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Junichi Miyano
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Miyazaki, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for manufacturing semiconductor
Patent number
7,381,275
Issue date
Jun 3, 2008
Oki Electric Industry Co., Ltd.
Junichi Miyano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of fabricating a protective film by use of vacuum ultraviole...
Patent number
7,267,848
Issue date
Sep 11, 2007
Oki Electric Industry Co., Ltd.
Junichi Miyano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method
Patent number
7,122,486
Issue date
Oct 17, 2006
Oki Electric Industry Co., Ltd.
Kiyohiko Toshikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing low dielectric film by a vacuum ultraviolet...
Patent number
7,026,257
Issue date
Apr 11, 2006
Oki Electric Industry Co., Ltd.
Kiyohiko Toshikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing water-repelling film
Patent number
6,926,933
Issue date
Aug 9, 2005
Oki Electric Industry Co., Ltd.
Junichi Miyano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a low dielectric constant film with tetramethylcy...
Patent number
6,656,854
Issue date
Dec 2, 2003
Oki Electric Industry Co., Ltd.
Junichi Miyano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
6,627,560
Issue date
Sep 30, 2003
Oki Electric Industry Co., Ltd.
Junichi Miyano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing an interlayer dielectric film using vacuum...
Patent number
6,624,094
Issue date
Sep 23, 2003
Oki Electric Industry, Co., Ltd.
Kiyohiko Toshikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Film forming method
Publication number
20050118834
Publication date
Jun 2, 2005
Kiyohiko Toshikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING WATER-REPELLING FILM
Publication number
20050089647
Publication date
Apr 28, 2005
Junichi Miyano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of fabricating a protective film by use of vacuum ultraviole...
Publication number
20040131796
Publication date
Jul 8, 2004
Junichi Miyano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of filling a concave portion with an insulating material
Publication number
20030119234
Publication date
Jun 26, 2003
Junichi Miyano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus and method for manufacturing semiconductor
Publication number
20030075107
Publication date
Apr 24, 2003
Junichi Miyano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of filling a concave portion with an insulating material
Publication number
20020182845
Publication date
Dec 5, 2002
Junichi Miyano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of manufacturing a semiconductor device with a contact hole
Publication number
20020182854
Publication date
Dec 5, 2002
Junichi Miyano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of forming a film by vacuum ultraviolet irradiation
Publication number
20020142095
Publication date
Oct 3, 2002
Yoshikazu Motoyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of manufacturing interlayer dielectric film using vacuum ult...
Publication number
20020028587
Publication date
Mar 7, 2002
Kiyohiko Toshikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of manufacturing low dielectric film by a vacuum ultraviolet...
Publication number
20020025693
Publication date
Feb 28, 2002
Kiyohiko Toshikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...