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Jui-Hung Peng

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  • Hsinchu, TW
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SEMICONDUCTOR WAFER COOLING
    • Publication number 20250216841
    • Publication date Jul 3, 2025
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yung-Yao LEE
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    SEMICONDUCTOR WAFER COOLING
    • Publication number 20230384776
    • Publication date Nov 30, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yung-Yao LEE
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    EXPOSURE METHOD AND EXPOSURE APPARATUS
    • Publication number 20230076566
    • Publication date Mar 9, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yung-Yao LEE
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SEMICONDUCTOR WAFER COOLING
    • Publication number 20220317668
    • Publication date Oct 6, 2022
    • Taiwan Semiconductor Manufacturing Company Limited
    • Yung-Yao LEE
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    EXPOSURE METHOD AND EXPOSURE APPARATUS
    • Publication number 20200379361
    • Publication date Dec 3, 2020
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Yung-Yao LEE
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    APPARATUS AND METHOD FOR GENERATING AN ELECTROMAGNETIC RADIATION
    • Publication number 20200137863
    • Publication date Apr 30, 2020
    • Taiwan Semiconductor Manufacturing company Ltd.
    • TZU JENG HSU
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Wafer Alignment Mark Scheme
    • Publication number 20200132436
    • Publication date Apr 30, 2020
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Wei-Hsiang TSENG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    EXPOSURE METHOD AND EXPOSURE APPARATUS
    • Publication number 20190146351
    • Publication date May 16, 2019
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Yung-Yao LEE
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Wafer Alignment Mark Scheme
    • Publication number 20180128597
    • Publication date May 10, 2018
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Wei-Hsiang TSENG
    • G01 - MEASURING TESTING
  • Information Patent Application

    SEMICONDUCTOR METHOD AND ASSOCIATED APPARATUS
    • Publication number 20170352564
    • Publication date Dec 7, 2017
    • Taiwan Semiconductor Manufacturing company Ltd.
    • YUNG-YAO LEE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PATTERNING METHOD AND PATTERNING APPARATUS FOR FABRICATING A RESIST...
    • Publication number 20170277044
    • Publication date Sep 28, 2017
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Yung-Yao LEE
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    EUV COLLECTOR WITH ORIENTATION TO AVOID CONTAMINATION
    • Publication number 20170086283
    • Publication date Mar 23, 2017
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Jian-Yuan Su
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Synchronized Integrated Metrology for Overlay-Shift Reduction
    • Publication number 20170017166
    • Publication date Jan 19, 2017
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Yung-Yao Lee
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHOD OF HEATING/COOLING A SUBSTRATE
    • Publication number 20160183329
    • Publication date Jun 23, 2016
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Jui-Chun PENG
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    FOCUS METROLOGY METHOD AND PHOTOLITHOGRAPHY METHOD AND SYSTEM
    • Publication number 20160018743
    • Publication date Jan 21, 2016
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Hung-Ming KUO
    • G01 - MEASURING TESTING
  • Information Patent Application

    LITHOGRAPHY APPARATUS HAVING DUAL RETICLE EDGE MASKING ASSEMBLIES A...
    • Publication number 20150293462
    • Publication date Oct 15, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Tung-Li WU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    IN-LINE INSPECTION AND CLEAN FOR IMMERSION LITHOGRAPHY
    • Publication number 20150241789
    • Publication date Aug 27, 2015
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tung-Li WU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    WAFER ALIGNMENT MARK SCHEME
    • Publication number 20150219448
    • Publication date Aug 6, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Wei-Hsiang TSENG
    • G01 - MEASURING TESTING
  • Information Patent Application

    Overlay Abnormality Gating by Z Data
    • Publication number 20150015870
    • Publication date Jan 15, 2015
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Chun-Hsien Lin
    • G01 - MEASURING TESTING
  • Information Patent Application

    WAFER ALIGNMENT MARK SCHEME
    • Publication number 20150002846
    • Publication date Jan 1, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Wei-Hsiang TSENG
    • G01 - MEASURING TESTING
  • Information Patent Application

    FLEXIBLE WAFER LEVELING DESIGN FOR VARIOUS ORIENTATION OF LINE/TRENCH
    • Publication number 20140362359
    • Publication date Dec 11, 2014
    • Kuo-Hung Chao
    • G01 - MEASURING TESTING
  • Information Patent Application

    LITHOGRAPHY APPARATUS HAVING DUAL RETICLE EDGE MASKING ASSEMBLIES A...
    • Publication number 20130293857
    • Publication date Nov 7, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Tung-Li WU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    WAFER ALIGNMENT MARK SCHEME
    • Publication number 20130258339
    • Publication date Oct 3, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Wei-Hsiang TSENG
    • G01 - MEASURING TESTING
  • Information Patent Application

    Track Spin Wafer Chuck
    • Publication number 20130156947
    • Publication date Jun 20, 2013
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Wei-Hsiang Tseng
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    In-Situ Immersion Hood Cleaning
    • Publication number 20120180823
    • Publication date Jul 19, 2012
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Jui-Chun Peng
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    System and Method for Cleaning a Wafer Chuck
    • Publication number 20120180813
    • Publication date Jul 19, 2012
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Jui-Chun Peng
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SYSTEM AND METHOD FOR IMPROVING IMMERSION SCANNER OVERLAY PERFORMANCE
    • Publication number 20120045192
    • Publication date Feb 23, 2012
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Jui-Cheng PENG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHOD AND APPARATUS FOR REDUCING DOWN TIME OF A LITHOGRAPHY SYSTEM
    • Publication number 20100321660
    • Publication date Dec 23, 2010
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Jui-Chun Peng
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    DUAL WAVELENGTH EXPOSURE METHOD AND SYSTEM FOR SEMICONDUCTOR DEVICE...
    • Publication number 20100308439
    • Publication date Dec 9, 2010
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Heng-Jen LEE
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    ROTATABLE PLATE AND HEATING/COOLING ELEMENT IN PROXIMITY THERETO
    • Publication number 20100219175
    • Publication date Sep 2, 2010
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Jui-Chun Peng
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR