Katsumasa YAMAGUCHI

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Deposition method and deposition apparatus
- Patent number 11,885,015
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Katsumasa Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten film-forming method, film-forming system and storage medium
- Patent number 11,802,334
- Issue date Oct 31, 2023
- Tokyo Electron Limited
- Takashi Sameshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming system
- Patent number 11,401,609
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Koji Maekawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate
- Patent number 11,236,425
- Issue date Feb 1, 2022
- Tokyo Electron Limited
- Kennan Mo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method and substrate processing system
- Patent number 11,171,004
- Issue date Nov 9, 2021
- Tokyo Electron Limited
- Takashi Sameshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas supply device, gas supply method and film forming method
- Patent number 11,155,923
- Issue date Oct 26, 2021
- Tokyo Electron Limited
- Katsumasa Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming film
- Patent number 11,028,479
- Issue date Jun 8, 2021
- Tokyo Electron Limited
- Katsumasa Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten film-forming method, film-forming system and storage medium
- Patent number 10,954,593
- Issue date Mar 23, 2021
- Tokyo Electron Limited
- Takashi Sameshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply method and film forming method
- Patent number 10,870,919
- Issue date Dec 22, 2020
- Tokyo Electron Limited
- Katsumasa Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method
- Patent number 10,829,854
- Issue date Nov 10, 2020
- Tokyo Electron Limited
- Kensaku Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten film forming method, film forming system and film forming...
- Patent number 10,784,110
- Issue date Sep 22, 2020
- Tokyo Electron Limited
- Takashi Sameshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of filling recesses in substrate with tungsten
- Patent number 10,316,410
- Issue date Jun 11, 2019
- Tokyo Electron Limited
- Kensaku Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Tungsten Film-Forming Method, Film-Forming System and Storage Medium
- Publication number 20240003002
- Publication date Jan 4, 2024
- TOKYO ELECTRON LIMITED
- Takashi SAMESHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
- Publication number 20220389569
- Publication date Dec 8, 2022
- TOKYO ELECTRON LIMITED
- Katsumasa YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
- Publication number 20220389573
- Publication date Dec 8, 2022
- TOKYO ELECTRON LIMITED
- Katsumasa YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
- Publication number 20220389567
- Publication date Dec 8, 2022
- TOKYO ELECTRON LIMITED
- Katsumasa YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Tungsten Film-Forming Method, Film-Forming System and Storage Medium
- Publication number 20210164095
- Publication date Jun 3, 2021
- TOKYO ELECTRON LIMITED
- Takashi SAMESHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD, FILM FORMING SYSTEM, AND FILM FORMING APPARATUS
- Publication number 20210115560
- Publication date Apr 22, 2021
- TOKYO ELECTRON LIMITED
- Katsumasa YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20200095683
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Takashi SAMESHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Method and Substrate Processing System
- Publication number 20200098573
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Takashi SAMESHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING SYSTEM
- Publication number 20200071829
- Publication date Mar 5, 2020
- TOKYO ELECTRON LIMITED
- Koji MAEKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Tungsten Film-Forming Method, Film-Forming System and Storage Medium
- Publication number 20190256972
- Publication date Aug 22, 2019
- TOKYO ELECTRON LIMITED
- Takashi SAMESHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN FILM FORMING METHOD, FILM FORMING SYSTEM AND FILM FORMING...
- Publication number 20190221434
- Publication date Jul 18, 2019
- TOKYO ELECTRON LIMITED
- Takashi SAMESHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, STORAGE MEDIUM, AND RAW MATERIAL GA...
- Publication number 20190177849
- Publication date Jun 13, 2019
- TOKYO ELECTRON LIMITED
- Kennan MO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING FILM AND METHOD OF CALCULATING FILM FORMATION CON...
- Publication number 20190161862
- Publication date May 30, 2019
- TOKYO ELECTRON LIMITED
- Katsumasa YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY APPARATUS AND FILM FORMING APPARATUS
- Publication number 20190078207
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Hironori Yagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY DEVICE, GAS SUPPLY METHOD AND FILM FORMING METHOD
- Publication number 20180251894
- Publication date Sep 6, 2018
- TOKYO ELECTRON LIMITED
- Katsumasa YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY DEVICE, GAS SUPPLY METHOD AND FILM FORMING METHOD
- Publication number 20180251898
- Publication date Sep 6, 2018
- TOKYO ELECTRON LIMITED
- Katsumasa Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD
- Publication number 20180237911
- Publication date Aug 23, 2018
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Filling Recesses in Substrate with Tungsten
- Publication number 20180073141
- Publication date Mar 15, 2018
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Katsumasa YAMAGUCHI

Person

Patents Grantslast 30 patents

Deposition method and deposition apparatus

Tungsten film-forming method, film-forming system and storage medium

Film forming method and film forming system

Method of processing substrate

Film forming method and substrate processing system

Gas supply device, gas supply method and film forming method

Method of forming film

Tungsten film-forming method, film-forming system and storage medium

Gas supply method and film forming method

Film forming method

Tungsten film forming method, film forming system and film forming...

Method of filling recesses in substrate with tungsten

Patents Applicationslast 30 patents

Tungsten Film-Forming Method, Film-Forming System and Storage Medium

DEPOSITION METHOD AND DEPOSITION APPARATUS

DEPOSITION METHOD AND DEPOSITION APPARATUS

DEPOSITION METHOD AND DEPOSITION APPARATUS

Tungsten Film-Forming Method, Film-Forming System and Storage Medium

FILM FORMING METHOD, FILM FORMING SYSTEM, AND FILM FORMING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

Film Forming Method and Substrate Processing System

FILM FORMING METHOD AND FILM FORMING SYSTEM

Tungsten Film-Forming Method, Film-Forming System and Storage Medium

TUNGSTEN FILM FORMING METHOD, FILM FORMING SYSTEM AND FILM FORMING...

METHOD OF PROCESSING SUBSTRATE, STORAGE MEDIUM, AND RAW MATERIAL GA...

METHOD OF FORMING FILM AND METHOD OF CALCULATING FILM FORMATION CON...

GAS SUPPLY APPARATUS AND FILM FORMING APPARATUS

GAS SUPPLY DEVICE, GAS SUPPLY METHOD AND FILM FORMING METHOD

GAS SUPPLY DEVICE, GAS SUPPLY METHOD AND FILM FORMING METHOD

FILM FORMING METHOD

Method of Filling Recesses in Substrate with Tungsten