Kaiming Yang

Person

Beijing, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Vertical motion protection method and device based on dual-stage mo...
- Patent number 12,169,367
- Issue date Dec 17, 2024
- Tsinghua University
- Kaiming Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser interference photolithography system
- Patent number 12,038,690
- Issue date Jul 16, 2024
- Tsinghua University
- Leijie Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plane grating calibration system
- Patent number 11,940,349
- Issue date Mar 26, 2024
- Tsinghua University
- Leijie Wang
- G01 - MEASURING TESTING
Information Patent Grant
Method for calibrating an error of installation of an interferomete...
- Patent number 11,022,423
- Issue date Jun 1, 2021
- Tsinghua University
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Magnetic-fluid momentum sphere
- Patent number 10,597,172
- Issue date Mar 24, 2020
- Tsinghua University
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Magnetic levitation reaction sphere
- Patent number 10,532,832
- Issue date Jan 14, 2020
- Tsinghua University
- Ming Zhang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Six-degree-of-freedom displacement measurement method for exposure...
- Patent number 9,995,569
- Issue date Jun 12, 2018
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Three-DOF heterodyne grating interferometer displacement measuremen...
- Patent number 9,903,704
- Issue date Feb 27, 2018
- Tsinghua University
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Coarse motion and fine motion integrated reticle stage driven by pl...
- Patent number 9,904,183
- Issue date Feb 27, 2018
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dual-frequency grating interferometer displacement measurement system
- Patent number 9,885,556
- Issue date Feb 6, 2018
- Tsinghua University
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Heterodyne grating interferometer displacement measurement system
- Patent number 9,879,979
- Issue date Jan 30, 2018
- Tsinghua University
- Ming Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Optical grating phase modulator for laser interference photoetching...
- Patent number 9,869,857
- Issue date Jan 16, 2018
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Magnetically suspended coarse motion and fine motion integrated ret...
- Patent number 9,791,789
- Issue date Oct 17, 2017
- Tsinghua University
- Ming Zhang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Planar motor rotor displacement measuring device and its measuring...
- Patent number 9,766,054
- Issue date Sep 19, 2017
- Shanghai Micro Electronics Equipment Co., Ltd.
- Jinchun Hu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Negative stiffness system for gravity compensation of micropositioner
- Patent number 9,752,643
- Issue date Sep 5, 2017
- Shanghai Micro Electronics Equipment Co., Ltd.
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Two-dimensional locating method of motion platform based on magneti...
- Patent number 9,455,650
- Issue date Sep 27, 2016
- Tsinghua University
- Jinchun Hu
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method for measuring displacement of planar motor rotor
- Patent number 9,310,782
- Issue date Apr 12, 2016
- Shanghai Micro Electronics Equipment Co., Ltd.
- Yu Zhu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Single degree of freedom vibration isolating device of linear motor...
- Patent number 9,310,797
- Issue date Apr 12, 2016
- Tsinghua University
- Kaiming Yang
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for measuring displacement of large-range moving platform
- Patent number 9,182,217
- Issue date Nov 10, 2015
- Tsinghua University
- Ming Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Two-dimensional, position-sensitive sensor-based system for positio...
- Patent number 8,958,078
- Issue date Feb 17, 2015
- Tsinghua University
- Ming Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Nanometer-precision six-degree-of-freedom magnetic suspension micro...
- Patent number 8,599,361
- Issue date Dec 3, 2013
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dual-stage switching system for lithographic machine
- Patent number 8,284,380
- Issue date Oct 9, 2012
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Micro stage with 6 degrees of freedom
- Patent number 8,084,897
- Issue date Dec 27, 2011
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...
- Publication number 20240319619
- Publication date Sep 26, 2024
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
SCANNING INTERFERENCE LITHOGRAPHIC SYSTEM
- Publication number 20240264534
- Publication date Aug 8, 2024
- TSINGHUA UNIVERSITY
- Leijie WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE LIGHT BEAM PHASE MEASUREMENT METHOD IN LASER INTERFERENCE...
- Publication number 20240061352
- Publication date Feb 22, 2024
- TSINGHUA UNIVERSITY
- Leijie WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER INTERFERENCE PHOTOLITHOGRAPHY SYSTEM
- Publication number 20240053683
- Publication date Feb 15, 2024
- Tsinghua University
- Leijie WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VERTICAL MOTION PROTECTION METHOD AND DEVICE BASED ON DUAL-STAGE MO...
- Publication number 20230359132
- Publication date Nov 9, 2023
- TSINGHUA UNIVERSITY
- Kaiming YANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR REGULATING AND CONTROLLING INCIDENT ANGLE OF...
- Publication number 20230280658
- Publication date Sep 7, 2023
- TSINGHUA UNIVERSITY
- Leijie WANG
- G01 - MEASURING TESTING
Information Patent Application
PLANE GRATING CALIBRATION SYSTEM
- Publication number 20220260452
- Publication date Aug 18, 2022
- TSINGHUA UNIVERSITY
- Leijie WANG
- G01 - MEASURING TESTING
Information Patent Application
SEAL GASKET FOR FLAT PLATE STRUCTURE AND SEALING STRUCTURE THEREOF
- Publication number 20220025972
- Publication date Jan 27, 2022
- TSINGHUA UNIVERSITY
- Rong CHENG
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
A METHOD FOR CALIBRATING AN ERROR OF INSTALLATION OF AN INTERFEROME...
- Publication number 20210033383
- Publication date Feb 4, 2021
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
MAGNETIC-FLUID MOMENTUM SPHERE
- Publication number 20180273212
- Publication date Sep 27, 2018
- TSINGHUA UNIVERSITY
- Yu ZHU
- B64 - AIRCRAFT AVIATION COSMONAUTICS
Information Patent Application
MAGNETIC LEVITATION REACTION SPHERE
- Publication number 20180170581
- Publication date Jun 21, 2018
- TSINGHUA UNIVERSITY
- Ming ZHANG
- G05 - CONTROLLING REGULATING
Information Patent Application
SIX-DEGREE-OF-FREEDOM DISPLACEMENT MEASUREMENT METHOD FOR EXPOSURE...
- Publication number 20180080757
- Publication date Mar 22, 2018
- TSINGHUA UNIVERSITY
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Application
COARSE MOTION AND FINE MOTION INTEGRATED RETICLE STAGE DRIVEN BY PL...
- Publication number 20170115580
- Publication date Apr 27, 2017
- TSINGHUA UNIVERSITY
- Yu ZHU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MAGNETICALLY SUSPENDED COARSE MOTION AND FINE MOTION INTEGRATED RET...
- Publication number 20170052461
- Publication date Feb 23, 2017
- TSINGHUA UNIVERSITY
- Ming ZHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
THREE-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMEN...
- Publication number 20160153764
- Publication date Jun 2, 2016
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
TWO-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT...
- Publication number 20160138903
- Publication date May 19, 2016
- TSINGHUA UNIVERSITY
- Ming ZHANG
- G01 - MEASURING TESTING
Information Patent Application
NEGATIVE STIFFNESS SYSTEM FOR GRAVITY COMPENSATION OF MICROPOSITIONER
- Publication number 20150369331
- Publication date Dec 24, 2015
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Yu ZHU
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
OPTICAL GRATING PHASE MODULATOR FOR LASER INTERFERENCE PHOTOETCHING...
- Publication number 20150362723
- Publication date Dec 17, 2015
- TSINGHUA UNIVERSITY
- Yu Zhu
- G02 - OPTICS
Information Patent Application
HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM
- Publication number 20150338205
- Publication date Nov 26, 2015
- TSINGHUA UNIVERSITY
- Ming Zhang
- G01 - MEASURING TESTING
Information Patent Application
MAGLEV WORKPIECE TABLE WITH SIX DEGREES OF FREEDOM
- Publication number 20150326150
- Publication date Nov 12, 2015
- TSINGHUA UNIVERSITY
- Yu ZHU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Wafer Stage Having Function of Anti-Collision
- Publication number 20150311099
- Publication date Oct 29, 2015
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Yu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL-FREQUENCY GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM
- Publication number 20150268031
- Publication date Sep 24, 2015
- TSINGHUA UNIVERSITY
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING DISPLACEMENT OF PLANAR MOTOR ROTOR
- Publication number 20150097508
- Publication date Apr 9, 2015
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING DISPLACEMENT OF LARGE-RANGE MOVING PLATFORM
- Publication number 20150085302
- Publication date Mar 26, 2015
- TSINGHUA UNIVERSITY
- Ming Zhang
- G01 - MEASURING TESTING
Information Patent Application
SINGLE DEGREE OF FREEDOM VIBRATION ISOLATING DEVICE OF LINEAR MOTOR...
- Publication number 20150077032
- Publication date Mar 19, 2015
- TSINGHUA UNIVERSITY
- Kaiming Yang
- G05 - CONTROLLING REGULATING
Information Patent Application
PLANAR MOTOR ROTOR DISPLACEMENT MEASURING DEVICE AND ITS MEASURING...
- Publication number 20150012242
- Publication date Jan 8, 2015
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Jinchun Hu
- G01 - MEASURING TESTING
Information Patent Application
TWO-DIMENSIONAL, POSITION-SENSITIVE SENSOR-BASED SYSTEM FOR POSITIO...
- Publication number 20140160495
- Publication date Jun 12, 2014
- TSINGHUA UNIVERSITY
- Ming Zhang
- G01 - MEASURING TESTING
Information Patent Application
NANOMETER-PRECISION SIX-DEGREE-OF-FREEDOM MAGNETIC SUSPENSION MICRO...
- Publication number 20130038853
- Publication date Feb 14, 2013
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TWO-DIMENSIONAL LOCATING METHOD OF MOTION PLATFORM BASED ON MAGNETI...
- Publication number 20130024157
- Publication date Jan 24, 2013
- Jinchun Hu
- G01 - MEASURING TESTING
Information Patent Application
DUAL-STAGE SWITCHING SYSTEM FOR LITHOGRAPHIC MACHINE
- Publication number 20100208227
- Publication date Aug 19, 2010
- TSINGHUA UNIVERSITY
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kaiming Yang

Person

Patents Grantslast 30 patents

Vertical motion protection method and device based on dual-stage mo...

Laser interference photolithography system

Plane grating calibration system

Method for calibrating an error of installation of an interferomete...

Magnetic-fluid momentum sphere

Magnetic levitation reaction sphere

Six-degree-of-freedom displacement measurement method for exposure...

Three-DOF heterodyne grating interferometer displacement measuremen...

Coarse motion and fine motion integrated reticle stage driven by pl...

Dual-frequency grating interferometer displacement measurement system

Heterodyne grating interferometer displacement measurement system

Optical grating phase modulator for laser interference photoetching...

Magnetically suspended coarse motion and fine motion integrated ret...

Planar motor rotor displacement measuring device and its measuring...

Negative stiffness system for gravity compensation of micropositioner

Two-dimensional locating method of motion platform based on magneti...

Method for measuring displacement of planar motor rotor

Single degree of freedom vibration isolating device of linear motor...

Method for measuring displacement of large-range moving platform

Two-dimensional, position-sensitive sensor-based system for positio...

Nanometer-precision six-degree-of-freedom magnetic suspension micro...

Dual-stage switching system for lithographic machine

Micro stage with 6 degrees of freedom

Patents Applicationslast 30 patents

PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...

SCANNING INTERFERENCE LITHOGRAPHIC SYSTEM

EXPOSURE LIGHT BEAM PHASE MEASUREMENT METHOD IN LASER INTERFERENCE...

LASER INTERFERENCE PHOTOLITHOGRAPHY SYSTEM

VERTICAL MOTION PROTECTION METHOD AND DEVICE BASED ON DUAL-STAGE MO...

DEVICE AND METHOD FOR REGULATING AND CONTROLLING INCIDENT ANGLE OF...

PLANE GRATING CALIBRATION SYSTEM

SEAL GASKET FOR FLAT PLATE STRUCTURE AND SEALING STRUCTURE THEREOF

A METHOD FOR CALIBRATING AN ERROR OF INSTALLATION OF AN INTERFEROME...

MAGNETIC-FLUID MOMENTUM SPHERE

MAGNETIC LEVITATION REACTION SPHERE

SIX-DEGREE-OF-FREEDOM DISPLACEMENT MEASUREMENT METHOD FOR EXPOSURE...

COARSE MOTION AND FINE MOTION INTEGRATED RETICLE STAGE DRIVEN BY PL...

MAGNETICALLY SUSPENDED COARSE MOTION AND FINE MOTION INTEGRATED RET...

THREE-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMEN...

TWO-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT...

NEGATIVE STIFFNESS SYSTEM FOR GRAVITY COMPENSATION OF MICROPOSITIONER

OPTICAL GRATING PHASE MODULATOR FOR LASER INTERFERENCE PHOTOETCHING...

HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM

MAGLEV WORKPIECE TABLE WITH SIX DEGREES OF FREEDOM

Wafer Stage Having Function of Anti-Collision

DUAL-FREQUENCY GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM

METHOD FOR MEASURING DISPLACEMENT OF PLANAR MOTOR ROTOR

METHOD FOR MEASURING DISPLACEMENT OF LARGE-RANGE MOVING PLATFORM

SINGLE DEGREE OF FREEDOM VIBRATION ISOLATING DEVICE OF LINEAR MOTOR...

PLANAR MOTOR ROTOR DISPLACEMENT MEASURING DEVICE AND ITS MEASURING...

TWO-DIMENSIONAL, POSITION-SENSITIVE SENSOR-BASED SYSTEM FOR POSITIO...

NANOMETER-PRECISION SIX-DEGREE-OF-FREEDOM MAGNETIC SUSPENSION MICRO...

TWO-DIMENSIONAL LOCATING METHOD OF MOTION PLATFORM BASED ON MAGNETI...

DUAL-STAGE SWITCHING SYSTEM FOR LITHOGRAPHIC MACHINE