Jun Qian

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System using film thickness estimation from machine learning based...
- Patent number 12,169,925
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Sivakumar Dhandapani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Technique for training neural network for use in in-situ monitoring...
- Patent number 12,136,574
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Determination of substrate layer thickness with polishing pad wear...
- Patent number 12,090,599
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Trained neural network in in-situ monitoring during polishing and p...
- Patent number 12,057,354
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Training spectrum generation for machine learning system for spectr...
- Patent number 12,020,159
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Benjamin Cherian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Preston matrix generator
- Patent number 11,989,492
- Issue date May 21, 2024
- Applied Materials, Inc.
- Sivakumar Dhandapani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System using film thickness estimation from machine learning based...
- Patent number 11,847,776
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Sivakumar Dhandapani
- B24 - GRINDING POLISHING
Information Patent Grant
Film thickness estimation from machine learning based processing of...
- Patent number 11,836,913
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- Sivakumar Dhandapani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Technique for training neural network for use in in-situ monitoring...
- Patent number 11,791,224
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Determination of substrate layer thickness with polishing pad wear...
- Patent number 11,780,047
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Imaging for monitoring thickness in a substrate cleaning system
- Patent number 11,699,595
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Dominic J. Benvegnu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Using a trained neural network for use in in-situ monitoring during...
- Patent number 11,658,078
- Issue date May 23, 2023
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Training spectrum generation for machine learning system for spectr...
- Patent number 11,651,207
- Issue date May 16, 2023
- Applied Materials, Inc.
- Benjamin Cherian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Machine vision as input to a CMP process control algorithm
- Patent number 11,577,356
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Benjamin Cherian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Polishing apparatus using machine learning and compensation for pad...
- Patent number 11,524,382
- Issue date Dec 13, 2022
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Predictive filter for polishing pad wear rate monitoring
- Patent number 11,504,821
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Sivakumar Dhandapani
- B24 - GRINDING POLISHING
Information Patent Grant
Training spectrum generation for machine learning system for spectr...
- Patent number 11,507,824
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Benjamin Cherian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Polishing with measurement prior to deposition of outer layer
- Patent number 10,651,098
- Issue date May 12, 2020
- Applied Materials, Inc.
- Tomohiko Kitajima
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing automated recipe generation
- Patent number 10,256,111
- Issue date Apr 9, 2019
- Applied Materials, Inc.
- Eric Lau
- G01 - MEASURING TESTING
Information Patent Grant
Polishing with pre deposition spectrum
- Patent number 9,811,077
- Issue date Nov 7, 2017
- Applied Materials, Inc.
- Tomohiko Kitajima
- G05 - CONTROLLING REGULATING
Information Patent Grant
Automatic generation of reference spectra for optical monitoring of...
- Patent number 9,579,767
- Issue date Feb 28, 2017
- Applied Materials, Inc.
- Jun Qian
- B24 - GRINDING POLISHING
Information Patent Grant
Automatic initiation of reference spectra library generation for op...
- Patent number 9,372,116
- Issue date Jun 21, 2016
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing with eddy current feed meaurement prior to deposition of...
- Patent number 9,362,186
- Issue date Jun 7, 2016
- Applied Materials, Inc.
- Tomohiko Kitajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feed forward and feed-back techniques for in-situ process control
- Patent number 9,289,875
- Issue date Mar 22, 2016
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Grant
Dynamic residue clearing control with in-situ profile control (ISPC)
- Patent number 9,242,337
- Issue date Jan 26, 2016
- Applied Materials, Inc.
- Jun Qian
- B24 - GRINDING POLISHING
Information Patent Grant
Endpointing with selective spectral monitoring
- Patent number 9,221,147
- Issue date Dec 29, 2015
- Applied Materials, Inc.
- Jun Qian
- B24 - GRINDING POLISHING
Information Patent Grant
Closed-loop control for improved polishing pad profiles
- Patent number 9,138,860
- Issue date Sep 22, 2015
- Applied Materials, Inc.
- Sivakumar Dhandapani
- B24 - GRINDING POLISHING
Information Patent Grant
Path for probe of spectrographic metrology system
- Patent number 9,056,383
- Issue date Jun 16, 2015
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Grant
Weighted regression of thickness maps from spectral data
- Patent number 8,992,286
- Issue date Mar 31, 2015
- Applied Materials, Inc.
- Benjamin Cherian
- B24 - GRINDING POLISHING
Information Patent Grant
Selecting reference libraries for monitoring of multiple zones on a...
- Patent number 8,954,186
- Issue date Feb 10, 2015
- Applied Materials, Inc.
- Jun Qian
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
CARRIER HEAD ACOUSTIC MONITORING WITH SENSOR IN PLATEN
- Publication number 20240139905
- Publication date May 2, 2024
- Applied Materials, Inc.
- Benjamin Cherian
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEM USING FILM THICKNESS ESTIMATION FROM MACHINE LEARNING BASED...
- Publication number 20240062364
- Publication date Feb 22, 2024
- Applied Materials, Inc.
- Sivakumar Dhandapani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
RESIDUE CLASSIFICATION FROM MACHINE LEARNING BASED PROCESSING OF SU...
- Publication number 20240054634
- Publication date Feb 15, 2024
- Applied Materials, Inc.
- Sivakumar Dhandapani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...
- Publication number 20240014080
- Publication date Jan 11, 2024
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETERMINING SUBSTRATE ORIENTATION WITH ACOUSTIC SIGNALS
- Publication number 20230390884
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Nicholas A. Wiswell
- B24 - GRINDING POLISHING
Information Patent Application
ACOUSTIC MONITORING OF CONDITIONER DURING POLISHING
- Publication number 20230390891
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Thomas H. Osterheld
- B24 - GRINDING POLISHING
Information Patent Application
ACOUSTIC MONITORING OF CMP RETAINING RING
- Publication number 20230390883
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Haoquan Fang
- B24 - GRINDING POLISHING
Information Patent Application
DETERMINING SUBSTRATE PRECESSION WITH ACOUSTIC SIGNALS
- Publication number 20230390885
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Nicholas A. Wiswell
- B24 - GRINDING POLISHING
Information Patent Application
DETERMINATION OF SUBSTRATE LAYER THICKNESS WITH POLISHING PAD WEAR...
- Publication number 20230381912
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EDDY CURRENT MONITORING TO DETECT VIBRATION IN POLISHING
- Publication number 20230286107
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
TRAINED NEURAL NETWORK IN IN-SITU MONITORING DURING POLISHING AND P...
- Publication number 20230290691
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Training Spectrum Generation for Machine Learning System for Spectr...
- Publication number 20230267329
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Benjamin Cherian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MACHINE VISION AS INPUT TO A CMP PROCESS CONTROL ALGORITHM
- Publication number 20230182258
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Benjamin Cherian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
POLISHING APPARATUS USING MACHINE LEARNING AND COMPENSATION FOR PAD...
- Publication number 20230085787
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
DETECTION OF PLANARIZATION FROM ACOUSTIC SIGNAL DURING CHEMICAL MEC...
- Publication number 20230010025
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Thomas H. Osterheld
- B24 - GRINDING POLISHING
Information Patent Application
IMAGING FOR MONITORING THICKNESS IN A SUBSTRATE CLEANING SYSTEM
- Publication number 20220270889
- Publication date Aug 25, 2022
- Applied Materials, Inc.
- Dominic J. Benvegnu
- B08 - CLEANING
Information Patent Application
DETERMINATION OF SUBSTRATE LAYER THICKNESS WITH POLISHING PAD WEAR...
- Publication number 20210402551
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
FILM THICKNESS ESTIMATION FROM MACHINE LEARNING BASED PROCESSING OF...
- Publication number 20210407065
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Sivakumar Dhandapani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM USING FILM THICKNESS ESTIMATION FROM MACHINE LEARNING BASED...
- Publication number 20210407066
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Sivakumar Dhandapani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
USING A TRAINED NEURAL NETWORK FOR USE IN IN-SITU MONITORING DURING...
- Publication number 20210358819
- Publication date Nov 18, 2021
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...
- Publication number 20210354265
- Publication date Nov 18, 2021
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Preston Matrix Generator
- Publication number 20200210547
- Publication date Jul 2, 2020
- Applied Materials, Inc.
- Sivakumar Dhandapani
- B24 - GRINDING POLISHING
Information Patent Application
MACHINE VISION AS INPUT TO A CMP PROCESS CONTROL ALGORITHM
- Publication number 20200094370
- Publication date Mar 26, 2020
- Applied Materials, Inc.
- Benjamin Cherian
- B24 - GRINDING POLISHING
Information Patent Application
Training Spectrum Generation for Machine Learning System for Spectr...
- Publication number 20200005139
- Publication date Jan 2, 2020
- Benjamin Cherian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Training Spectrum Generation for Machine Learning System for Spectr...
- Publication number 20200005140
- Publication date Jan 2, 2020
- Benjamin Cherian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
POLISHING APPARATUS USING MACHINE LEARNING AND COMPENSATION FOR PAD...
- Publication number 20190299356
- Publication date Oct 3, 2019
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
PREDICTIVE FILTER FOR POLISHING PAD WEAR RATE MONITORING
- Publication number 20190143475
- Publication date May 16, 2019
- Applied Materials, Inc.
- Sivakumar Dhandapani
- B24 - GRINDING POLISHING
Information Patent Application
SEMICONDUCTOR FABRICATION USING PROCESS CONTROL PARAMETER MATRIX
- Publication number 20190096722
- Publication date Mar 28, 2019
- Sivakumar Dhandapani
- B24 - GRINDING POLISHING
Information Patent Application
SEMICONDUCTOR FABRICATION USING MACHINE LEARNING APPROACH TO GENERA...
- Publication number 20190095797
- Publication date Mar 28, 2019
- Sivakumar Dhandapani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHEMICAL MECHANICAL POLISHING AUTOMATED RECIPE GENERATION
- Publication number 20180005842
- Publication date Jan 4, 2018
- Applied Materials, Inc.
- Eric LAU
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

System using film thickness estimation from machine learning based...

Technique for training neural network for use in in-situ monitoring...

Determination of substrate layer thickness with polishing pad wear...

Trained neural network in in-situ monitoring during polishing and p...

Training spectrum generation for machine learning system for spectr...

Preston matrix generator

System using film thickness estimation from machine learning based...

Film thickness estimation from machine learning based processing of...

Technique for training neural network for use in in-situ monitoring...

Determination of substrate layer thickness with polishing pad wear...

Imaging for monitoring thickness in a substrate cleaning system

Using a trained neural network for use in in-situ monitoring during...

Training spectrum generation for machine learning system for spectr...

Machine vision as input to a CMP process control algorithm

Polishing apparatus using machine learning and compensation for pad...

Predictive filter for polishing pad wear rate monitoring

Training spectrum generation for machine learning system for spectr...

Polishing with measurement prior to deposition of outer layer

Chemical mechanical polishing automated recipe generation

Polishing with pre deposition spectrum

Automatic generation of reference spectra for optical monitoring of...

Automatic initiation of reference spectra library generation for op...

Polishing with eddy current feed meaurement prior to deposition of...

Feed forward and feed-back techniques for in-situ process control

Dynamic residue clearing control with in-situ profile control (ISPC)

Endpointing with selective spectral monitoring

Closed-loop control for improved polishing pad profiles

Path for probe of spectrographic metrology system

Weighted regression of thickness maps from spectral data

Selecting reference libraries for monitoring of multiple zones on a...

Patents Applicationslast 30 patents

CARRIER HEAD ACOUSTIC MONITORING WITH SENSOR IN PLATEN

SYSTEM USING FILM THICKNESS ESTIMATION FROM MACHINE LEARNING BASED...

RESIDUE CLASSIFICATION FROM MACHINE LEARNING BASED PROCESSING OF SU...

TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...

DETERMINING SUBSTRATE ORIENTATION WITH ACOUSTIC SIGNALS

ACOUSTIC MONITORING OF CONDITIONER DURING POLISHING

ACOUSTIC MONITORING OF CMP RETAINING RING

DETERMINING SUBSTRATE PRECESSION WITH ACOUSTIC SIGNALS

DETERMINATION OF SUBSTRATE LAYER THICKNESS WITH POLISHING PAD WEAR...

EDDY CURRENT MONITORING TO DETECT VIBRATION IN POLISHING

TRAINED NEURAL NETWORK IN IN-SITU MONITORING DURING POLISHING AND P...

Training Spectrum Generation for Machine Learning System for Spectr...

MACHINE VISION AS INPUT TO A CMP PROCESS CONTROL ALGORITHM

POLISHING APPARATUS USING MACHINE LEARNING AND COMPENSATION FOR PAD...

DETECTION OF PLANARIZATION FROM ACOUSTIC SIGNAL DURING CHEMICAL MEC...

IMAGING FOR MONITORING THICKNESS IN A SUBSTRATE CLEANING SYSTEM

DETERMINATION OF SUBSTRATE LAYER THICKNESS WITH POLISHING PAD WEAR...

FILM THICKNESS ESTIMATION FROM MACHINE LEARNING BASED PROCESSING OF...

SYSTEM USING FILM THICKNESS ESTIMATION FROM MACHINE LEARNING BASED...

USING A TRAINED NEURAL NETWORK FOR USE IN IN-SITU MONITORING DURING...

TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...

Preston Matrix Generator

MACHINE VISION AS INPUT TO A CMP PROCESS CONTROL ALGORITHM

Training Spectrum Generation for Machine Learning System for Spectr...

Training Spectrum Generation for Machine Learning System for Spectr...

POLISHING APPARATUS USING MACHINE LEARNING AND COMPENSATION FOR PAD...

PREDICTIVE FILTER FOR POLISHING PAD WEAR RATE MONITORING

SEMICONDUCTOR FABRICATION USING PROCESS CONTROL PARAMETER MATRIX

SEMICONDUCTOR FABRICATION USING MACHINE LEARNING APPROACH TO GENERA...

CHEMICAL MECHANICAL POLISHING AUTOMATED RECIPE GENERATION