Membership
Tour
Register
Log in
Junichi Kitano
Follow
Person
Nirasaki, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and processing liquid reuse method
Patent number
11,430,675
Issue date
Aug 30, 2022
Tokyo Electron Limited
Hideaki Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate liquid processing apparatus
Patent number
11,410,861
Issue date
Aug 9, 2022
Tokyo Electron Limited
Takashi Nagai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
Patent number
10,026,629
Issue date
Jul 17, 2018
Tokyo Electron Limited
Mitsunori Nakamori
B08 - CLEANING
Information
Patent Grant
Substrate treatment method, coating treatment apparatus, and substr...
Patent number
8,703,400
Issue date
Apr 22, 2014
Tokyo Electron Limited
Kenji Tsutsumi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Substrate treatment method, coating film removing apparatus, and su...
Patent number
8,366,872
Issue date
Feb 5, 2013
Tokyo Electron Limited
Kenji Tsutsumi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Coating film forming apparatus and coating film forming method for...
Patent number
8,111,372
Issue date
Feb 7, 2012
Tokyo Electron Limited
Hideharu Kyouda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing method, substrate processing system, and compu...
Patent number
8,083,959
Issue date
Dec 27, 2011
Tokyo Electron Limited
Hideharu Kyouda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Developing method and developing unit
Patent number
8,053,180
Issue date
Nov 8, 2011
Tokyo Electron Limited
Yuko Ono
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Developing method and developing apparatus
Patent number
8,054,443
Issue date
Nov 8, 2011
Tokyo Electron Limited
Junichi Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Rinse treatment method, developing treatment method and developing...
Patent number
7,977,039
Issue date
Jul 12, 2011
Tokyo Electron Limited
Takeshi Shimoaoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Coating film forming apparatus and method
Patent number
7,959,988
Issue date
Jun 14, 2011
Tokyo Electron Limited
Taro Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment method, coating treatment apparatus, and substr...
Patent number
7,926,441
Issue date
Apr 19, 2011
Tokyo Electron Limited
Kenji Tsutsumi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Coating/developing apparatus and pattern forming method
Patent number
7,924,396
Issue date
Apr 12, 2011
Tokyo Electron Limited
Hisashi Kawano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Developing method and developing unit
Patent number
7,857,530
Issue date
Dec 28, 2010
Tokyo Electron Limited
Yuko Ono
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Developing method and developing unit
Patent number
7,794,924
Issue date
Sep 14, 2010
Tokyo Electron Limited
Yuko Ono
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Developing method and developing apparatus
Patent number
7,486,377
Issue date
Feb 3, 2009
Tokyo Electron Limited
Junichi Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Developing method and developing unit
Patent number
7,427,168
Issue date
Sep 23, 2008
Tokyo Electron Limited
Yuko Ono
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
7,401,988
Issue date
Jul 22, 2008
Tokyo Electron Limited
Takayuki Katano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
7,208,066
Issue date
Apr 24, 2007
Tokyo Electron Limited
Junichi Kitano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Developing method and developing unit
Patent number
6,955,485
Issue date
Oct 18, 2005
Tokyo Electron Limited
Yuko Ono
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method and system for coating and developing
Patent number
6,884,298
Issue date
Apr 26, 2005
Tokyo Electron Limited
Junichi Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for coating and developing
Patent number
6,875,281
Issue date
Apr 5, 2005
Tokyo Electron Limited
Junichi Kitano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
6,875,466
Issue date
Apr 5, 2005
Tokyo Electron Limited
Hidefumi Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
6,632,281
Issue date
Oct 14, 2003
Tokyo Electron Limited
Junichi Kitano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
6,633,022
Issue date
Oct 14, 2003
Tokyo Electron Limited
Takahiro Kitano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
6,620,251
Issue date
Sep 16, 2003
Tokyo Electron Limited
Junichi Kitano
B08 - CLEANING
Information
Patent Grant
Coating apparatus and mixing apparatus
Patent number
6,620,248
Issue date
Sep 16, 2003
Toyko Electron Limited
Takahiro Kitano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Evaluating method of hydrophobic process, forming method of resist...
Patent number
6,617,095
Issue date
Sep 9, 2003
Tokyo Electron Limited
Junichi Kitano
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
System and method for coating and developing
Patent number
6,585,430
Issue date
Jul 1, 2003
Tokyo Electron Limited
Yuji Matsuyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for coating and developing
Patent number
6,518,199
Issue date
Feb 11, 2003
Tokyo Electron Limited
Junichi Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20220152780
Publication date
May 19, 2022
TOKYO ELECTRON LIMITED
Yuichi DOUKI
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING LIQUID REUSE METHOD
Publication number
20190385869
Publication date
Dec 19, 2019
TOKYO ELECTRON LIMITED
Hideaki Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
Publication number
20180233384
Publication date
Aug 16, 2018
TOKYO ELECTRON LIMITED
Takashi Nagai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
Publication number
20160111303
Publication date
Apr 21, 2016
TOKYO ELECTRON LIMITED
Mitsunori Nakamori
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND COMPU...
Publication number
20120061021
Publication date
Mar 15, 2012
TOKYO ELECTRON LIMITED
Hideharu KYOUDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD, COATING FILM REMOVING APPARATUS, AND SU...
Publication number
20110240597
Publication date
Oct 6, 2011
TOKYO ELECTRON LIMITED
Kenji TSUTSUMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE TREATMENT METHOD, COATING TREATMENT APPARATUS, AND SUBSTR...
Publication number
20110155693
Publication date
Jun 30, 2011
TOKYO ELECTRON LIMITED
Kenji TSUTSUMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATING FILM FORMING APPARATUS AND COATING FILM FORMING METHOD FOR...
Publication number
20100073647
Publication date
Mar 25, 2010
TOKYO ELECTRON LIMITED
Hideharu Kyouda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVELOPING METHOD AND DEVELOPING UNIT
Publication number
20100047725
Publication date
Feb 25, 2010
TOKYO ELECTRON LIMITED
Yuko Ono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVELOPING METHOD AND DEVELOPING APPARATUS
Publication number
20090079948
Publication date
Mar 26, 2009
TOKYO ELECTRON LIMITED
Junichi KITANO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Developing method and developing unit
Publication number
20080284989
Publication date
Nov 20, 2008
TOKYO ELECTRON LIMITED
Yuko Ono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COATING/DEVELOPING APPARATUS AND PATTERN FORMING METHOD
Publication number
20080204675
Publication date
Aug 28, 2008
TOKYO ELECTRON LIMITED
Hisashi Kawano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TREATMENT METHOD, COATING TREATMENT APPARATUS, AND SUBSTR...
Publication number
20080176003
Publication date
Jul 24, 2008
TOKYO ELECTRON LIMITED
Kenji TSUTSUMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD, COATING FILM REMOVING APPARATUS, AND SU...
Publication number
20080176002
Publication date
Jul 24, 2008
TOKYO ELECTRON LIMITED
Kenji TSUTSUMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND COMPU...
Publication number
20080160781
Publication date
Jul 3, 2008
TOKYO ELECTRON LIMITED
Hideharu KYOUDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATING FILM FORMING APPARATUS AND METHOD
Publication number
20080124489
Publication date
May 29, 2008
TOKYO ELECTRON LIMITED
Taro Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Developing method and developing unit
Publication number
20080079917
Publication date
Apr 3, 2008
TOKYO ELECTRON LIMITED
Yuko Ono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Developing method and developing unit
Publication number
20080013946
Publication date
Jan 17, 2008
TOKYO ELECTRON LIMITED
Yuko Ono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20070127916
Publication date
Jun 7, 2007
TOKYO ELECTRON LIMITED
Junichi Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Developing method and developing apparatus
Publication number
20070099129
Publication date
May 3, 2007
TOKYO ELECTON LIMITED
Junichi Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Rinse treatment method, developing treatment method and developing...
Publication number
20070072092
Publication date
Mar 29, 2007
TOKYO ELECTRON LIMITED
Takeshi Shimoaoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Developing method and developing unit
Publication number
20050266359
Publication date
Dec 1, 2005
TOKYO ELECTRON LIMITED
Yuko Ono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate processing method and substrate processing apparatus
Publication number
20050130445
Publication date
Jun 16, 2005
TOKYO ELECTRON LIMITED
Hidefumi Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and system for coating and developing
Publication number
20050048421
Publication date
Mar 3, 2005
TOKYO ELECTRON LIMITED
Junichi Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20040050321
Publication date
Mar 18, 2004
TOKYO ELECTRON LIMITED
Junichi Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20030205196
Publication date
Nov 6, 2003
TOKYO ELECTRON LIMITED
Takahiro Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Developing method and developing unit
Publication number
20030165756
Publication date
Sep 4, 2003
Yuko Ono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and system for coating and developing
Publication number
20030119333
Publication date
Jun 26, 2003
TOKYO ELECTRON LIMITED
Junichi Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate processing method and substrate processing apparatus
Publication number
20030094137
Publication date
May 22, 2003
TOKYO ELECTRON LIMITED
Hidefumi Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and system for coating and developing
Publication number
20030079687
Publication date
May 1, 2003
TOKYO ELECTRON LIMITED
Junichi Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY