Karey L. Holland

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Phoenix, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Multi-step chemical mechanical polishing
- Patent number 6,261,158
- Issue date Jul 17, 2001
- Speedfam-IPEC
- Karey Holland
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for concurrent pad conditioning and wafer buff...
- Patent number 6,234,883
- Issue date May 22, 2001
- LSI Logic Corporation
- Michael J. Berman
- B24 - GRINDING POLISHING