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Kafal Lai
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Poughkeepsie, NY, US
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last 30 patents
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Patent Grant
Reducing contamination in immersion lithography
Patent number
7,869,002
Issue date
Jan 11, 2011
International Business Machines Corporation
Dmitriy Shneyder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Reducing contamination in immersion lithography
Patent number
7,782,445
Issue date
Aug 24, 2010
International Business Machines Corporation
Dmitriy Shneyder
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
REDUCING CONTAMINATION IN IMMERSION LITHOGRAPHY
Publication number
20080284993
Publication date
Nov 20, 2008
International Business Machines Corporation
Dmitriy Shneyder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REDUCING CONTAMINATION IN IMMERSION LITHOGRAPHY
Publication number
20080284994
Publication date
Nov 20, 2008
International Business Machines Corporation
Dmitriy Shneyder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY