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Junichi Arami
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Shanghai, CN
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last 30 patents
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Patent Application
METHOD FOR CLEANING GAS CONVEYING DEVICE, AND METHOD AND REACTION D...
Publication number
20130344244
Publication date
Dec 26, 2013
Advanced Micro-Fabrication Equipment Inc.,Shanghai
Zhiyou Du
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
ELECTROSTATIC CHUCK AND BASE FOR PLASMA REACTOR HAVING IMPROVED WAF...
Publication number
20100271745
Publication date
Oct 28, 2010
Advanced Micro-Fabrication Equipment, Inc. Asia
Jinyuan CHEN
H01 - BASIC ELECTRIC ELEMENTS