Kafal Lai

Person

  • Poughkeepsie, NY, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    REDUCING CONTAMINATION IN IMMERSION LITHOGRAPHY

    • Publication number 20080284993
    • Publication date Nov 20, 2008
    • International Business Machines Corporation
    • Dmitriy Shneyder
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    REDUCING CONTAMINATION IN IMMERSION LITHOGRAPHY

    • Publication number 20080284994
    • Publication date Nov 20, 2008
    • International Business Machines Corporation
    • Dmitriy Shneyder
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY