Jui-Hung Peng

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor wafer cooling
- Patent number 11,768,484
- Issue date Sep 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Yao Lee
- G05 - CONTROLLING REGULATING
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 11,500,299
- Issue date Nov 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yung-Yao Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer alignment mark scheme
- Patent number 11,162,777
- Issue date Nov 2, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Hsiang Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for generating an electromagnetic radiation
- Patent number 11,153,957
- Issue date Oct 19, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu Jeng Hsu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 10,747,128
- Issue date Aug 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yung-Yao Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer alignment mark scheme
- Patent number 10,514,247
- Issue date Dec 24, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Hsiang Tseng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of determining quality of a light source
- Patent number RE47272
- Issue date Mar 5, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Nan-Jung Chen
Information Patent Grant
Methods of determining quality of a light source
- Patent number RE47197
- Issue date Jan 8, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Nan-Jung Chen
Information Patent Grant
Patterning method and patterning apparatus for fabricating a resist...
- Patent number 10,061,215
- Issue date Aug 28, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yung-Yao Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor method and associated apparatus
- Patent number 9,978,625
- Issue date May 22, 2018
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yung-Yao Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer alignment mark scheme
- Patent number 9,863,754
- Issue date Jan 9, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Hsiang Tseng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Synchronized integrated metrology for overlay-shift reduction
- Patent number 9,841,687
- Issue date Dec 12, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yung-Yao Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV collector with orientation to avoid contamination
- Patent number 9,826,615
- Issue date Nov 21, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jian-Yuan Su
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of heating/cooling a substrate
- Patent number 9,781,773
- Issue date Oct 3, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jui-Chun Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography apparatus having dual reticle edge masking assemblies a...
- Patent number 9,709,904
- Issue date Jul 18, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tung-Li Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
In-line inspection and clean for immersion lithography
- Patent number 9,658,536
- Issue date May 23, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tung-Li Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer alignment mark scheme
- Patent number 9,640,487
- Issue date May 2, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Hsiang Tseng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
In-situ immersion hood cleaning
- Patent number 9,632,426
- Issue date Apr 25, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Chun Peng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focus metrology method and photolithography method and system
- Patent number 9,587,929
- Issue date Mar 7, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hung-Ming Kuo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography scanner throughput
- Patent number 9,529,275
- Issue date Dec 27, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Hsun Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Rotatable heating-cooling plate and element in proximity thereto
- Patent number 9,282,592
- Issue date Mar 8, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Chun Peng
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Flexible wafer leveling design for various orientation of line/trench
- Patent number 9,228,827
- Issue date Jan 5, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-Hung Chao
- G01 - MEASURING TESTING
Information Patent Grant
Overlay abnormality gating by Z data
- Patent number 9,123,583
- Issue date Sep 1, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hsien Lin
- G01 - MEASURING TESTING
Information Patent Grant
Lithography apparatus having dual reticle edge masking assemblies a...
- Patent number 9,081,297
- Issue date Jul 14, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tung-Li Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for cleaning a wafer chuck
- Patent number 8,955,530
- Issue date Feb 17, 2015
- Taiwan Semiconductor Manufaturing Company, Ltd.
- Jui-Chun Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Track spin wafer chuck
- Patent number 8,616,539
- Issue date Dec 31, 2013
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Hsiang Tseng
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Dual wavelength exposure method and system for semiconductor device...
- Patent number 8,338,262
- Issue date Dec 25, 2012
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Heng-Jen Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for reducing down time of a lithography system
- Patent number 8,237,132
- Issue date Aug 7, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Chun Peng
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for improving immersion scanner overlay performance
- Patent number 8,199,314
- Issue date Jun 12, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Chung Peng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of determining quality of a light source
- Patent number 8,184,896
- Issue date May 22, 2012
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Nan-Jung Chen
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR WAFER COOLING
- Publication number 20230384776
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Yao LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EXPOSURE METHOD AND EXPOSURE APPARATUS
- Publication number 20230076566
- Publication date Mar 9, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Yao LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR WAFER COOLING
- Publication number 20220317668
- Publication date Oct 6, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Yung-Yao LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EXPOSURE METHOD AND EXPOSURE APPARATUS
- Publication number 20200379361
- Publication date Dec 3, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yung-Yao LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR GENERATING AN ELECTROMAGNETIC RADIATION
- Publication number 20200137863
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- TZU JENG HSU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Wafer Alignment Mark Scheme
- Publication number 20200132436
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Hsiang TSENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD AND EXPOSURE APPARATUS
- Publication number 20190146351
- Publication date May 16, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yung-Yao LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Wafer Alignment Mark Scheme
- Publication number 20180128597
- Publication date May 10, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Hsiang TSENG
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR METHOD AND ASSOCIATED APPARATUS
- Publication number 20170352564
- Publication date Dec 7, 2017
- Taiwan Semiconductor Manufacturing company Ltd.
- YUNG-YAO LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERNING METHOD AND PATTERNING APPARATUS FOR FABRICATING A RESIST...
- Publication number 20170277044
- Publication date Sep 28, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yung-Yao LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV COLLECTOR WITH ORIENTATION TO AVOID CONTAMINATION
- Publication number 20170086283
- Publication date Mar 23, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Jian-Yuan Su
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Synchronized Integrated Metrology for Overlay-Shift Reduction
- Publication number 20170017166
- Publication date Jan 19, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Yung-Yao Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF HEATING/COOLING A SUBSTRATE
- Publication number 20160183329
- Publication date Jun 23, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Chun PENG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
FOCUS METROLOGY METHOD AND PHOTOLITHOGRAPHY METHOD AND SYSTEM
- Publication number 20160018743
- Publication date Jan 21, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hung-Ming KUO
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY APPARATUS HAVING DUAL RETICLE EDGE MASKING ASSEMBLIES A...
- Publication number 20150293462
- Publication date Oct 15, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tung-Li WU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IN-LINE INSPECTION AND CLEAN FOR IMMERSION LITHOGRAPHY
- Publication number 20150241789
- Publication date Aug 27, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tung-Li WU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WAFER ALIGNMENT MARK SCHEME
- Publication number 20150219448
- Publication date Aug 6, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Hsiang TSENG
- G01 - MEASURING TESTING
Information Patent Application
Overlay Abnormality Gating by Z Data
- Publication number 20150015870
- Publication date Jan 15, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Hsien Lin
- G01 - MEASURING TESTING
Information Patent Application
WAFER ALIGNMENT MARK SCHEME
- Publication number 20150002846
- Publication date Jan 1, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Hsiang TSENG
- G01 - MEASURING TESTING
Information Patent Application
FLEXIBLE WAFER LEVELING DESIGN FOR VARIOUS ORIENTATION OF LINE/TRENCH
- Publication number 20140362359
- Publication date Dec 11, 2014
- Kuo-Hung Chao
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY APPARATUS HAVING DUAL RETICLE EDGE MASKING ASSEMBLIES A...
- Publication number 20130293857
- Publication date Nov 7, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tung-Li WU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WAFER ALIGNMENT MARK SCHEME
- Publication number 20130258339
- Publication date Oct 3, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Hsiang TSENG
- G01 - MEASURING TESTING
Information Patent Application
Track Spin Wafer Chuck
- Publication number 20130156947
- Publication date Jun 20, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Wei-Hsiang Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In-Situ Immersion Hood Cleaning
- Publication number 20120180823
- Publication date Jul 19, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Chun Peng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and Method for Cleaning a Wafer Chuck
- Publication number 20120180813
- Publication date Jul 19, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Chun Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR IMPROVING IMMERSION SCANNER OVERLAY PERFORMANCE
- Publication number 20120045192
- Publication date Feb 23, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Cheng PENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR REDUCING DOWN TIME OF A LITHOGRAPHY SYSTEM
- Publication number 20100321660
- Publication date Dec 23, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Chun Peng
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DUAL WAVELENGTH EXPOSURE METHOD AND SYSTEM FOR SEMICONDUCTOR DEVICE...
- Publication number 20100308439
- Publication date Dec 9, 2010
- Taiwan Semiconductor Manufacturing Co., LTD
- Heng-Jen LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ROTATABLE PLATE AND HEATING/COOLING ELEMENT IN PROXIMITY THERETO
- Publication number 20100219175
- Publication date Sep 2, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Chun Peng
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTERNAL DEVICE WITH A DRIVER AUTO-RUN INSTALLATION AND METHOD THEREOF
- Publication number 20090193152
- Publication date Jul 30, 2009
- Ting-Chun Wang
- G06 - COMPUTING CALCULATING COUNTING

Jui-Hung Peng

Person

Patents Grantslast 30 patents

Semiconductor wafer cooling

Exposure method and exposure apparatus

Wafer alignment mark scheme

Apparatus and method for generating an electromagnetic radiation

Exposure method and exposure apparatus

Wafer alignment mark scheme

Methods of determining quality of a light source

Methods of determining quality of a light source

Patterning method and patterning apparatus for fabricating a resist...

Semiconductor method and associated apparatus

Wafer alignment mark scheme

Synchronized integrated metrology for overlay-shift reduction

EUV collector with orientation to avoid contamination

Method of heating/cooling a substrate

Lithography apparatus having dual reticle edge masking assemblies a...

In-line inspection and clean for immersion lithography

Wafer alignment mark scheme

In-situ immersion hood cleaning

Focus metrology method and photolithography method and system

Lithography scanner throughput

Rotatable heating-cooling plate and element in proximity thereto

Flexible wafer leveling design for various orientation of line/trench

Overlay abnormality gating by Z data

Lithography apparatus having dual reticle edge masking assemblies a...

System and method for cleaning a wafer chuck

Track spin wafer chuck

Dual wavelength exposure method and system for semiconductor device...

Method and apparatus for reducing down time of a lithography system

System and method for improving immersion scanner overlay performance

Methods of determining quality of a light source

Patents Applicationslast 30 patents

SEMICONDUCTOR WAFER COOLING

EXPOSURE METHOD AND EXPOSURE APPARATUS

SEMICONDUCTOR WAFER COOLING

EXPOSURE METHOD AND EXPOSURE APPARATUS

APPARATUS AND METHOD FOR GENERATING AN ELECTROMAGNETIC RADIATION

Wafer Alignment Mark Scheme

EXPOSURE METHOD AND EXPOSURE APPARATUS

Wafer Alignment Mark Scheme

SEMICONDUCTOR METHOD AND ASSOCIATED APPARATUS

PATTERNING METHOD AND PATTERNING APPARATUS FOR FABRICATING A RESIST...

EUV COLLECTOR WITH ORIENTATION TO AVOID CONTAMINATION

Synchronized Integrated Metrology for Overlay-Shift Reduction

METHOD OF HEATING/COOLING A SUBSTRATE

FOCUS METROLOGY METHOD AND PHOTOLITHOGRAPHY METHOD AND SYSTEM

LITHOGRAPHY APPARATUS HAVING DUAL RETICLE EDGE MASKING ASSEMBLIES A...

IN-LINE INSPECTION AND CLEAN FOR IMMERSION LITHOGRAPHY

WAFER ALIGNMENT MARK SCHEME

Overlay Abnormality Gating by Z Data

WAFER ALIGNMENT MARK SCHEME

FLEXIBLE WAFER LEVELING DESIGN FOR VARIOUS ORIENTATION OF LINE/TRENCH

LITHOGRAPHY APPARATUS HAVING DUAL RETICLE EDGE MASKING ASSEMBLIES A...

WAFER ALIGNMENT MARK SCHEME

Track Spin Wafer Chuck

In-Situ Immersion Hood Cleaning

System and Method for Cleaning a Wafer Chuck

SYSTEM AND METHOD FOR IMPROVING IMMERSION SCANNER OVERLAY PERFORMANCE

METHOD AND APPARATUS FOR REDUCING DOWN TIME OF A LITHOGRAPHY SYSTEM

DUAL WAVELENGTH EXPOSURE METHOD AND SYSTEM FOR SEMICONDUCTOR DEVICE...

ROTATABLE PLATE AND HEATING/COOLING ELEMENT IN PROXIMITY THERETO

EXTERNAL DEVICE WITH A DRIVER AUTO-RUN INSTALLATION AND METHOD THEREOF