Jun Qian

Person

Sherwood, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ultrathin atomic layer deposition film accuracy thickness control
- Patent number 12,354,871
- Issue date Jul 8, 2025
- Lam Research Corporation
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
- Patent number 12,261,038
- Issue date Mar 25, 2025
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Variable cycle and time RF activation method for film thickness mat...
- Patent number 12,077,859
- Issue date Sep 3, 2024
- Lam Research Corporation
- Ishtak Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic precursor dosing for atomic layer deposition
- Patent number 11,970,772
- Issue date Apr 30, 2024
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of atomic layer deposition
- Patent number 11,670,503
- Issue date Jun 6, 2023
- Lam Research Corporation
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultrathin atomic layer deposition film accuracy thickness control
- Patent number 11,646,198
- Issue date May 9, 2023
- Lam Research Corporation
- Jun Qian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-cycle ALD process for film uniformity and thickness profile m...
- Patent number 11,479,856
- Issue date Oct 25, 2022
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for flow monitoring in a precursor vapor supply...
- Patent number 11,255,017
- Issue date Feb 22, 2022
- Lam Research Corporation
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic precursor dosing for atomic layer deposition
- Patent number 11,180,850
- Issue date Nov 23, 2021
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
- Patent number 11,133,180
- Issue date Sep 28, 2021
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 11,127,567
- Issue date Sep 21, 2021
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultrathin atomic layer deposition film accuracy thickness control
- Patent number 11,101,129
- Issue date Aug 24, 2021
- Lam Research Corporation
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...
- Patent number 11,011,379
- Issue date May 18, 2021
- Lam Research Corporation
- Reza Arghavani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective atomic layer deposition with post-dose treatment
- Patent number 10,679,848
- Issue date Jun 9, 2020
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 10,665,429
- Issue date May 26, 2020
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single ALD cycle thickness control in multi-station substrate depos...
- Patent number 10,577,691
- Issue date Mar 3, 2020
- Lam Research Corporation
- Romuald Nowak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultrathin atomic layer deposition film accuracy thickness control
- Patent number 10,566,187
- Issue date Feb 18, 2020
- Lam Research Corporation
- Jun Qian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...
- Patent number 10,559,468
- Issue date Feb 11, 2020
- Lam Research Corporation
- Reza Arghavani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware and process for film uniformity improvement
- Patent number 10,526,700
- Issue date Jan 7, 2020
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-cycle ALD process for film uniformity and thickness profile m...
- Patent number 10,526,701
- Issue date Jan 7, 2020
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatuses for showerhead backside parasitic plasma su...
- Patent number 10,407,773
- Issue date Sep 10, 2019
- Lam Research Corporation
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
- Patent number 10,361,076
- Issue date Jul 23, 2019
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for flow monitoring in a precursor vapor supply...
- Patent number 10,351,953
- Issue date Jul 16, 2019
- Lam Research Corporation
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware and process for film uniformity improvement
- Patent number 10,100,407
- Issue date Oct 16, 2018
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic precursor dosing for atomic layer deposition
- Patent number 10,094,018
- Issue date Oct 9, 2018
- Lam Research Corporation
- Purushottam Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective atomic layer deposition with post-dose treatment
- Patent number 10,062,563
- Issue date Aug 28, 2018
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective atomic layer deposition for gapfill using sacrificial und...
- Patent number 10,037,884
- Issue date Jul 31, 2018
- Lam Research Corporation
- Fung Suong Ou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...
- Patent number 9,997,357
- Issue date Jun 12, 2018
- Lam Research Corporation
- Reza Arghavani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for vapor delivery in a substrate processing sy...
- Patent number 9,970,108
- Issue date May 15, 2018
- Lam Research Corporation
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inhibitor plasma mediated atomic layer deposition for seamless feat...
- Patent number 9,966,299
- Issue date May 8, 2018
- Lam Research Corporation
- Wei Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION
- Publication number 20240240316
- Publication date Jul 18, 2024
- LAM RESEARCH CORPORATION
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR LAMP HOUSING CRACK DETECTION
- Publication number 20240027295
- Publication date Jan 25, 2024
- Philip MATHEW
- G01 - MEASURING TESTING
Information Patent Application
ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL
- Publication number 20230298884
- Publication date Sep 21, 2023
- LAM RESEARCH CORPORATION
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INDEPENDENTLY ADJUSTABLE FLOWPATH CONDUCTANCE IN MULTI-STATION SEMI...
- Publication number 20220228263
- Publication date Jul 21, 2022
- LAM RESEARCH CORPORATION
- Michael Philip Roberts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VARIABLE CYCLE AND TIME RF ACTIVATION METHOD FOR FILM THICKNESS MAT...
- Publication number 20220154336
- Publication date May 19, 2022
- LAM RESEARCH CORPORATION
- Ishtak Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...
- Publication number 20220059348
- Publication date Feb 24, 2022
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION
- Publication number 20220033967
- Publication date Feb 3, 2022
- LAM RESEARCH CORPORATION
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL
- Publication number 20210343520
- Publication date Nov 4, 2021
- LAM RESEARCH CORPORATION
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR FLOW MONITORING IN A PRECURSOR VAPOR SUPPLY...
- Publication number 20200407849
- Publication date Dec 31, 2020
- LAM RESEARCH CORPORATION
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20200335304
- Publication date Oct 22, 2020
- LAM RESEARCH CORPORATION
- Hu Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL
- Publication number 20200152446
- Publication date May 14, 2020
- LAM RESEARCH CORPORATION
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-CYCLE ALD PROCESS FOR FILM UNIFORMITY AND THICKNESS PROFILE M...
- Publication number 20200087786
- Publication date Mar 19, 2020
- LAM RESEARCH CORPORATION
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TR...
- Publication number 20190385850
- Publication date Dec 19, 2019
- LAM RESEARCH CORPORATION
- Reza Arghavani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL
- Publication number 20190378710
- Publication date Dec 12, 2019
- LAM RESEARCH CORPORATION
- Jun Qian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...
- Publication number 20190311897
- Publication date Oct 10, 2019
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE AND PROCESS FOR FILM UNIFORMITY IMPROVEMENT
- Publication number 20190040528
- Publication date Feb 7, 2019
- LAM RESEARCH CORPORATION
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION
- Publication number 20190024233
- Publication date Jan 24, 2019
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE ATOMIC LAYER DEPOSITION WITH POST-DOSE TREATMENT
- Publication number 20180323057
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Purushottam Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR FLOW MONITORING IN A PRECURSOR VAPOR SUPPLY...
- Publication number 20180265983
- Publication date Sep 20, 2018
- LAM RESEARCH CORPORATION
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TR...
- Publication number 20180269061
- Publication date Sep 20, 2018
- LAM RESEARCH CORPORATION
- Reza Arghavani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20180068833
- Publication date Mar 8, 2018
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE ATOMIC LAYER DEPOSITION FOR GAPFILL USING SACRIFICIAL UND...
- Publication number 20180061628
- Publication date Mar 1, 2018
- LAM RESEARCH CORPORATION
- Fung Suong Ou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE ALD CYCLE THICKNESS CONTROL IN MULTI-STATION SUBSTRATE DEPOS...
- Publication number 20180010250
- Publication date Jan 11, 2018
- LAM RESEARCH CORPORATION
- Romuald Nowak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE ATOMIC LAYER DEPOSITION WITH POST-DOSE TREATMENT
- Publication number 20180005814
- Publication date Jan 4, 2018
- LAM RESEARCH CORPORATION
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION
- Publication number 20170362705
- Publication date Dec 21, 2017
- LAM RESEARCH CORPORATION
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...
- Publication number 20170323786
- Publication date Nov 9, 2017
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER UNDERCOAT PREPARATION METHOD FOR LOW TEMPERATURE ALD FILMS
- Publication number 20170314128
- Publication date Nov 2, 2017
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VARIABLE CYCLE AND TIME RF ACTIVATION METHOD FOR FILM THICKNESS MAT...
- Publication number 20170314129
- Publication date Nov 2, 2017
- LAM RESEARCH CORPORATION
- Ishtak Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VARIABLE TEMPERATURE HARDWARE AND METHODS FOR REDUCTION OF WAFER BA...
- Publication number 20170178898
- Publication date Jun 22, 2017
- LAM RESEARCH CORPORATION
- Hu Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUSES FOR SHOWERHEAD BACKSIDE PARASITIC PLASMA SU...
- Publication number 20170167017
- Publication date Jun 15, 2017
- LAM RESEARCH CORPORATION
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Ultrathin atomic layer deposition film accuracy thickness control

Gapfill of variable aspect ratio features with a composite PEALD an...

Variable cycle and time RF activation method for film thickness mat...

Dynamic precursor dosing for atomic layer deposition

Method of atomic layer deposition

Ultrathin atomic layer deposition film accuracy thickness control

Multi-cycle ALD process for film uniformity and thickness profile m...

Systems and methods for flow monitoring in a precursor vapor supply...

Dynamic precursor dosing for atomic layer deposition

Gapfill of variable aspect ratio features with a composite PEALD an...

Systems and methods for suppressing parasitic plasma and reducing w...

Ultrathin atomic layer deposition film accuracy thickness control

Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...

Selective atomic layer deposition with post-dose treatment

Systems and methods for suppressing parasitic plasma and reducing w...

Single ALD cycle thickness control in multi-station substrate depos...

Ultrathin atomic layer deposition film accuracy thickness control

Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...

Hardware and process for film uniformity improvement

Multi-cycle ALD process for film uniformity and thickness profile m...

Methods and apparatuses for showerhead backside parasitic plasma su...

Gapfill of variable aspect ratio features with a composite PEALD an...

Systems and methods for flow monitoring in a precursor vapor supply...

Hardware and process for film uniformity improvement

Dynamic precursor dosing for atomic layer deposition

Selective atomic layer deposition with post-dose treatment

Selective atomic layer deposition for gapfill using sacrificial und...

Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...

Systems and methods for vapor delivery in a substrate processing sy...

Inhibitor plasma mediated atomic layer deposition for seamless feat...

Patents Applicationslast 30 patents

DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION

METHOD AND APPARATUS FOR LAMP HOUSING CRACK DETECTION

ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL

INDEPENDENTLY ADJUSTABLE FLOWPATH CONDUCTANCE IN MULTI-STATION SEMI...

VARIABLE CYCLE AND TIME RF ACTIVATION METHOD FOR FILM THICKNESS MAT...

GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...

DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION

ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL

SYSTEMS AND METHODS FOR FLOW MONITORING IN A PRECURSOR VAPOR SUPPLY...

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL

MULTI-CYCLE ALD PROCESS FOR FILM UNIFORMITY AND THICKNESS PROFILE M...

CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TR...

ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL

GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...

HARDWARE AND PROCESS FOR FILM UNIFORMITY IMPROVEMENT

DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION

SELECTIVE ATOMIC LAYER DEPOSITION WITH POST-DOSE TREATMENT

SYSTEMS AND METHODS FOR FLOW MONITORING IN A PRECURSOR VAPOR SUPPLY...

CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TR...

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

SELECTIVE ATOMIC LAYER DEPOSITION FOR GAPFILL USING SACRIFICIAL UND...

SINGLE ALD CYCLE THICKNESS CONTROL IN MULTI-STATION SUBSTRATE DEPOS...

SELECTIVE ATOMIC LAYER DEPOSITION WITH POST-DOSE TREATMENT

DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION

GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...

CHAMBER UNDERCOAT PREPARATION METHOD FOR LOW TEMPERATURE ALD FILMS

VARIABLE CYCLE AND TIME RF ACTIVATION METHOD FOR FILM THICKNESS MAT...

VARIABLE TEMPERATURE HARDWARE AND METHODS FOR REDUCTION OF WAFER BA...

METHODS AND APPARATUSES FOR SHOWERHEAD BACKSIDE PARASITIC PLASMA SU...