Kaihan Abidi Ashtiani

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Nanvet, NY, US

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Patents Grantslast 30 patents

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Apparatus and method for uniform, low-damage anisotropic plasma pro...
- Patent number 6,083,363
- Issue date Jul 4, 2000
- Tokyo Electron Limited
- Kaihan Abidi Ashtiani
- H01 - BASIC ELECTRIC ELEMENTS