Jungmin Ko

Follow

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for low-K dielectric etch with reduced damage
- Patent number 8,236,188
- Issue date Aug 7, 2012
- Lam Research Corporation
- Bing Ji
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR LOW-K DIELECTRIC ETCH WITH REDUCED DAMAGE
- Publication number 20100261352
- Publication date Oct 14, 2010
- LAM RESEARCH CORPORATION
- Bing Ji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNING VIA FACET WITH MINIMAL RIE LAG
- Publication number 20090068767
- Publication date Mar 12, 2009
- LAM RESEARCH CORPORATION
- Stephen Sirard
- H01 - BASIC ELECTRIC ELEMENTS