Junya Minamida

Person

Kikuchi-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,998,954
- Issue date Jun 4, 2024
- Tokyo Electron Limited
- Jun Tamada
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,670,527
- Issue date Jun 6, 2023
- Tokyo Electron Limited
- Daisuke Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,404,295
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,373,849
- Issue date Aug 6, 2019
- Tokyo Electron Limited
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,186,433
- Issue date Jan 22, 2019
- Tokyo Electron Limited
- Junya Minamida
- B08 - CLEANING
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 10,128,132
- Issue date Nov 13, 2018
- Tokyo Electron Limited
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 10,056,269
- Issue date Aug 21, 2018
- Tokyo Electron Limited
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, exhaust switching unit and s...
- Patent number 9,842,747
- Issue date Dec 12, 2017
- Tokyo Electron Limited
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,666,463
- Issue date May 30, 2017
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,978,670
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Junya Minamida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus
- Patent number 8,662,811
- Issue date Mar 4, 2014
- Tokyo Electron Limited
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system
- Patent number 8,033,244
- Issue date Oct 11, 2011
- Tokyo Electron Limited
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing solution supply system, processing solution supply metho...
- Patent number 7,918,242
- Issue date Apr 5, 2011
- Tokyo Electron Limited
- Junya Minamida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Coating process method and coating process apparatus
- Patent number 7,485,188
- Issue date Feb 3, 2009
- Tokyo Electron Limited
- Takashi Takekuma
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230065374
- Publication date Mar 2, 2023
- TOKYO ELECTRON LIMITED
- Jun Tamada
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200219736
- Publication date Jul 9, 2020
- TOKYO ELECTRON LIMITED
- Daisuke Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190252223
- Publication date Aug 15, 2019
- TOKYO ELECTRON LIMITED
- Junya Minamida
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20180068873
- Publication date Mar 8, 2018
- TOKYO ELECTRON LIMITED
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180061688
- Publication date Mar 1, 2018
- TOKYO ELECTRON LIMITED
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20160126112
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160121373
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Junya Minamida
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, EXHAUST SWITCHING UNIT AND S...
- Publication number 20160124438
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Junya Minamida
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150187621
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20110103923
- Publication date May 5, 2011
- TOKYO ELECTRON LIMITED
- Junya Minamida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20110079252
- Publication date Apr 7, 2011
- TOKYO ELECTRON LIMITED
- Junya MINAMIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20090151631
- Publication date Jun 18, 2009
- TOKYO ELECTRON LIMITED
- Junya MINAMIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing solution supply system, processing solution supply metho...
- Publication number 20070269207
- Publication date Nov 22, 2007
- TOKYO ELECTRON LIMITED
- Junya Minamida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating process method and coating process apparatus
- Publication number 20060144330
- Publication date Jul 6, 2006
- Takashi Takekuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating process method and coating process apparatus
- Publication number 20030180444
- Publication date Sep 25, 2003
- Takashi Takekuma
- H01 - BASIC ELECTRIC ELEMENTS

Junya Minamida

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus

Substrate liquid processing apparatus

Substrate liquid processing apparatus

Substrate liquid processing apparatus, exhaust switching unit and s...

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus

Substrate processing system

Processing solution supply system, processing solution supply metho...

Coating process method and coating process apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS, EXHAUST SWITCHING UNIT AND S...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM

Processing solution supply system, processing solution supply metho...

Coating process method and coating process apparatus

Coating process method and coating process apparatus