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Jussi OKSANEN
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Nummela, FI
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last 30 patents
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Patent Application
MEMS DEVICE WITH A CAP LAYER HAVING GAPS AND METHOD OF MANUFACTURIN...
Publication number
20240409398
Publication date
Dec 12, 2024
Murata Manufacturing Co., Ltd.
Konsta HANNULA
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT
Publication number
20230406698
Publication date
Dec 21, 2023
Murata Manufacturing Co., Ltd.
Altti TORKKELI
B81 - MICRO-STRUCTURAL TECHNOLOGY