-copper selective fill for an interconnect

Methods and apparatus for improved metal ion filtering

Reflective deposition rings and substrate processing chambers incor...

Bipolar collimator utilized in a physical vapor deposition chamber

Methods for pre-cleaning conductive interconnect structures

Methods for processing a substrate using multiple substrate support...

Methods for forming interconnect structures

Methods of forming layers on substrates

Patents Applicationslast 30 patents

MICROWAVE PRECLEAN APPARATUS AND PROCESSING METHOD FOR IMPURITY REM...

DUAL SILICIDE PROCESS USING RUTHENIUM SILICIDE

INTERRUPTION LAYER FILL FOR LOW RESISTANCE CONTACTS

LOW-TEMPERATURE DEPOSITION PROCESSES TO FORM MOLYBDENUM-BASED MATER...

METHOD OF MAKING SILICIDE IN HIGH-ASPECT RATIO STRUCTURES BY HYBRID...

SYSTEMS AND METHODS FOR NANOHOLE WET CLEANS

LOW-K AND TANTALUM NITRIDE BARRIER RECOVERY USING A SOAK PROCESS

CONTACT RESISTANCE REDUCTION BY INTEGRATION OF MOLYBDENUM WITH TITA...

POST-TREATMENT FOR REMOVING RESIDUES FROM DIELECTRIC SURFACE

ELECTROCHEMICAL REDUCTION OF SURFACE METAL OXIDES

Method of Selective Metal Deposition Using Separated Reactant Activ...

METAL CAP FOR CONTACT RESISTANCE REDUCTION

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

FIELD SUPPRESSED METAL GAPFILL

Non-Halide Oxygen-Free Organometallic Precursors for ALD/CVD of Met...

METHOD OF DEPOSITING METAL FILMS

DUAL SILICIDE PROCESS USING RUTHENIUM SILICIDE

LOW RESISTIVITY DRAM BURIED WORD LINE STACK

METHOD OF DEPOSITING LAYERS

OVERHANG REDUCTION USING PULSED BIAS

METHODS FOR REMOVING ETCH STOP LAYERS

APPARATUS FOR REMOVING ETCH STOP LAYERS

INTEGRATED METHODS FOR GRAPHENE FORMATION

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

STRUCTURES WITH COPPER DOPED HYBRID METALLIZATION FOR LINE AND VIA

METHODS FOR COPPER DOPED HYBRID METALLIZATION FOR LINE AND VIA

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

GAP FILL METHODS USING CATALYZED DEPOSITION

Low Resistivity DRAM Buried Word Line Stack

Low Resistivity Metal Contact Stack