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Karsten Schneider
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Dresden, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Methods for etching a dielectric barrier layer with high selectivity
Patent number
7,977,245
Issue date
Jul 12, 2011
Applied Materials, Inc.
Ying Xiao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High-density plasma etching of carbon-based low-k materials in a in...
Patent number
6,284,149
Issue date
Sep 4, 2001
Applied Materials, Inc.
Zongyu Li
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHODS FOR ETCHING A BOTTOM ANTI-REFLECTIVE COATING LAYER IN DUAL...
Publication number
20070224825
Publication date
Sep 27, 2007
Ying Xiao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for etching a bottom anti-reflective coating layer in dual...
Publication number
20070224827
Publication date
Sep 27, 2007
Ying Xiao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for etching a dielectric barrier layer with high selectivity
Publication number
20070224807
Publication date
Sep 27, 2007
APPLIED MATERIALS, INC.
Ying Xiao
H01 - BASIC ELECTRIC ELEMENTS