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Karlfried Osterried
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Aalen, DE
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Patents Grants
last 30 patents
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Patent Grant
Illumination system with a plurality of individual gratings
Patent number
6,836,530
Issue date
Dec 28, 2004
Carl Zeiss SMT AG
Wolfgang Singer
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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Patent Grant
Device for the low-deformation support of an optical element and me...
Patent number
6,441,975
Issue date
Aug 27, 2002
Carl-Zeiss-Stiftung
Michael Ebert
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
Illumination system with a plurality of individual gratings
Publication number
20030099040
Publication date
May 29, 2003
Carl Zeiss Cemiconductor Manufacturing Technologies AG
Wolfgang Singer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY