Juline Shoeb

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Etching isolation features and dense features within a substrate
- Patent number 12,119,232
- Issue date Oct 15, 2024
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-level parameter and frequency pulsing with a low angular spread
- Patent number 12,068,131
- Issue date Aug 20, 2024
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective silicon dioxide removal using low pressure low bias deute...
- Patent number 12,057,319
- Issue date Aug 6, 2024
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for achieving peak ion energy enhancement with...
- Patent number 11,915,912
- Issue date Feb 27, 2024
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for achieving peak ion energy enhancement with...
- Patent number 11,569,067
- Issue date Jan 31, 2023
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-level parameter and frequency pulsing with a low angular spread
- Patent number 11,462,390
- Issue date Oct 4, 2022
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching isolation features and dense features within a substrate
- Patent number 11,398,387
- Issue date Jul 26, 2022
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for achieving peak ion energy enhancement with...
- Patent number 11,049,693
- Issue date Jun 29, 2021
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monoenergetic ion generation for controlled etch
- Patent number 11,011,351
- Issue date May 18, 2021
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-level pulsing of DC and RF signals
- Patent number 10,755,896
- Issue date Aug 25, 2020
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-level pulsing of DC and RF signals
- Patent number 10,580,618
- Issue date Mar 3, 2020
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-level parameter and frequency pulsing with a low angular spread
- Patent number 10,573,494
- Issue date Feb 25, 2020
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for achieving peak ion energy enhancement with...
- Patent number 10,395,894
- Issue date Aug 27, 2019
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatuses for etch profile matching by surface kineti...
- Patent number 10,386,828
- Issue date Aug 20, 2019
- Lam Research Corporation
- Mehmet Derya Tetiker
- G05 - CONTROLLING REGULATING
Information Patent Grant
Multi-level pulsing of DC and RF signals
- Patent number 10,304,660
- Issue date May 28, 2019
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-level parameter and frequency pulsing with a low angular spread
- Patent number 10,224,183
- Issue date Mar 5, 2019
- Lam Research Corporation
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SELECTIVE SILICON DIOXIDE REMOVAL USING LOW PRESSURE LOW BIAS DEUTE...
- Publication number 20240355636
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH...
- Publication number 20240162005
- Publication date May 16, 2024
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR CONTROLLING PLASMA DENSITY DISTRIBUTION PROFILES INCLUD...
- Publication number 20230352272
- Publication date Nov 2, 2023
- LAM RESEARCH CORPORATION
- Juline SHOEB
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSING RF COILS OF A PLASMA CHAMBER IN REVERSE SYNCHRONIZATION
- Publication number 20230282448
- Publication date Sep 7, 2023
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH...
- Publication number 20230124201
- Publication date Apr 20, 2023
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LEVEL PARAMETER AND FREQUENCY PULSING WITH A LOW ANGULAR SPREAD
- Publication number 20230005718
- Publication date Jan 5, 2023
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING ISOLATION FEATURES AND DENSE FEATURES WITHIN A SUBSTRATE
- Publication number 20220319856
- Publication date Oct 6, 2022
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE SILICON DIOXIDE REMOVAL USING LOW PRESSURE LOW BIAS DEUTE...
- Publication number 20220148852
- Publication date May 12, 2022
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING ISOLATION FEATURES AND DENSE FEATURES WITHIN A SUBSTRATE
- Publication number 20210358757
- Publication date Nov 18, 2021
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH...
- Publication number 20210313149
- Publication date Oct 7, 2021
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LEVEL PARAMETER AND FREQUENCY PULSING WITH A LOW ANGULAR SPREAD
- Publication number 20200176222
- Publication date Jun 4, 2020
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LEVEL PULSING OF DC AND RF SIGNALS
- Publication number 20200168438
- Publication date May 28, 2020
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOENERGETIC ION GENERATION FOR CONTROLLED ETCH
- Publication number 20200020510
- Publication date Jan 16, 2020
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH...
- Publication number 20190362942
- Publication date Nov 28, 2019
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LEVEL PARAMETER AND FREQUENCY PULSING WITH A LOW ANGULAR SPREAD
- Publication number 20190295820
- Publication date Sep 26, 2019
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LEVEL PULSING OF DC AND RF SIGNALS
- Publication number 20190295821
- Publication date Sep 26, 2019
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH...
- Publication number 20190066979
- Publication date Feb 28, 2019
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUSES FOR ETCH PROFILE MATCHING BY SURFACE KINETI...
- Publication number 20170176983
- Publication date Jun 22, 2017
- LAM RESEARCH CORPORATION
- Mehmet Derya Tetiker
- G05 - CONTROLLING REGULATING

Juline Shoeb

Person

Patents Grantslast 30 patents

Etching isolation features and dense features within a substrate

Multi-level parameter and frequency pulsing with a low angular spread

Selective silicon dioxide removal using low pressure low bias deute...

Systems and methods for achieving peak ion energy enhancement with...

Systems and methods for achieving peak ion energy enhancement with...

Multi-level parameter and frequency pulsing with a low angular spread

Etching isolation features and dense features within a substrate

Systems and methods for achieving peak ion energy enhancement with...

Monoenergetic ion generation for controlled etch

Multi-level pulsing of DC and RF signals

Multi-level pulsing of DC and RF signals

Multi-level parameter and frequency pulsing with a low angular spread

Systems and methods for achieving peak ion energy enhancement with...

Methods and apparatuses for etch profile matching by surface kineti...

Multi-level pulsing of DC and RF signals

Multi-level parameter and frequency pulsing with a low angular spread

Patents Applicationslast 30 patents

SELECTIVE SILICON DIOXIDE REMOVAL USING LOW PRESSURE LOW BIAS DEUTE...

SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH...

SYSTEMS FOR CONTROLLING PLASMA DENSITY DISTRIBUTION PROFILES INCLUD...

PULSING RF COILS OF A PLASMA CHAMBER IN REVERSE SYNCHRONIZATION

SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH...

MULTI-LEVEL PARAMETER AND FREQUENCY PULSING WITH A LOW ANGULAR SPREAD

ETCHING ISOLATION FEATURES AND DENSE FEATURES WITHIN A SUBSTRATE

SELECTIVE SILICON DIOXIDE REMOVAL USING LOW PRESSURE LOW BIAS DEUTE...

ETCHING ISOLATION FEATURES AND DENSE FEATURES WITHIN A SUBSTRATE

SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH...

MULTI-LEVEL PARAMETER AND FREQUENCY PULSING WITH A LOW ANGULAR SPREAD

MULTI-LEVEL PULSING OF DC AND RF SIGNALS

MONOENERGETIC ION GENERATION FOR CONTROLLED ETCH

SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH...

MULTI-LEVEL PARAMETER AND FREQUENCY PULSING WITH A LOW ANGULAR SPREAD

MULTI-LEVEL PULSING OF DC AND RF SIGNALS

SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH...

METHODS AND APPARATUSES FOR ETCH PROFILE MATCHING BY SURFACE KINETI...