Jun-Ichi Shimada

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Niiza-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
High frequency power source and its control method, and plasma proc...
- Patent number 8,286,581
- Issue date Oct 16, 2012
- Tokyo Electron Limited
- Toshihiro Hayami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Matching unit and plasma processing system
- Patent number 7,112,926
- Issue date Sep 26, 2006
- Tokyo Electron Limited
- Shinji Himori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
High frequency power source and its control method, and plasma proc...
- Publication number 20040222184
- Publication date Nov 11, 2004
- TOKYO ELECTRON LIMITED
- Toshihiro Hayami
- H01 - BASIC ELECTRIC ELEMENTS