Jun OYABU

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 9,524,847
- Issue date Dec 20, 2016
- Tokyo Electron Limited
- Nobuhiro Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 8,592,319
- Issue date Nov 26, 2013
- Tokyo Electron Limited
- Nobuhiro Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of setting thickness of dielectric and substrate processing...
- Patent number 8,426,318
- Issue date Apr 23, 2013
- Tokyo Electron Limited
- Jun Oyabu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 6,673,196
- Issue date Jan 6, 2004
- Tokyo Electron Limited
- Jun Oyabu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 6,508,199
- Issue date Jan 21, 2003
- Tokyo Electron Limited
- Jun Oyabu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140048210
- Publication date Feb 20, 2014
- TOKYO ELECTRON LIMITED
- Nobuhiro WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20110318934
- Publication date Dec 29, 2011
- TOKYO ELECTRON LIMITED
- Nobuhiro WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SETTING THICKNESS OF DIELECTRIC AND SUBSTRATE PROCESSING...
- Publication number 20110318935
- Publication date Dec 29, 2011
- TOKYO ELECTRON LIMITED
- Jun OYABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE MOUNTING STAGE ON WHIC...
- Publication number 20080236746
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Jun OYABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND ELECTRODE ASSEMBLY FOR PLASMA PROCE...
- Publication number 20070215284
- Publication date Sep 20, 2007
- TOKYO ELECTRON LIMITED
- Jun OYABU
- H01 - BASIC ELECTRIC ELEMENTS