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Textured chamber surface
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Patent number 8,142,989
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Issue date Mar 27, 2012
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Quantum Global Technologies LLC
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Karl Brueckner
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Textured chamber surface
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Patent number 7,618,769
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Issue date Nov 17, 2009
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Applied Materials, Inc.
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Karl Brueckner
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Cleaning of chamber components
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Patent number 7,264,679
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Issue date Sep 4, 2007
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Applied Materials, Inc.
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Marc O'Donnell Schweitzer
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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