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last 30 patents
Information
Patent Grant
MEMS device having a metallization structure embedded in a dielectr...
Patent number
11,932,534
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor MEMS structure
Patent number
11,767,216
Issue date
Sep 26, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Yuan-Chih Hsieh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structure for integrated microphone
Patent number
11,678,133
Issue date
Jun 13, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Jung-Huei Peng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS structure and manufacturing method thereof
Patent number
11,505,454
Issue date
Nov 22, 2022
Taiwan Semiconductor Manufacturing Company Ltd.
Kang-Che Huang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor structure for MEMS device
Patent number
11,312,623
Issue date
Apr 26, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method to produce chemical pattern in micro-fluidic structure
Patent number
11,298,697
Issue date
Apr 12, 2022
Illumina, Inc.
Shang-Ying Tsai
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method for manufacturing a MEMS device by first hybrid bonding a CM...
Patent number
11,279,615
Issue date
Mar 22, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMOS-MEMS structure and method of forming the same
Patent number
11,148,936
Issue date
Oct 19, 2021
Taiwan Semiconductor Manufacturing Company Ltd.
Jung-Huei Peng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS devices with an element having varying widths
Patent number
11,130,670
Issue date
Sep 28, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Shang-Ying Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS devices including MEMS dies and connectors thereto
Patent number
11,117,796
Issue date
Sep 14, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS devices and methods of fabrication thereof
Patent number
11,104,129
Issue date
Aug 31, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Jung-Huei Peng
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Grant
Fluid deposition apparatus and method
Patent number
11,027,310
Issue date
Jun 8, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Wen Cheng
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Semiconductor MEMS structure
Patent number
10,787,360
Issue date
Sep 29, 2020
Taiwan Semiconductor Manufacturing Company Ltd.
Yuan-Chih Hsieh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a microphone
Patent number
10,779,100
Issue date
Sep 15, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Jung-Huei Peng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor structure for MEMS device
Patent number
10,752,497
Issue date
Aug 25, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS devices including MEMS dies and connectors thereto
Patent number
10,710,871
Issue date
Jul 14, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS devices and methods of fabrication thereof
Patent number
10,688,786
Issue date
Jun 23, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Jung-Huei Peng
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Grant
MEMS devices including MEMS dies and connectors thereto
Patent number
10,508,023
Issue date
Dec 17, 2019
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMOS-MEMS structure and method of forming the same
Patent number
10,508,027
Issue date
Dec 17, 2019
Taiwan Semiconductor Manufacturing Company Ltd.
Jung-Huei Peng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method to produce chemical pattern in micro-fluidic structure
Patent number
10,486,153
Issue date
Nov 26, 2019
Illumina, Inc.
Shang-Ying Tsai
B82 - NANO-TECHNOLOGY
Information
Patent Grant
MEMS device with viewer window and manufacturing method thereof
Patent number
10,351,417
Issue date
Jul 16, 2019
Taiwan Semiconductor Manufacturing Company Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a MEMS device by first hybrid bonding a CM...
Patent number
10,294,098
Issue date
May 21, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor MEMS structure
Patent number
10,273,142
Issue date
Apr 30, 2019
Taiwan Semiconductor Manufacturing Company Ltd.
Yuan-Chih Hsieh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system and manufacturing method thereof
Patent number
10,273,148
Issue date
Apr 30, 2019
Taiwan Semiconductor Manufacturing Company Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multi-pressure MEMS package
Patent number
10,273,144
Issue date
Apr 30, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of forming micro-electro-mechanical devices including a con...
Patent number
10,266,390
Issue date
Apr 23, 2019
Taiwan Semiconductor Manufacturing Company, Ltd.
Shang-Ying Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with enhanced sensing structure and manufacturing metho...
Patent number
10,266,396
Issue date
Apr 23, 2019
Taiwan Semiconductor Manufacturing Company Ltd.
Ching-Kai Shen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor structure with cavity spacing monitoring functions
Patent number
10,202,278
Issue date
Feb 12, 2019
Taiwan Semiconductor Manufacturing Company Ltd.
Jung-Huei Peng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor structure for MEMS Device
Patent number
10,160,639
Issue date
Dec 25, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fluid deposition appartus and method
Patent number
10,155,244
Issue date
Dec 18, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Wen Cheng
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Patents Applications
last 30 patents
Information
Patent Application
FLAT OPTICS CAMERA MODULE FOR HIGH QUALITY IMAGING
Publication number
20240085678
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Jung-Huei Peng
G02 - OPTICS
Information
Patent Application
MEASURING METHOD OF LIQUID MIXTURE PURITY AND APPARATUS FOR MEASURI...
Publication number
20240077392
Publication date
Mar 7, 2024
3S SILICON TECH, INC.
Kuo-Liang YEH
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL DEVICE AND METHOD OF MANUFACTURING THE SAME
Publication number
20240036294
Publication date
Feb 1, 2024
Taiwan Semiconductor Manufacturing company Ltd.
WEI-LIN CHEN
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
SEMICONDUCTOR MEMS STRUCTURE
Publication number
20230365395
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing company Ltd.
YUAN-CHIH HSIEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Methods Of Forming Optical Modules
Publication number
20230317753
Publication date
Oct 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Jung-Huei Peng
B32 - LAYERED PRODUCTS
Information
Patent Application
PROCESSING METHOD OF FORMIC ACID SOLDERING
Publication number
20230182237
Publication date
Jun 15, 2023
3S SILICON TECH, INC.
Kuo-Liang YEH
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD FOR MANUFACTURING A MEMS DEVICE BY FIRST HYBRID BONDING A CM...
Publication number
20220204340
Publication date
Jun 30, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD TO PRODUCE CHEMICAL PATTERN IN MICRO-FLUIDIC STRUCTURE
Publication number
20220184614
Publication date
Jun 16, 2022
Illumina, Inc.
Shang-Ying TSAI
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
MEMS STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20210087056
Publication date
Mar 25, 2021
Taiwan Semiconductor Manufacturing company Ltd.
KANG-CHE HUANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR MEMS STRUCTURE
Publication number
20210053816
Publication date
Feb 25, 2021
Taiwan Semiconductor Manufacturing company Ltd.
YUAN-CHIH HSIEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Structure and Method for Integrated Microphone
Publication number
20200413210
Publication date
Dec 31, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Jung-Huei Peng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE FOR MEMS DEVICE
Publication number
20200361767
Publication date
Nov 19, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICES INCLUDING MEMS DIES AND CONNECTORS THERETO
Publication number
20200339412
Publication date
Oct 29, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CMOS-MEMS STRUCTURE AND METHOD OF FORMING THE SAME
Publication number
20200140266
Publication date
May 7, 2020
Taiwan Semiconductor Manufacturing company Ltd.
JUNG-HUEI PENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method to Produce Chemical Pattern In Micro-Fluidic Structure
Publication number
20200070153
Publication date
Mar 5, 2020
Illumina, Inc.
Shang-Ying Tsai
B82 - NANO-TECHNOLOGY
Information
Patent Application
MEMS Devices Including MEMS Dies and Connectors Thereto
Publication number
20200024129
Publication date
Jan 23, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Devices and Methods of Fabrication Thereof
Publication number
20200023642
Publication date
Jan 23, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
JUNG-HUEI PENG
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Application
SEMICONDUCTOR MEMS STRUCTURE
Publication number
20190256346
Publication date
Aug 22, 2019
Taiwan Semiconductor Manufacturing company Ltd.
YUAN-CHIH HSIEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Devices and Methods of Forming the Same
Publication number
20190248646
Publication date
Aug 15, 2019
Taiwan Semiconductor Manufacturing Company, Ltd.
Shang-Ying Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A MEMS DEVICE BY FIRST HYBRID BONDING A CM...
Publication number
20190241430
Publication date
Aug 8, 2019
Taiwan Semiconductor Manufacturing Co., LTD
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE FOR MEMS DEVICE
Publication number
20190112183
Publication date
Apr 18, 2019
Taiwan Semiconductor Manufacturing Co., LTD
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
a method for manufacturing a mems device by first hybrid bonding a...
Publication number
20190092627
Publication date
Mar 28, 2019
Taiwan Semiconductor Manufacturing Co., LTD
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH VIEWER WINDOW AND MANUFACTURING METHOD THEREOF
Publication number
20190062151
Publication date
Feb 28, 2019
Taiwan Semiconductor Manufacturing company Ltd.
CHUN-WEN CHENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CMOS-MEMS STRUCTURE AND METHOD OF FORMING THE SAME
Publication number
20180362335
Publication date
Dec 20, 2018
Taiwan Semiconductor Manufacturing company Ltd.
JUNG-HUEI PENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH ENHANCED SENSING STRUCTURE AND MANUFACTURING METHO...
Publication number
20180339899
Publication date
Nov 29, 2018
Taiwan Semiconductor Manufacturing company Ltd.
CHING-KAI SHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Devices and Methods of Fabrication Thereof
Publication number
20180311955
Publication date
Nov 1, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
JUNG-HUEI PENG
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Application
Structure and Method for Integrated Microphone
Publication number
20180288549
Publication date
Oct 4, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Jung-Huei Peng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Devices Including MEMS Dies and Connectors Thereto
Publication number
20180194613
Publication date
Jul 12, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR MEMS STRUCTURE
Publication number
20180099865
Publication date
Apr 12, 2018
Taiwan Semiconductor Manufacturing company Ltd.
YUAN-CHIH HSIEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE WITH CAVITY SPACING MONITORING FUNCTIONS
Publication number
20180065841
Publication date
Mar 8, 2018
JUNG-HUEI PENG
B81 - MICRO-STRUCTURAL TECHNOLOGY