Jun OGAWA

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,970,768
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Hideomi Hane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 11,881,379
- Issue date Jan 23, 2024
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method
- Patent number 11,837,465
- Issue date Dec 5, 2023
- Tokyo Electron Limited
- Jun Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus and method of operating film forming apparatus
- Patent number 11,613,811
- Issue date Mar 28, 2023
- Tokyo Electron Limited
- Jun Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 11,515,153
- Issue date Nov 29, 2022
- Tokyo Electron Limited
- Jun Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,508,571
- Issue date Nov 22, 2022
- Tokyo Electron Limited
- Jun Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method of deposition apparatus
- Patent number 11,473,194
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Jun Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing method
- Patent number 11,414,753
- Issue date Aug 16, 2022
- Tokyo Electron Limited
- Hideomi Hane
- B08 - CLEANING
Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 11,404,272
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 11,404,271
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,201,053
- Issue date Dec 14, 2021
- Tokyo Electron Limited
- Noriaki Fukiage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,171,014
- Issue date Nov 9, 2021
- Tokyo Electron Limited
- Hideomi Hane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and apparatus of manuf...
- Patent number 10,900,121
- Issue date Jan 26, 2021
- Tokyo Electron Limited
- Noriaki Fukiage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,879,066
- Issue date Dec 29, 2020
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 10,714,332
- Issue date Jul 14, 2020
- Tokyo Electron Limited
- Noriaki Fukiage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus, method of cleaning film forming apparatus,...
- Patent number 10,626,496
- Issue date Apr 21, 2020
- Tokyo Electron Limited
- Takayuki Karakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and operation method of film forming apparatus
- Patent number 10,550,470
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Hideomi Hane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus, and storage medium
- Patent number 10,438,791
- Issue date Oct 8, 2019
- Tokyo Electron Limited
- Hideomi Hane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and semiconductor device...
- Patent number 10,297,443
- Issue date May 21, 2019
- Tokyo Electron Limited
- Hiroaki Ikegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,290,496
- Issue date May 14, 2019
- Tokyo Electron Limited
- Jun Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,191,378
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,176,992
- Issue date Jan 8, 2019
- Tokyo Electron Limited
- Kazuhide Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Silicon nitride film forming method and silicon nitride film formin...
- Patent number 10,151,029
- Issue date Dec 11, 2018
- Tokyo Electron Limited
- Noriaki Fukiage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,141,187
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 9,970,110
- Issue date May 15, 2018
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 9,922,820
- Issue date Mar 20, 2018
- Tokyo Electron Limited
- Noriaki Fukiage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 9,892,909
- Issue date Feb 13, 2018
- Tokyo Electron Limited
- Noriaki Fukiage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming metal oxide film
- Patent number 9,552,981
- Issue date Jan 24, 2017
- Tokyo Electron Limited
- Kazuo Yabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method
- Patent number 9,252,043
- Issue date Feb 2, 2016
- Tokyo Electron Limited
- Hiroaki Ikegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus having a turntable and film deposition me...
- Patent number 9,153,429
- Issue date Oct 6, 2015
- Tokyo Electron Limited
- Jun Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240175117
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Ken OKOSHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240175122
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Satoshi ONODERA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
- Publication number 20240096595
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230395368
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Kazumasa IGARASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230395371
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Kazumasa IGARASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
- Publication number 20220328301
- Publication date Oct 13, 2022
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEPOSITION METHOD
- Publication number 20220084811
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Jun OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD
- Publication number 20210130950
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Hideomi HANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND METHOD OF OPERATING FILM FORMING APPARATUS
- Publication number 20210095375
- Publication date Apr 1, 2021
- TOKYO ELECTRON LIMITED
- Jun OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210066067
- Publication date Mar 4, 2021
- TOKYO ELECTRON LIMITED
- Jun OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20210054501
- Publication date Feb 25, 2021
- TOKYO ELECTRON LIMITED
- Hideomi HANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20210054502
- Publication date Feb 25, 2021
- TOKYO ELECTRON LIMITED
- Hideomi HANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20210057207
- Publication date Feb 25, 2021
- TOKYO ELECTRON LIMITED
- Jun OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING METHOD OF DEPOSITION APPARATUS
- Publication number 20200299835
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Jun OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20200294787
- Publication date Sep 17, 2020
- TOKYO ELECTRON LIMITED
- Noriaki FUKIAGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20190292662
- Publication date Sep 26, 2019
- TOKYO ELECTRON LIMITED
- Hideomi HANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND OPERATION METHOD OF FILM FORMING APPARATUS
- Publication number 20190127849
- Publication date May 2, 2019
- TOKYO ELECTRON LIMITED
- Hideomi HANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20190115204
- Publication date Apr 18, 2019
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20190096658
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20190041756
- Publication date Feb 7, 2019
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Method, Film Forming Apparatus, and Storage Medium
- Publication number 20180366315
- Publication date Dec 20, 2018
- TOKYO ELECTRON LIMITED
- Hideomi Hane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS, METHOD OF CLEANING FILM FORMING APPARATUS,...
- Publication number 20180355479
- Publication date Dec 13, 2018
- TOKYO ELECTRON LIMITED
- Takayuki KARAKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180358235
- Publication date Dec 13, 2018
- TOKYO ELECTRON LIMITED
- Hideomi HANE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20180245216
- Publication date Aug 30, 2018
- TOKYO ELECTRON LIMITED
- Jun OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20180237914
- Publication date Aug 23, 2018
- TOKYO ELECTRON LIMITED
- Jun OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION PROCESSING METHOD AND FILM FORMATION PROCESING APPAR...
- Publication number 20180142350
- Publication date May 24, 2018
- TOKYO ELECTRON LIMITED
- Noriaki Fukiage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON NITRIDE FILM FORMING METHOD AND SILICON NITRIDE FILM FORMIN...
- Publication number 20180037992
- Publication date Feb 8, 2018
- TOKYO ELECTRON LIMITED
- Noriaki FUKIAGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180033618
- Publication date Feb 1, 2018
- TOKYO ELECTRON LIMITED
- Jun OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20180019113
- Publication date Jan 18, 2018
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device Manufacturing Method and Semiconductor Device...
- Publication number 20170278698
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Hiroaki IKEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Film forming method and film forming apparatus

Film deposition apparatus for fine pattern forming

Deposition method

Film forming apparatus and method of operating film forming apparatus

Film forming apparatus and film forming method

Film forming method and film forming apparatus

Cleaning method of deposition apparatus

Processing method

Film deposition apparatus for fine pattern forming

Film deposition apparatus for fine pattern forming

Film forming method and film forming apparatus

Substrate processing method and substrate processing apparatus

Method of manufacturing semiconductor device and apparatus of manuf...

Mask pattern forming method, fine pattern forming method, and film...

Film forming method and film forming apparatus

Film forming apparatus, method of cleaning film forming apparatus,...

Film forming apparatus and operation method of film forming apparatus

Film forming method, film forming apparatus, and storage medium

Semiconductor device manufacturing method and semiconductor device...

Substrate processing apparatus and substrate processing method

Mask pattern forming method, fine pattern forming method, and film...

Mask pattern forming method, fine pattern forming method, and film...

Silicon nitride film forming method and silicon nitride film formin...

Mask pattern forming method, fine pattern forming method, and film...

Plasma processing apparatus

Film forming method and film forming apparatus

Film forming method and film forming apparatus

Method and apparatus for forming metal oxide film

Film deposition method

Film deposition apparatus having a turntable and film deposition me...

Patents Applicationslast 30 patents

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING

DEPOSITION METHOD

PROCESSING METHOD

FILM FORMING APPARATUS AND METHOD OF OPERATING FILM FORMING APPARATUS

FILM FORMING APPARATUS AND FILM FORMING METHOD

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

CLEANING METHOD OF DEPOSITION APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

FILM FORMING APPARATUS AND OPERATION METHOD OF FILM FORMING APPARATUS

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

Film Forming Method, Film Forming Apparatus, and Storage Medium

FILM FORMING APPARATUS, METHOD OF CLEANING FILM FORMING APPARATUS,...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

FILM FORMING APPARATUS

FILM FORMING APPARATUS

FILM FORMATION PROCESSING METHOD AND FILM FORMATION PROCESING APPAR...

SILICON NITRIDE FILM FORMING METHOD AND SILICON NITRIDE FILM FORMIN...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

Semiconductor Device Manufacturing Method and Semiconductor Device...