Juergen Kleinschmidt

Person

Goettingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Arrangement for generating EUV radiation
- Patent number 9,170,505
- Issue date Oct 27, 2015
- Ushio Denki Kabushiki Kaisha
- Vladimir Korobochko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for the generation of short-wavelength radiati...
- Patent number 8,610,354
- Issue date Dec 17, 2013
- XTREME technologies GmbH
- Max Christian Schuermann
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and arrangement for the stabilization of the source location...
- Patent number 8,546,775
- Issue date Oct 1, 2013
- XTREME technologies GmbH
- Juergen Kleinschmidt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for the generation of EUV radiation from a gas...
- Patent number 8,426,834
- Issue date Apr 23, 2013
- XTREME technologies GmbH
- Juergen Kleinschmidt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and arrangement for the adjustment of characteristics of a b...
- Patent number 8,410,422
- Issue date Apr 2, 2013
- XTREME technologies GmbH
- Denis Bolshukhin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and arrangement for stabilizing the average emitted radiatio...
- Patent number 7,974,321
- Issue date Jul 5, 2011
- Xtreme technologies GmbH
- Jesko Brudermann
- G01 - MEASURING TESTING
Information Patent Grant
Arrangement for radiation generation by means of a gas discharge
- Patent number 7,800,086
- Issue date Sep 21, 2010
- XTREME Technologies GmbH
- Christian Ziener
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement for the suppression of unwanted spectral components in...
- Patent number 7,755,070
- Issue date Jul 13, 2010
- XTREME Technologies GmbH
- René De Bruijn
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Arrangement for switching high electric currents by a gas discharge
- Patent number 7,595,594
- Issue date Sep 29, 2009
- Xtreme technologies GmbH
- Vladimir Korobochko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement for the generation of short-wavelength radiation based...
- Patent number 7,541,604
- Issue date Jun 2, 2009
- XTREME techonolgies GmbH
- Sven Goetze
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement and method for the generation of extreme ultraviolet ra...
- Patent number 7,531,820
- Issue date May 12, 2009
- Xtreme technologies GmbH
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement for the generation of intensive short-wavelength radiat...
- Patent number 7,488,962
- Issue date Feb 10, 2009
- Xtreme technologies GmbH
- Vladimir Korobochko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device and method for generating extreme ultraviolet (EUV) radiation
- Patent number 7,476,884
- Issue date Jan 13, 2009
- Xtreme technologies GmbH
- Kai Gaebel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV radiation source with high radiation output based on a gas disc...
- Patent number 7,414,253
- Issue date Aug 19, 2008
- Xtreme technologies GmbH
- Juergen Kleinschmidt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and arrangement for the suppression of debris in the generat...
- Patent number 7,365,350
- Issue date Apr 29, 2008
- Xtreme technologies GmbH
- Duc Chinh Tran
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser gas replenishment method
- Patent number 7,266,137
- Issue date Sep 4, 2007
- Lambda Physik AG
- Hans-Stephan Albrecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrangement for debris reduction in a radiation source based on a p...
- Patent number 7,079,224
- Issue date Jul 18, 2006
- Xtreme technologies GmbH
- Duc Chinh Tran
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Tunable laser with stabilized grating
- Patent number 7,075,963
- Issue date Jul 11, 2006
- Lambda Physik AG
- Dirk Basting
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrangement for generating pulsed currents with a high repetition r...
- Patent number 7,072,370
- Issue date Jul 4, 2006
- Xtreme technologies GmbH
- Vladimir Korobochko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Absolute wavelength calibration of lithography laser using multiple...
- Patent number 7,006,541
- Issue date Feb 28, 2006
- Lambda Physik AG
- Peter Lokai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser gas replenishment method
- Patent number 6,965,624
- Issue date Nov 15, 2005
- Lambda Physik AG
- Hans-Stephan Albrecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrangement for the generation of EUV radiation with high repetitio...
- Patent number 6,946,669
- Issue date Sep 20, 2005
- Xtreme technologies GmbH
- Juergen Kleinschmidt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for energy stabilization of gas discharged pumped in selecte...
- Patent number 6,914,920
- Issue date Jul 5, 2005
- Xtreme technologies GmbH
- Juergen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrangement for monitoring the energy radiated by an EUV radiation...
- Patent number 6,894,285
- Issue date May 17, 2005
- Xtreme technologies GmbH
- Juergen Kleinschmidt
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Arrangement for generating extreme ultraviolet (EUV) radiation base...
- Patent number 6,894,298
- Issue date May 17, 2005
- Xtreme technologies GmbH
- Imtiaz Ahmad
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for energy control of pulsed driven, gas discharged-coupled...
- Patent number 6,865,212
- Issue date Mar 8, 2005
- Xtreme technologies GmbH
- Juergen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detector arrangement for energy measurement of pulsed x-ray radiation
- Patent number 6,855,932
- Issue date Feb 15, 2005
- Xtreme technologies GmbH
- Guido Schriever
- G01 - MEASURING TESTING
Information Patent Grant
Resonator arrangement for bandwidth control
- Patent number 6,856,638
- Issue date Feb 15, 2005
- Lambda Physik AG
- Konstantin Aab
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stabilization technique for high repetition rate gas discharge lasers
- Patent number 6,834,066
- Issue date Dec 21, 2004
- Lambda Physik AG
- Igor Bragin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for the stabilization of the radiation output of a gas disch...
- Patent number 6,829,261
- Issue date Dec 7, 2004
- Xtreme technologies GmbH
- Juergen Kleinschmidt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Method and Arrangement for the Adjustment of Characteristics of a B...
- Publication number 20120248327
- Publication date Oct 4, 2012
- XTREME TECHNOLOGIES GMBH
- Denis Bolshukhin
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for the Generation of Short-Wavelength Radiati...
- Publication number 20120153829
- Publication date Jun 21, 2012
- XTREME TECHNOLOGIES GMBH
- Max Christian SCHUERMANN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and Arrangement for the Stabilization of the Source Location...
- Publication number 20120112101
- Publication date May 10, 2012
- XTREME TECHNOLOGIES GMBH
- Juergen Kleinschmidt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and Apparatus for the Generation of EUV Radiation from a Gas...
- Publication number 20120080619
- Publication date Apr 5, 2012
- XTREME TECHNOLOGIES GMBH
- Juergen Kleinschmidt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND ARRANGEMENT FOR THE OPERATION OF PLASMA-BASED SHORT-WAVE...
- Publication number 20100078578
- Publication date Apr 1, 2010
- XTREME TECHNOLOGIES GMBH
- Max Christian Schuermann
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ARRANGEMENT FOR GENERATING EUV RADIATION
- Publication number 20090101850
- Publication date Apr 23, 2009
- XTREME TECHNOLOGIES GMBH
- Vladimir Korobochko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ARRANGEMENT FOR SWITCHING HIGH ELECTRIC CURRENTS BY A GAS DISCHARGE
- Publication number 20080265779
- Publication date Oct 30, 2008
- XTREME technologies GmbH;
- Vladimir Korobochko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND ARRANGEMENT FOR STABILIZING THE AVERAGE EMITTED RADIATIO...
- Publication number 20080143989
- Publication date Jun 19, 2008
- XTREME technologies GmbH;
- JESKO BRUDERMANN
- G01 - MEASURING TESTING
Information Patent Application
ARRANGEMENT AND METHOD FOR THE GENERATION OF EUV RADIATION OF HIGH...
- Publication number 20070181834
- Publication date Aug 9, 2007
- XTREME technologies GmbH;
- JUERGEN KLEINSCHMIDT
- G01 - MEASURING TESTING
Information Patent Application
ARRANGEMENT FOR THE GENERATION OF SHORT-WAVELENGTH RADIATION BASED...
- Publication number 20070114946
- Publication date May 24, 2007
- XTREME technologies GmbH;
- SVEN GOETZE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ARRANGEMENT AND METHOD FOR THE GENERATION OF EXTREME ULTRAVIOLET RA...
- Publication number 20070085044
- Publication date Apr 19, 2007
- XTREME technologies GmbH;
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ARRANGEMENT FOR THE SUPPRESSION OF UNWANTED SPECTRAL COMPONENTS IN...
- Publication number 20070080307
- Publication date Apr 12, 2007
- XTREME technologies GmbH;
- RENE De BRUIJN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV radiation source with high radiation output based on a gas disc...
- Publication number 20070045573
- Publication date Mar 1, 2007
- XTREME technologies GmbH;
- Juergen Kleinschmidt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ARRANGEMENT FOR RADIATION GENERATION BY MEANS OF A GAS DISCHARGE
- Publication number 20070040511
- Publication date Feb 22, 2007
- XTREME technologies GmbH;
- Christian ZIENER
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ARRANGEMENT FOR THE GENERATION OF INTENSIVE SHORT-WAVELENGTH RADIAT...
- Publication number 20060273732
- Publication date Dec 7, 2006
- XTREME technologies GmbH;
- Vladimir Korobochko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND ARRANGEMENT FOR THE SUPPRESSION OF DEBRIS IN THE GENERAT...
- Publication number 20060243927
- Publication date Nov 2, 2006
- Duc Chinh Tran
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device and method for generating extreme ultraviolet (EUV) radiation
- Publication number 20060192157
- Publication date Aug 31, 2006
- XTREME technologies GmbH;
- Kai Gaebel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser gas replenishment method
- Publication number 20060056478
- Publication date Mar 16, 2006
- Hans-Stephen Albrecht
- G02 - OPTICS
Information Patent Application
Arrangement for generating pulsed currents with a high repetition r...
- Publication number 20050200304
- Publication date Sep 15, 2005
- XTREME technologies GmbH;
- Vladimir Korobochko
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Laser gas replenishment method
- Publication number 20040252740
- Publication date Dec 16, 2004
- Lambda Physik AG
- Hans-Stephan Albrecht
- G02 - OPTICS
Information Patent Application
Arrangement for debris reduction in a radiation source based on a p...
- Publication number 20040165171
- Publication date Aug 26, 2004
- Duc Chinh Tran
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Arrangement for the generation of EUV radiation
- Publication number 20040155207
- Publication date Aug 12, 2004
- Juergen Kleinschmidt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radiation source with high average EUV radiation output
- Publication number 20040145292
- Publication date Jul 29, 2004
- XTREME technologies GmbH;
- Imtiaz Ahmad
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Absolute wavelength calibration of lithography laser using multiple...
- Publication number 20030210715
- Publication date Nov 13, 2003
- Lambda Physik AG
- Peter Lokai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for the stabilization of the radiation output of a gas disch...
- Publication number 20030201737
- Publication date Oct 30, 2003
- XTREME technologies GmbH;
- Juergen Kleinschmidt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for energy control of pulsed driven, gas discharged-coupled...
- Publication number 20030198263
- Publication date Oct 23, 2003
- XTREME technologies GmbH;
- Juergen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Detector arrangement for energy measurement of pulsed x-ray radiation
- Publication number 20030178566
- Publication date Sep 25, 2003
- XTREME technologies GmbH;
- Guido Schriever
- G01 - MEASURING TESTING
Information Patent Application
Method for energy stabilization of gas discharged pumped in selecte...
- Publication number 20030161362
- Publication date Aug 28, 2003
- XTREME technologies GmbH;
- Juergen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Arrangement for monitoring the energy radiated by an EUV radiation...
- Publication number 20030146391
- Publication date Aug 7, 2003
- XTREME technologies GmbH;
- Juergen Kleinschmidt
- G01 - MEASURING TESTING
Information Patent Application
Arrangement for generating extreme ultraviolet (EUV) radiation base...
- Publication number 20030068012
- Publication date Apr 10, 2003
- XTREME technologies GmbH;
- Imtiaz Ahmad
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Juergen Kleinschmidt

Person

Patents Grantslast 30 patents

Arrangement for generating EUV radiation

Method and apparatus for the generation of short-wavelength radiati...

Method and arrangement for the stabilization of the source location...

Method and apparatus for the generation of EUV radiation from a gas...

Method and arrangement for the adjustment of characteristics of a b...

Method and arrangement for stabilizing the average emitted radiatio...

Arrangement for radiation generation by means of a gas discharge

Arrangement for the suppression of unwanted spectral components in...

Arrangement for switching high electric currents by a gas discharge

Arrangement for the generation of short-wavelength radiation based...

Arrangement and method for the generation of extreme ultraviolet ra...

Arrangement for the generation of intensive short-wavelength radiat...

Device and method for generating extreme ultraviolet (EUV) radiation

EUV radiation source with high radiation output based on a gas disc...

Method and arrangement for the suppression of debris in the generat...

Laser gas replenishment method

Arrangement for debris reduction in a radiation source based on a p...

Tunable laser with stabilized grating

Arrangement for generating pulsed currents with a high repetition r...

Absolute wavelength calibration of lithography laser using multiple...

Laser gas replenishment method

Arrangement for the generation of EUV radiation with high repetitio...

Method for energy stabilization of gas discharged pumped in selecte...

Arrangement for monitoring the energy radiated by an EUV radiation...

Arrangement for generating extreme ultraviolet (EUV) radiation base...

Method for energy control of pulsed driven, gas discharged-coupled...

Detector arrangement for energy measurement of pulsed x-ray radiation

Resonator arrangement for bandwidth control

Stabilization technique for high repetition rate gas discharge lasers

Method for the stabilization of the radiation output of a gas disch...

Patents Applicationslast 30 patents

Method and Arrangement for the Adjustment of Characteristics of a B...

Method and Apparatus for the Generation of Short-Wavelength Radiati...

Method and Arrangement for the Stabilization of the Source Location...

Method and Apparatus for the Generation of EUV Radiation from a Gas...

METHOD AND ARRANGEMENT FOR THE OPERATION OF PLASMA-BASED SHORT-WAVE...

ARRANGEMENT FOR GENERATING EUV RADIATION

ARRANGEMENT FOR SWITCHING HIGH ELECTRIC CURRENTS BY A GAS DISCHARGE

METHOD AND ARRANGEMENT FOR STABILIZING THE AVERAGE EMITTED RADIATIO...

ARRANGEMENT AND METHOD FOR THE GENERATION OF EUV RADIATION OF HIGH...

ARRANGEMENT FOR THE GENERATION OF SHORT-WAVELENGTH RADIATION BASED...

ARRANGEMENT AND METHOD FOR THE GENERATION OF EXTREME ULTRAVIOLET RA...

ARRANGEMENT FOR THE SUPPRESSION OF UNWANTED SPECTRAL COMPONENTS IN...

EUV radiation source with high radiation output based on a gas disc...

ARRANGEMENT FOR RADIATION GENERATION BY MEANS OF A GAS DISCHARGE

ARRANGEMENT FOR THE GENERATION OF INTENSIVE SHORT-WAVELENGTH RADIAT...

METHOD AND ARRANGEMENT FOR THE SUPPRESSION OF DEBRIS IN THE GENERAT...

Device and method for generating extreme ultraviolet (EUV) radiation

Laser gas replenishment method

Arrangement for generating pulsed currents with a high repetition r...

Laser gas replenishment method

Arrangement for debris reduction in a radiation source based on a p...

Arrangement for the generation of EUV radiation

Radiation source with high average EUV radiation output

Absolute wavelength calibration of lithography laser using multiple...

Method for the stabilization of the radiation output of a gas disch...

Method for energy control of pulsed driven, gas discharged-coupled...

Detector arrangement for energy measurement of pulsed x-ray radiation

Method for energy stabilization of gas discharged pumped in selecte...

Arrangement for monitoring the energy radiated by an EUV radiation...

Arrangement for generating extreme ultraviolet (EUV) radiation base...