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Oberkochen, DE
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last 30 patents
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Patent Grant
Optical system
Patent number
10,386,733
Issue date
Aug 20, 2019
Carl Zeiss SMT GmbH
Rolf Freimann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for producing a lens for a lithography apparatus, and measur...
Patent number
10,345,547
Issue date
Jul 9, 2019
Carl Zeiss SMT GmbH
Steffen Fritzsche
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical system and multi facet mirror of a microlithographic projec...
Patent number
9,213,245
Issue date
Dec 15, 2015
Carl Zeiss SMT GmbH
Damian Fiolka
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
OPTICAL SYSTEM
Publication number
20220236652
Publication date
Jul 28, 2022
Carl Zeiss SMT GMBH
Rolf Freimann
G02 - OPTICS
Information
Patent Application
OPTICAL SYSTEM
Publication number
20190354025
Publication date
Nov 21, 2019
Carl Zeiss SMT GMBH
Rolf Freimann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL SYSTEM
Publication number
20180101105
Publication date
Apr 12, 2018
Carl Zeiss SMT GMBH
Rolf Freimann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR PRODUCING A LENS FOR A LITHOGRAPHY APPARATUS, AND MEASUR...
Publication number
20180074278
Publication date
Mar 15, 2018
Steffen Fritzsche
G02 - OPTICS
Information
Patent Application
OPTICAL SYSTEM AND MULTI FACET MIRROR OF A MICROLITHOGRAPHIC PROJEC...
Publication number
20130100429
Publication date
Apr 25, 2013
Carl Zeiss SMT GMBH
Damian Fiolka
G02 - OPTICS
Information
Patent Application
METHOD FOR PRODUCING FACET MIRRORS AND PROJECTION EXPOSURE APPARATUS
Publication number
20130100426
Publication date
Apr 25, 2013
Carl Zeiss SMT GMBH
Berndt Warm
G02 - OPTICS
Information
Patent Application
METHOD FOR PRODUCING FACET MIRRORS AND PROJECTION EXPOSURE APPARATUS
Publication number
20100007866
Publication date
Jan 14, 2010
Carl Zeiss SMT AG
Berndt Warm
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL