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Yamanashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Magnetron sputtering apparatus and magnetron sputtering method
Patent number
11,901,166
Issue date
Feb 13, 2024
Tokyo Electron Limited
Tetsuya Miyashita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus and film forming method
Patent number
11,894,222
Issue date
Feb 6, 2024
Tokyo Electron Limited
Atsushi Takeuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for manufacturing magnetoresistive element
Patent number
10,566,525
Issue date
Feb 18, 2020
Tokyo Electron Limited
Hiroki Maehara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition device and deposition method
Patent number
10,309,005
Issue date
Jun 4, 2019
Tokyo Electron Limited
Yasuhiko Kojima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum-processing apparatus, vacuum-processing method, and storage...
Patent number
9,790,590
Issue date
Oct 17, 2017
Tokyo Electron Limited
Shinji Furukawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus and film forming method
Patent number
9,551,060
Issue date
Jan 24, 2017
Tokyo Electron Limited
Atsushi Gomi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
MANUFACTURING METHOD FOR MAGNETORESISTANCE EFFECT ELEMENT, OXIDATIO...
Publication number
20230371391
Publication date
Nov 16, 2023
TOKYO ELECTRON LIMITED
Kanto NAKAMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM THICKNESS MEASUREMENT METHOD, FILM THICKNESS MEASUREMENT DEVIC...
Publication number
20230011226
Publication date
Jan 12, 2023
TOKYO ELECTRON LIMITED
Kazunaga ONO
G01 - MEASURING TESTING
Information
Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
Publication number
20230005989
Publication date
Jan 5, 2023
TOKYO ELECTRON LIMITED
Keisuke SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20220341028
Publication date
Oct 27, 2022
TOKYO ELECTRON LIMITED
Kanto NAKAMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD
Publication number
20220108880
Publication date
Apr 7, 2022
TOKYO ELECTRON LIMITED
Tetsuya MIYASHITA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
Publication number
20210407779
Publication date
Dec 30, 2021
TOKYO ELECTRON LIMITED
Atsushi TAKEUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING DEVICE AND PROCESSING SYSTEM
Publication number
20200232090
Publication date
Jul 23, 2020
TOKYO ELECTRON LIMITED
Hiroki MAEHARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
OXIDATION PROCESSING MODULE, SUBSTRATE PROCESSING SYSTEM, AND OXIDA...
Publication number
20200123649
Publication date
Apr 23, 2020
TOKYO ELECTRON LIMITED
Kazunaga ONO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR MANUFACTURING MAGNETORESISTIVE ELEMENT
Publication number
20180366641
Publication date
Dec 20, 2018
TOKYO ELECTRON LIMITED
Hiroki MAEHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Forming Perpendicular Magnetization Type Magnetic Tunnel...
Publication number
20170317273
Publication date
Nov 2, 2017
TOKYO ELECTRON LIMITED
Toru KITADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION DEVICE AND DEPOSITION METHOD
Publication number
20160251746
Publication date
Sep 1, 2016
Tokyo Electron Limited
Yasuhiko KOJIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESSING APPARATUS
Publication number
20160071707
Publication date
Mar 10, 2016
TOKYO ELECTRON LIMITED
Shinji FURUKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
Publication number
20160032446
Publication date
Feb 4, 2016
TOKYO ELECTRON LIMITED
Atsushi GOMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Vacuum-Processing Apparatus, Vacuum-Processing Method, and Storage...
Publication number
20150187546
Publication date
Jul 2, 2015
TOKYO ELECTRON LIMITED
Shinji Furukawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNETRON SPUTTERING APPARATUS
Publication number
20150187549
Publication date
Jul 2, 2015
TOKYO ELECTRON LIMITED
Toru Kitada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETRON SPUTTERING DEVICE, MAGNETRON SPUTTERING METHOD, AND NON-T...
Publication number
20150136596
Publication date
May 21, 2015
TOKYO ELECTRON LIMITED
Kanto Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING APPARATUS
Publication number
20150114835
Publication date
Apr 30, 2015
TOKYO ELECTRON LIMITED
Atsushi GOMI
H01 - BASIC ELECTRIC ELEMENTS