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DC Bias in Plasma Process
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Publication number 20240071722
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Publication date Feb 29, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Sheng-Liang Pan
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H01 - BASIC ELECTRIC ELEMENTS
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INTEGRATED CIRCUIT
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Publication number 20240023457
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Publication date Jan 18, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Tai-Yen PENG
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Self-Aligned Double Patterning
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Publication number 20230282488
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Publication date Sep 7, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Kuan-Wei Huang
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H01 - BASIC ELECTRIC ELEMENTS
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INTEGRATED CIRCUIT STRUCTURE
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Publication number 20230210028
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Publication date Jun 29, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Tai-Yen PENG
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Self-Aligned Double Patterning
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Publication number 20220384201
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Publication date Dec 1, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Kuan-Wei Huang
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H01 - BASIC ELECTRIC ELEMENTS
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DOUBLE PATTERNING METHOD
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Publication number 20220359222
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Publication date Nov 10, 2022
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Chia-Ying Lee
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H01 - BASIC ELECTRIC ELEMENTS
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DC Bias in Plasma Process
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Publication number 20220359158
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Publication date Nov 10, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Sheng-Liang Pan
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H01 - BASIC ELECTRIC ELEMENTS
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INTEGRATED CIRCUIT
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Publication number 20220190237
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Publication date Jun 16, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Tai-Yen PENG
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H01 - BASIC ELECTRIC ELEMENTS
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INTEGRATED CIRCUIT STRUCTURE
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Publication number 20210343937
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Publication date Nov 4, 2021
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Tai-Yen PENG
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H01 - BASIC ELECTRIC ELEMENTS
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DOUBLE PATTERNING METHOD
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Publication number 20210143020
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Publication date May 13, 2021
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Taiwan Semiconductor Manufacturing Co., LTD
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Chia-Ying LEE
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H01 - BASIC ELECTRIC ELEMENTS
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