Katrina Mikhaylich

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for correlating gap value to meniscus stability in processi...
- Patent number 8,287,656
- Issue date Oct 16, 2012
- Lam Research Corporation
- G. Grant Peng
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods of and apparatus for correlating gap value to meniscus stab...
- Patent number 8,051,863
- Issue date Nov 8, 2011
- Lam Research Corporation
- G. Grant Peng
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and system for chemical mechanical polishing pad cleaning
- Patent number 7,270,597
- Issue date Sep 18, 2007
- Lam Research Corporation
- Julia S. Svirchevski
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for simultaneously cleaning the front side and...
- Patent number 7,231,682
- Issue date Jun 19, 2007
- Lam Research Corporation
- John M. Boyd
- B08 - CLEANING
Information Patent Grant
End-point detection apparatus
- Patent number 7,029,369
- Issue date Apr 18, 2006
- Lam Research Corporation
- Katrina A. Mikhaylich
- B24 - GRINDING POLISHING
Information Patent Grant
Method and system for cleaning a chemical mechanical polishing pad
- Patent number 6,994,611
- Issue date Feb 7, 2006
- Lam Research Corporation
- Julia S. Svirchevski
- B24 - GRINDING POLISHING
Information Patent Grant
Method for controlling galvanic corrosion effects on a single-wafer...
- Patent number 6,858,091
- Issue date Feb 22, 2005
- Lam Research Corporation
- John M. Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ local heating using megasonic transducer resonator
- Patent number 6,845,778
- Issue date Jan 25, 2005
- Lam Research Corporation
- John M. Boyd
- B08 - CLEANING
Information Patent Grant
Drip manifold for uniform chemical delivery
- Patent number 6,827,793
- Issue date Dec 7, 2004
- Lam Research Corporation
- Don E. Anderson
- B08 - CLEANING
Information Patent Grant
Web-style pad conditioning system and methods for implementing the...
- Patent number 6,800,020
- Issue date Oct 5, 2004
- Lam Research Corporation
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Grant
End-point detection system for chemical mechanical polishing applic...
- Patent number 6,726,530
- Issue date Apr 27, 2004
- Lam Research Corporation
- Katrina A. Mikhaylich
- B24 - GRINDING POLISHING
Information Patent Grant
System for cleaning a semiconductor wafer
- Patent number 6,711,775
- Issue date Mar 30, 2004
- Lam Research Corporation
- Katrina A. Mikhaylich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for qualifying a chemical mechanical planariza...
- Patent number 6,679,763
- Issue date Jan 20, 2004
- Lam Research Corporation
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Grant
Drip manifold for uniform chemical delivery
- Patent number 6,622,335
- Issue date Sep 23, 2003
- Lam Research Corporation
- Don E. Anderson
- B08 - CLEANING
Information Patent Grant
Method and apparatus for asymmetric processing of front side and ba...
- Patent number 6,616,516
- Issue date Sep 9, 2003
- Lam Research Corporation
- Michael Ravkin
- B24 - GRINDING POLISHING
Information Patent Grant
Method for cleaning and treating a semiconductor wafer after chemic...
- Patent number 6,537,381
- Issue date Mar 25, 2003
- Lam Research Corporation
- Katrina A. Mikhaylich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sacrificial retaining ring CMP system and methods for implementing...
- Patent number 6,471,566
- Issue date Oct 29, 2002
- Lam Research Corporation
- Katrina A. Mikhaylich
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for qualifying a chemical mechanical planariza...
- Patent number 6,435,952
- Issue date Aug 20, 2002
- Lam Research Corporation
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Grant
System and method of defect optimization for chemical mechanical pl...
- Patent number 6,431,959
- Issue date Aug 13, 2002
- Lam Research Corporation
- Katrina Mikhaylich
- B24 - GRINDING POLISHING
Information Patent Grant
End-point detection system for chemical mechanical posing applications
- Patent number 6,375,540
- Issue date Apr 23, 2002
- Lam Research Corporation
- Katrina A. Mikhaylich
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for conditioning a fixed abrasive polishing pa...
- Patent number 6,361,414
- Issue date Mar 26, 2002
- Lam Research Corporation
- Mike Ravkin
- B24 - GRINDING POLISHING
Information Patent Grant
Method and system for cleaning a chemical mechanical polishing pad
- Patent number 6,352,595
- Issue date Mar 5, 2002
- Lam Research Corporation
- Julia S. Svirchevski
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for HF-HF cleaning
- Patent number 6,170,110
- Issue date Jan 9, 2001
- Lam Research Corporation
- Julia Svirchevski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of HF-HF Cleaning
- Patent number 6,093,254
- Issue date Jul 25, 2000
- Lam Research Corporation
- Julia Svirchevski
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR CORRELATING GAP VALUE TO MENISCUS STABILITY IN PROCESSI...
- Publication number 20120006359
- Publication date Jan 12, 2012
- G. Grant Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF AND APPARATUS FOR CORRELATING GAP VALUE TO MENISCUS STAB...
- Publication number 20090101173
- Publication date Apr 23, 2009
- G. Grant Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for drying substrates using a surface tensions...
- Publication number 20080148595
- Publication date Jun 26, 2008
- LAM RESEARCH CORPORATION
- John M. de Larios
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for chemical mechanical polishing pad cleaning
- Publication number 20060040595
- Publication date Feb 23, 2006
- Lam Research Corp.
- Julia S. Svirchevski
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus for controlling galvanic corrosion effects on a single-wa...
- Publication number 20050121059
- Publication date Jun 9, 2005
- Lam Research Corporation
- John M. Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for cleaning a semiconductor wafer
- Publication number 20040216764
- Publication date Nov 4, 2004
- LAM RESEARCH CORPORATION
- Katrina A. Mikhaylich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
End-point detection apparatus
- Publication number 20040157531
- Publication date Aug 12, 2004
- LAM RESEARCH CORPORATION
- Katrina A. Mikhaylich
- B24 - GRINDING POLISHING
Information Patent Application
Drip manifold for uniform chemical delivery
- Publication number 20040060575
- Publication date Apr 1, 2004
- Lam Research Corporation
- Don E. Anderson
- B08 - CLEANING
Information Patent Application
In-situ local heating using megasonic transducer resonator
- Publication number 20030183246
- Publication date Oct 2, 2003
- LAM RESEARCH CORPORATION
- John M. Boyd
- B08 - CLEANING
Information Patent Application
System and method of defect optimization for chemical mechanical pl...
- Publication number 20030060126
- Publication date Mar 27, 2003
- Lam Research Corporation
- Katrina Mikhaylich
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus and method for controlling galvanic corrosion effects on...
- Publication number 20030010361
- Publication date Jan 16, 2003
- John M. Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for qualifying a chemical mechanical planariza...
- Publication number 20020081951
- Publication date Jun 27, 2002
- Lam Research Corporation
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEM FOR CLEANING A SEMICONDUCTOR WAFER
- Publication number 20020062842
- Publication date May 30, 2002
- KATRINA A. MIKHAYLICH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
End-point detection system for chemical mechanical polishing applic...
- Publication number 20020061713
- Publication date May 23, 2002
- LAM RESEARCH CORPORATION
- Katrina A. Mikhaylich
- B24 - GRINDING POLISHING
Information Patent Application
Method and system for cleaning a chemical mechanical polishing pad
- Publication number 20020039877
- Publication date Apr 4, 2002
- Julia S. Svirchevski
- B24 - GRINDING POLISHING
Information Patent Application
POST-PLASMA PROCESSING WAFER CLEANING METHOD AND SYSTEM
- Publication number 20020031914
- Publication date Mar 14, 2002
- JULIA S. SVIRCHEVSKI
- H01 - BASIC ELECTRIC ELEMENTS

Katrina Mikhaylich

Person

Patents Grantslast 30 patents

Methods for correlating gap value to meniscus stability in processi...

Methods of and apparatus for correlating gap value to meniscus stab...

Method and system for chemical mechanical polishing pad cleaning

Method and apparatus for simultaneously cleaning the front side and...

End-point detection apparatus

Method and system for cleaning a chemical mechanical polishing pad

Method for controlling galvanic corrosion effects on a single-wafer...

In-situ local heating using megasonic transducer resonator

Drip manifold for uniform chemical delivery

Web-style pad conditioning system and methods for implementing the...

End-point detection system for chemical mechanical polishing applic...

System for cleaning a semiconductor wafer

Apparatus and method for qualifying a chemical mechanical planariza...

Drip manifold for uniform chemical delivery

Method and apparatus for asymmetric processing of front side and ba...

Method for cleaning and treating a semiconductor wafer after chemic...

Sacrificial retaining ring CMP system and methods for implementing...

Apparatus and method for qualifying a chemical mechanical planariza...

System and method of defect optimization for chemical mechanical pl...

End-point detection system for chemical mechanical posing applications

Apparatus and method for conditioning a fixed abrasive polishing pa...

Method and system for cleaning a chemical mechanical polishing pad

Apparatus for HF-HF cleaning

Method of HF-HF Cleaning

Patents Applicationslast 30 patents

METHODS FOR CORRELATING GAP VALUE TO MENISCUS STABILITY IN PROCESSI...

METHODS OF AND APPARATUS FOR CORRELATING GAP VALUE TO MENISCUS STAB...

Method and apparatus for drying substrates using a surface tensions...

Method and system for chemical mechanical polishing pad cleaning

Apparatus for controlling galvanic corrosion effects on a single-wa...

Method and system for cleaning a semiconductor wafer

End-point detection apparatus

Drip manifold for uniform chemical delivery

In-situ local heating using megasonic transducer resonator

System and method of defect optimization for chemical mechanical pl...

Apparatus and method for controlling galvanic corrosion effects on...

Apparatus and method for qualifying a chemical mechanical planariza...

SYSTEM FOR CLEANING A SEMICONDUCTOR WAFER

End-point detection system for chemical mechanical polishing applic...

Method and system for cleaning a chemical mechanical polishing pad

POST-PLASMA PROCESSING WAFER CLEANING METHOD AND SYSTEM