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Tewskbury, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for pressure based mass flow control
Patent number
12,000,723
Issue date
Jun 4, 2024
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Grant
Methods and apparatus for pressure based mass flow ratio control
Patent number
11,940,307
Issue date
Mar 26, 2024
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Grant
Pressure control using an external trigger
Patent number
11,573,583
Issue date
Feb 7, 2023
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus for pulse gas delivery with concentration meas...
Patent number
11,513,108
Issue date
Nov 29, 2022
MKS Instruments, Inc.
Jim Ye
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for pulse gas delivery using an external press...
Patent number
11,513,542
Issue date
Nov 29, 2022
MKS Instruments, Inc.
Michael L'Bassi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for pulse gas delivery
Patent number
11,404,290
Issue date
Aug 2, 2022
MKS Instruments, Inc.
Junhua Ding
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for pressure based mass flow ratio control
Patent number
11,187,561
Issue date
Nov 30, 2021
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Grant
System for and method of fast pulse gas delivery
Patent number
10,969,799
Issue date
Apr 6, 2021
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus for self verification of pressured based mass...
Patent number
10,801,867
Issue date
Oct 13, 2020
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus for pulse gas delivery using an external press...
Patent number
10,725,484
Issue date
Jul 28, 2020
MKS Instruments, Inc.
Michael L'Bassi
G01 - MEASURING TESTING
Information
Patent Grant
Methods and apparatus for multiple channel mass flow and ratio cont...
Patent number
10,698,426
Issue date
Jun 30, 2020
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus for pulse gas delivery with isolation valves
Patent number
10,649,471
Issue date
May 12, 2020
MKS Instruments, Inc.
Junhua Ding
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System for and method of monitoring flow through mass flow controll...
Patent number
10,606,285
Issue date
Mar 31, 2020
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus for pressure-based flow measurement in non-cri...
Patent number
10,514,712
Issue date
Dec 24, 2019
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Grant
System for and method of monitoring flow through mass flow controll...
Patent number
10,503,178
Issue date
Dec 10, 2019
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Grant
System for and method of fast pulse gas delivery
Patent number
10,353,408
Issue date
Jul 16, 2019
MKS Instruments, Inc.
Junhua Ding
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System for and method of fast pulse gas delivery
Patent number
10,126,760
Issue date
Nov 13, 2018
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Grant
Methods and apparatus for wide range mass flow verification
Patent number
10,031,004
Issue date
Jul 24, 2018
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for self verification of pressure-based mass f...
Patent number
10,031,005
Issue date
Jul 24, 2018
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Grant
System for and method of multiple channel fast pulse gas delivery
Patent number
10,031,531
Issue date
Jul 24, 2018
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Grant
Upstream volume mass flow verification systems and methods
Patent number
9,952,078
Issue date
Apr 24, 2018
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Grant
System for and method of monitoring flow through mass flow controll...
Patent number
9,846,074
Issue date
Dec 19, 2017
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Grant
System for and method of monitoring flow through mass flow controll...
Patent number
9,557,744
Issue date
Jan 31, 2017
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Grant
System for and method of providing pressure insensitive self verify...
Patent number
9,471,066
Issue date
Oct 18, 2016
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus for multiple-channel pulse gas delivery system
Patent number
9,348,339
Issue date
May 24, 2016
MKS Instruments, Inc.
Junhua Ding
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of and apparatus for controlling pressure in multiple zones...
Patent number
9,127,361
Issue date
Sep 8, 2015
MKS Instruments, Inc.
Junhua Ding
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System for and method of fast pulse gas delivery
Patent number
8,997,686
Issue date
Apr 7, 2015
MKS Instruments, Inc.
Junhua Ding
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multiple-channel flow ratio controller
Patent number
8,997,791
Issue date
Apr 7, 2015
MKS Instruments, Inc.
Michael L'Bassi
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method of and apparatus for multiple channel flow ratio controller...
Patent number
8,849,466
Issue date
Sep 30, 2014
MKS Instruments, Inc.
Junhua Ding
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Upstream volume mass flow verification systems and methods
Patent number
8,793,082
Issue date
Jul 29, 2014
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Method and Apparatus for Integrated Pressure and Flow Controller
Publication number
20240281007
Publication date
Aug 22, 2024
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Application
Method and Apparatus for Mass Flow Control
Publication number
20240201713
Publication date
Jun 20, 2024
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Application
Method and Apparatus for Mass Flow Verification
Publication number
20230304837
Publication date
Sep 28, 2023
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Application
Method and Apparatus for Pressure Based Mass Flow Control
Publication number
20230266156
Publication date
Aug 24, 2023
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Application
Binary Gas Purity Analyzer
Publication number
20230127693
Publication date
Apr 27, 2023
MKS Instruments, Inc.
Chad David Wilson
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR PULSE GAS DELIVERY WITH CONCENTRATION MEAS...
Publication number
20230031118
Publication date
Feb 2, 2023
MKS Instruments, Inc.
Jim Ye
G05 - CONTROLLING REGULATING
Information
Patent Application
Methods and Apparatus for Pressure Based Mass Flow Ratio Control
Publication number
20220390261
Publication date
Dec 8, 2022
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Application
Method and Apparatus for Pulse Gas Delivery with Pressure Control
Publication number
20220161288
Publication date
May 26, 2022
MKS Instruments, Inc.
Junhua Ding
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pressure Control Using An External Trigger
Publication number
20220147070
Publication date
May 12, 2022
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Application
Methods and Apparatus for Pressure Based Mass Flow Ratio Control
Publication number
20210263541
Publication date
Aug 26, 2021
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Application
Method and Apparatus for Pulse Gas Delivery with Concentration Meas...
Publication number
20210215655
Publication date
Jul 15, 2021
Jim Ye
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Pulse Gas Delivery
Publication number
20200321225
Publication date
Oct 8, 2020
Junhua Ding
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Pulse Gas Delivery Using an External Press...
Publication number
20200301455
Publication date
Sep 24, 2020
Michael L'Bassi
G01 - MEASURING TESTING
Information
Patent Application
Method and Apparatus for Pulse Gas Delivery Using an External Press...
Publication number
20200241578
Publication date
Jul 30, 2020
Michael L'Bassi
G01 - MEASURING TESTING
Information
Patent Application
Method and Apparatus for Pulse Gas Delivery Using an External Press...
Publication number
20200081459
Publication date
Mar 12, 2020
Michael L'Bassi
G05 - CONTROLLING REGULATING
Information
Patent Application
Methods and Apparatus for Multiple Channel Mass Flow and Ratio Cont...
Publication number
20190339725
Publication date
Nov 7, 2019
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Application
Method And Apparatus For Pulse Gas Delivery With Isolation Valves
Publication number
20190243392
Publication date
Aug 8, 2019
Junhua Ding
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
System For And Method Of Fast Pulse Gas Delivery
Publication number
20190056755
Publication date
Feb 21, 2019
Junhua Ding
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
METHOD AND APPARATUS FOR SELF VERIFICATION OF PRESSURED BASED MASS...
Publication number
20180306615
Publication date
Oct 25, 2018
MKS Instruments, Inc.
Junhua Ding
G05 - CONTROLLING REGULATING
Information
Patent Application
Methods and Apparatus for Wide Range Mass Flow Verification
Publication number
20180172491
Publication date
Jun 21, 2018
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM FOR AND METHOD OF MONITORING FLOW THROUGH MASS FLOW CONTROLL...
Publication number
20170199529
Publication date
Jul 13, 2017
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR PRESSURE-BASED FLOW MEASUREMENT IN NON-CRI...
Publication number
20170060143
Publication date
Mar 2, 2017
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Application
Upstream Volume Mass Flow Verification Systems and Methods
Publication number
20150066395
Publication date
Mar 5, 2015
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Application
PRESSURE-BALANCED CONTROL VALVES
Publication number
20140326909
Publication date
Nov 6, 2014
MKS Instruments, Inc.
Junhua Ding
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
System for and Method of Multiple Channel Fast Pulse Gas Delivery
Publication number
20140238498
Publication date
Aug 28, 2014
MKS Instruments, Inc.
Junhua Ding
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
System for and Method of Monitoring Flow Through Mass Flow Controll...
Publication number
20140190579
Publication date
Jul 10, 2014
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Application
System for and Method of Fast Pulse Gas Delivery
Publication number
20140190571
Publication date
Jul 10, 2014
MKS Instruments, Inc.
Junhua Ding
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
System for and Method of Providing Pressure Insensitive Self Verify...
Publication number
20140158211
Publication date
Jun 12, 2014
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Application
Method and Apparatus for Self Verification of Pressured Based Mass...
Publication number
20140083514
Publication date
Mar 27, 2014
MKS Instruments, Inc.
Junhua Ding
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM FOR AND METHOD OF MONITORING FLOW THROUGH MASS FLOW CONTROLL...
Publication number
20130186486
Publication date
Jul 25, 2013
Junhua Ding
G01 - MEASURING TESTING