Katsuya Sugiyama

Person

Kashiwa-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 8,604,430
- Issue date Dec 10, 2013
- Hitachi, Ltd.
- Yuko Iwabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of an inspection system using an electron beam
- Patent number 8,134,125
- Issue date Mar 13, 2012
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 7,952,074
- Issue date May 31, 2011
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,439,506
- Issue date Oct 21, 2008
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 7,417,444
- Issue date Aug 26, 2008
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Patterned wafer inspection method and apparatus therefor
- Patent number 7,242,015
- Issue date Jul 10, 2007
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,232,996
- Issue date Jun 19, 2007
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 7,026,830
- Issue date Apr 11, 2006
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,012,252
- Issue date Mar 14, 2006
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,987,265
- Issue date Jan 17, 2006
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Patterned wafer inspection method and apparatus therefor
- Patent number 6,979,823
- Issue date Dec 27, 2005
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Patterned wafer inspection method and apparatus therefor
- Patent number 6,797,954
- Issue date Sep 28, 2004
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 6,559,663
- Issue date May 6, 2003
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting patterns of a semiconductor dev...
- Patent number 6,512,227
- Issue date Jan 28, 2003
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,452,178
- Issue date Sep 17, 2002
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,348,690
- Issue date Feb 19, 2002
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 6,329,826
- Issue date Dec 11, 2001
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 6,172,363
- Issue date Jan 9, 2001
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Microtron electron accelerator
- Patent number 5,561,697
- Issue date Oct 1, 1996
- Hitachi Medical
- Atsuko Takafuji
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Microtron electron accelerator
- Patent number 5,399,873
- Issue date Mar 21, 1995
- Hitachi Medical
- Atsuko Takafuji
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND AN APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON...
- Publication number 20120132801
- Publication date May 31, 2012
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON BEAM
- Publication number 20090057556
- Publication date Mar 5, 2009
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING INTEGRATED CIRCUIT PATTERN
- Publication number 20080302964
- Publication date Dec 11, 2008
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20070215803
- Publication date Sep 20, 2007
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20060151699
- Publication date Jul 13, 2006
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for inspecting integrated circuit pattern
- Publication number 20060043982
- Publication date Mar 2, 2006
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Patterned wafer inspection method and apparatus therefor
- Publication number 20060017014
- Publication date Jan 26, 2006
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20050205782
- Publication date Sep 22, 2005
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Patterned wafer inspection method and apparatus therefor
- Publication number 20040222377
- Publication date Nov 11, 2004
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting integrated circuit pattern
- Publication number 20030169060
- Publication date Sep 11, 2003
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Patterned wafer inspection method and apparatus therefor
- Publication number 20030164460
- Publication date Sep 4, 2003
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
PATTERNED WAFER INSPECTION METHOD AND APPARATUS THEREFOR
- Publication number 20020117635
- Publication date Aug 29, 2002
- HIROYUKI SHINADA
- G01 - MEASURING TESTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20020092986
- Publication date Jul 18, 2002
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting integrated circuit pattern
- Publication number 20020027440
- Publication date Mar 7, 2002
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting patterns of a semiconductor dev...
- Publication number 20020024021
- Publication date Feb 28, 2002
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20010030294
- Publication date Oct 18, 2001
- Hitachi, Ltd
- Yuko Iwabuchi
- G01 - MEASURING TESTING

Katsuya Sugiyama

Person

Patents Grantslast 30 patents

Method and an apparatus of an inspection system using an electron beam

Method and apparatus of an inspection system using an electron beam

Method and apparatus for inspecting integrated circuit pattern

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for inspecting integrated circuit pattern

Patterned wafer inspection method and apparatus therefor

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for inspecting integrated circuit pattern

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Patterned wafer inspection method and apparatus therefor

Patterned wafer inspection method and apparatus therefor

Method and apparatus for inspecting integrated circuit pattern

Method and apparatus for inspecting patterns of a semiconductor dev...

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for inspecting integrated circuit pattern

Method and apparatus for inspecting integrated circuit pattern

Microtron electron accelerator

Microtron electron accelerator

Patents Applicationslast 30 patents

METHOD AND AN APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON...

METHOD AND APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON BEAM

METHOD AND APPARATUS FOR INSPECTING INTEGRATED CIRCUIT PATTERN

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for inspecting integrated circuit pattern

Patterned wafer inspection method and apparatus therefor

Method and an apparatus of an inspection system using an electron beam

Patterned wafer inspection method and apparatus therefor

Method and apparatus for inspecting integrated circuit pattern

Patterned wafer inspection method and apparatus therefor

PATTERNED WAFER INSPECTION METHOD AND APPARATUS THEREFOR

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for inspecting integrated circuit pattern

Method and apparatus for inspecting patterns of a semiconductor dev...

Method and an apparatus of an inspection system using an electron beam