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Plasma process method
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Patent number 6,410,102
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Issue date Jun 25, 2002
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Canon Kabushiki Kaisha
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Junichiro Hashizume
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma processing method
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Patent number 5,945,353
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Issue date Aug 31, 1999
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Canon Kabushiki Kaisha
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Junichiro Hashizume
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 5,902,405
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Issue date May 11, 1999
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Canon Kabushiki Kaisha
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Shigenori Ueda
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 5,718,769
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Issue date Feb 17, 1998
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Canon Kabushiki Kaisha
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Junichiro Hashizume
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H01 - BASIC ELECTRIC ELEMENTS