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Jovan Jevtic
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Milwaukee, WI, US
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Patents Grants
last 30 patents
Information
Patent Grant
Inductively coupled high-density plasma source
Patent number
7,482,757
Issue date
Jan 27, 2009
Tokyo Electron Limited
Bill H. Quon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Addition of power at selected harmonics of plasma processor drive f...
Patent number
6,917,204
Issue date
Jul 12, 2005
Tokyo Electron Limited
Andrej S. Mitrovic
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Inductively coupled high-density plasma source
Publication number
20050099133
Publication date
May 12, 2005
Bill H. Quon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vertically translatable chuck assembly and method for a plasma reac...
Publication number
20040050327
Publication date
Mar 18, 2004
TOKYO ELECTRON LIMITED
Wayne L. Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Addition of power at selected harmonics of plasma processor drive f...
Publication number
20040035837
Publication date
Feb 26, 2004
TOKYO ELECTRON LIMITED
Andrej S. Mitrovic
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Capacitively coupled RF voltage probe
Publication number
20040021454
Publication date
Feb 5, 2004
TOKYO ELECTRON LIMITED
Jovan Jevtic
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and method for improving electron ecceleration
Publication number
20030094239
Publication date
May 22, 2003
Bill H. Quon
H01 - BASIC ELECTRIC ELEMENTS