Jun YASHIMA

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
- Patent number 10,937,629
- Issue date Mar 2, 2021
- NuFlare Technology, Inc.
- Hironori Teguri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number RE47707
- Issue date Nov 5, 2019
- NuFlare Technology, Inc.
- Yasuo Kato
Information Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
- Patent number 9,934,935
- Issue date Apr 3, 2018
- NuFlare Technology, Inc.
- Ryoichi Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 9,875,876
- Issue date Jan 23, 2018
- NuFlare Technology, Inc.
- Jun Yashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of generating write data for energy beam writing apparatus,...
- Patent number 9,659,747
- Issue date May 23, 2017
- NuFlare Technology, Inc.
- Jun Yashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus, and buffer memory data sto...
- Patent number 9,564,293
- Issue date Feb 7, 2017
- NuFlare Technology, Inc.
- Jun Yashima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam writing apparatus, and charged particle beam...
- Patent number 9,548,183
- Issue date Jan 17, 2017
- NuFlare Technology, Inc.
- Jun Yashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam drawing apparatus and control method thereof
- Patent number 9,188,853
- Issue date Nov 17, 2015
- Nuflare Technology, Inc.
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 9,153,420
- Issue date Oct 6, 2015
- NuFlare Technology, Inc.
- Jun Yashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and irradiation time apport...
- Patent number 9,141,750
- Issue date Sep 22, 2015
- Nuflare Technology, Inc.
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 9,006,691
- Issue date Apr 14, 2015
- NuFlare Technolgy, Inc.
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 8,878,149
- Issue date Nov 4, 2014
- Nuflare Technology, Inc.
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 8,872,141
- Issue date Oct 28, 2014
- Nuflare Technology, Inc.
- Yasuo Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam drawing method and apparatus
- Patent number 8,796,650
- Issue date Aug 5, 2014
- Nuflare Technology, Inc.
- Jun Yashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and method
- Patent number 8,669,537
- Issue date Mar 11, 2014
- Nuflare Technology, Inc.
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 8,563,953
- Issue date Oct 22, 2013
- Nuflare Technology, Inc.
- Noriaki Nakayamada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing apparatus
- Patent number 8,563,952
- Issue date Oct 22, 2013
- Nuflare Technology, Inc.
- Jun Yashima
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 8,552,405
- Issue date Oct 8, 2013
- Nuflare Technology, Inc.
- Yasuo Kato
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for resizing pattern to be written by lithography technique,...
- Patent number 8,527,913
- Issue date Sep 3, 2013
- Nuflare Technology, Inc.
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam drawing apparatus and control method thereof
- Patent number 8,466,440
- Issue date Jun 18, 2013
- Nuflare Technology, Inc.
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for resizing pattern to be written by lithography technique,...
- Patent number 8,429,575
- Issue date Apr 23, 2013
- Nuflare Technology, Inc.
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Beam dose computing method and writing method and record carrier bo...
- Patent number 8,352,889
- Issue date Jan 8, 2013
- Nuflare Technology, Inc.
- Keiko Emi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for writing
- Patent number 8,309,283
- Issue date Nov 13, 2012
- Nuflare Technology, Inc.
- Yasuo Kato
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam drawing method and apparatus
- Patent number 8,188,449
- Issue date May 29, 2012
- Nuflare Technology, Inc.
- Hayato Shibata
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing apparatus, charged particle beam writ...
- Patent number 8,183,545
- Issue date May 22, 2012
- Nuflare Technology, Inc.
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing apparatus, and apparatus and method f...
- Patent number 8,122,390
- Issue date Feb 21, 2012
- Nuflare Technology, Inc.
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Beam dose computing method and writing method and record carrier bo...
- Patent number 8,103,980
- Issue date Jan 24, 2012
- Nuflare Technology, Inc.
- Keiko Emi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for resizing pattern to be written by lithography technique,...
- Patent number 8,065,635
- Issue date Nov 22, 2011
- Nuflare Technology, Inc.
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Beam dose computing method and writing method and record carrier bo...
- Patent number 7,740,991
- Issue date Jun 22, 2010
- Nuflare Technology, Inc.
- Keiko Emi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing method and apparatus
- Patent number 7,601,968
- Issue date Oct 13, 2009
- Nuflare Technology, Inc.
- Takayuki Abe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20200118791
- Publication date Apr 16, 2020
- NuFlare Technology, Inc.
- Hironori TEGURI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20170200582
- Publication date Jul 13, 2017
- NuFlare Technology, Inc.
- Jun Yashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20170047194
- Publication date Feb 16, 2017
- NuFlare Technology, Inc.
- Ryoichi YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF GENERATING WRITE DATA FOR ENERGY BEAM WRITING APPARATUS,...
- Publication number 20160211118
- Publication date Jul 21, 2016
- NuFlare Technology, Inc.
- Jun Yashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, AND CHARGED PARTICLE BEAM...
- Publication number 20150060690
- Publication date Mar 5, 2015
- NuFlare Technology, Inc.
- Jun YASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20150014549
- Publication date Jan 15, 2015
- NuFlare Technology, Inc.
- Jun YASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, AND BUFFER MEMORY DATA STO...
- Publication number 20140237196
- Publication date Aug 21, 2014
- NuFlare Technology, Inc.
- Jun Yashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND IRRADIATION TIME APPORT...
- Publication number 20140017349
- Publication date Jan 16, 2014
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20130256519
- Publication date Oct 3, 2013
- NuFlare Technology, Inc.
- Yasuo Kato
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20130099139
- Publication date Apr 25, 2013
- NuFlare Technology, Inc.
- Yasuo Kato
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD OF SAME
- Publication number 20120292537
- Publication date Nov 22, 2012
- NuFlare Technology, Inc.
- Jun YASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20120292536
- Publication date Nov 22, 2012
- NuFlare Technology, Inc.
- Jun YASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20120126145
- Publication date May 24, 2012
- NuFlare Technology, Inc.
- Jun YASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...
- Publication number 20120108063
- Publication date May 3, 2012
- NuFlare Technology, Inc.
- Keiko Emi
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR RESIZING PATTERN TO BE WRITTEN BY LITHOGRAPHY TECHNIQUE,...
- Publication number 20120104286
- Publication date May 3, 2012
- NuFlare Technology, Inc.
- Jun YASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20120068089
- Publication date Mar 22, 2012
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR RESIZING PATTERN TO BE WRITTEN BY LITHOGRAPHY TECHNIQUE,...
- Publication number 20120036486
- Publication date Feb 9, 2012
- NuFlare Technology, Inc.
- Jun YASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20120001097
- Publication date Jan 5, 2012
- NuFlare Technology, Inc.
- Jun YASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20110291029
- Publication date Dec 1, 2011
- NuFlare Technology, Inc.
- Jun YASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, CHARGED PARTICLE BEAM WRIT...
- Publication number 20110046762
- Publication date Feb 24, 2011
- NuFlare Technology, Inc.
- Jun YASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING METHOD AND APPARATUS
- Publication number 20110012031
- Publication date Jan 20, 2011
- NuFlare Technology, Inc.
- Hayato Shibata
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING METHOD AND APPARATUS
- Publication number 20100237253
- Publication date Sep 23, 2010
- NuFlare Technology, Inc.
- Jun YASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR WRITING
- Publication number 20100173235
- Publication date Jul 8, 2010
- NuFlare Technology, Inc.
- Yasuo KATO
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD
- Publication number 20100072390
- Publication date Mar 25, 2010
- NuFlare Technology, Inc.
- Jun YASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...
- Publication number 20100015537
- Publication date Jan 21, 2010
- NuFlare Technology, Inc.
- Keiko EMI
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, AND APPARATUS AND METHOD F...
- Publication number 20090200488
- Publication date Aug 13, 2009
- NuFlare Technology, Inc.
- Jun YASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR RESIZING PATTERN TO BE WRITTEN BY LITHOGRAPHY TECHNIQUE,...
- Publication number 20080184190
- Publication date Jul 31, 2008
- NuFlare Technology, Inc.
- Jun YASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND APPARATUS
- Publication number 20070138413
- Publication date Jun 21, 2007
- NuFlare Technology, Inc.
- Takayuki ABE
- B82 - NANO-TECHNOLOGY
Information Patent Application
BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...
- Publication number 20070114453
- Publication date May 24, 2007
- NuFlare Technology, Inc.
- Keiko Emi
- B82 - NANO-TECHNOLOGY

Jun YASHIMA

Person

Patents Grantslast 30 patents

Multi charged particle beam writing apparatus and multi charged par...

Charged particle beam writing apparatus and charged particle beam w...

Multi charged particle beam writing apparatus and multi charged par...

Charged particle beam writing apparatus and charged particle beam w...

Method of generating write data for energy beam writing apparatus,...

Charged particle beam writing apparatus, and buffer memory data sto...

Charged particle beam writing apparatus, and charged particle beam...

Charged particle beam drawing apparatus and control method thereof

Charged particle beam writing apparatus and charged particle beam w...

Charged particle beam writing apparatus and irradiation time apport...

Charged particle beam writing apparatus and charged particle beam w...

Charged particle beam writing apparatus and charged particle beam w...

Charged particle beam writing apparatus and charged particle beam w...

Charged particle beam drawing method and apparatus

Charged particle beam writing apparatus and method

Charged particle beam writing apparatus and charged particle beam w...

Charged particle beam writing apparatus

Charged particle beam writing apparatus and charged particle beam w...

Method for resizing pattern to be written by lithography technique,...

Charged particle beam drawing apparatus and control method thereof

Method for resizing pattern to be written by lithography technique,...

Beam dose computing method and writing method and record carrier bo...

Method and apparatus for writing

Charged particle beam drawing method and apparatus

Charged particle beam writing apparatus, charged particle beam writ...

Charged particle beam writing apparatus, and apparatus and method f...

Beam dose computing method and writing method and record carrier bo...

Method for resizing pattern to be written by lithography technique,...

Beam dose computing method and writing method and record carrier bo...

Charged particle beam writing method and apparatus

Patents Applicationslast 30 patents

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...

METHOD OF GENERATING WRITE DATA FOR ENERGY BEAM WRITING APPARATUS,...

CHARGED PARTICLE BEAM WRITING APPARATUS, AND CHARGED PARTICLE BEAM...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

CHARGED PARTICLE BEAM WRITING APPARATUS, AND BUFFER MEMORY DATA STO...

CHARGED PARTICLE BEAM WRITING APPARATUS AND IRRADIATION TIME APPORT...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD OF SAME

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...

METHOD FOR RESIZING PATTERN TO BE WRITTEN BY LITHOGRAPHY TECHNIQUE,...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

METHOD FOR RESIZING PATTERN TO BE WRITTEN BY LITHOGRAPHY TECHNIQUE,...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND CONTROL METHOD THEREOF

CHARGED PARTICLE BEAM DRAWING APPARATUS AND CONTROL METHOD THEREOF

CHARGED PARTICLE BEAM WRITING APPARATUS, CHARGED PARTICLE BEAM WRIT...

CHARGED PARTICLE BEAM DRAWING METHOD AND APPARATUS

CHARGED PARTICLE BEAM DRAWING METHOD AND APPARATUS

METHOD AND APPARATUS FOR WRITING

CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD

BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...

CHARGED PARTICLE BEAM WRITING APPARATUS, AND APPARATUS AND METHOD F...

METHOD FOR RESIZING PATTERN TO BE WRITTEN BY LITHOGRAPHY TECHNIQUE,...

CHARGED PARTICLE BEAM WRITING METHOD AND APPARATUS

BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...