Junya KIYOTA

Person

Sammu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Thin-film transistor, oxide semiconductor film, and sputtering target
- Patent number 11,049,976
- Issue date Jun 29, 2021
- ULVAC, Inc.
- Mitsuru Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming thin film and apparatus for forming thin film
- Patent number 8,460,522
- Issue date Jun 11, 2013
- ULVAC, Inc.
- Yuichi Oishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron sputtering apparatus and magnetron sputtering method
- Patent number 8,221,594
- Issue date Jul 17, 2012
- Ulvac, Inc.
- Yasuhiko Akamatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron sputtering electrode, and sputtering apparatus provided w...
- Patent number 8,172,993
- Issue date May 8, 2012
- ULVAC, Inc.
- Yasuhiko Akamatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter source, sputtering device, and sputtering method
- Patent number 7,347,919
- Issue date Mar 25, 2008
- Ulvac, Inc.
- Shigemitsu Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ROLL-TO-ROLL DEPOSITION APPARATUS AND ROLL-TO-ROLL DEPOSITION METHOD
- Publication number 20210002758
- Publication date Jan 7, 2021
- ULVAC, Inc.
- Junichi SAKAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Roll-to-Roll Deposition Apparatus and Roll-to-Roll Deposition Method
- Publication number 20190099775
- Publication date Apr 4, 2019
- ULVAC, Inc.
- JUNICHI SAKAMOTO
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
OXIDE-SINTERED-BODY SPUTTERING TARGET AND METHOD OF PRODUCING THE SAME
- Publication number 20180355472
- Publication date Dec 13, 2018
- Ulvac, Inc.
- KAZUTOSHI TAKAHASHI
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
THIN-FILM TRANSISTOR, OXIDE SEMICONDUCTOR FILM, AND SPUTTERING TARGET
- Publication number 20180337285
- Publication date Nov 22, 2018
- Ulvac, Inc.
- MITSURU UENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing M...
- Publication number 20110198213
- Publication date Aug 18, 2011
- Ulvac, Inc.
- Takaomi Kurata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing M...
- Publication number 20110201150
- Publication date Aug 18, 2011
- Ulvac, Inc.
- Takaomi Kurata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing M...
- Publication number 20110195562
- Publication date Aug 11, 2011
- ULVAC, Inc.
- Takaomi Kurata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum Processing Apparatus
- Publication number 20110180402
- Publication date Jul 28, 2011
- ULVAC, Inc.
- Takaomi Kurata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD
- Publication number 20110048926
- Publication date Mar 3, 2011
- ULVAC, Inc.
- Yasuhiko AKAMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING THIN FILM AND APPARATUS FOR FORMING THIN FILM
- Publication number 20100155225
- Publication date Jun 24, 2010
- Yuichi Oishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON SPUTTERING ELECTRODE, AND SPUTTERING APPARATUS PROIDED WI...
- Publication number 20100051454
- Publication date Mar 4, 2010
- Yasuhiko Akamatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetron sputtering method and magnetron sputtering apparatus
- Publication number 20070158180
- Publication date Jul 12, 2007
- ULVAC, Inc.
- Atsushi Ota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputter source, sputtering device, and sputtering method
- Publication number 20040231973
- Publication date Nov 25, 2004
- ULVAC, Inc.
- Shigemitsu Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Junya KIYOTA

Person

Patents Grantslast 30 patents

Thin-film transistor, oxide semiconductor film, and sputtering target

Method of forming thin film and apparatus for forming thin film

Magnetron sputtering apparatus and magnetron sputtering method

Magnetron sputtering electrode, and sputtering apparatus provided w...

Sputter source, sputtering device, and sputtering method

Patents Applicationslast 30 patents

ROLL-TO-ROLL DEPOSITION APPARATUS AND ROLL-TO-ROLL DEPOSITION METHOD

Roll-to-Roll Deposition Apparatus and Roll-to-Roll Deposition Method

OXIDE-SINTERED-BODY SPUTTERING TARGET AND METHOD OF PRODUCING THE SAME

THIN-FILM TRANSISTOR, OXIDE SEMICONDUCTOR FILM, AND SPUTTERING TARGET

Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing M...

Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing M...

Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing M...

Vacuum Processing Apparatus

MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD

METHOD OF FORMING THIN FILM AND APPARATUS FOR FORMING THIN FILM

MAGNETRON SPUTTERING ELECTRODE, AND SPUTTERING APPARATUS PROIDED WI...

Magnetron sputtering method and magnetron sputtering apparatus

Sputter source, sputtering device, and sputtering method