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Kazuaki Matsuo

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  • Inagi-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Reactive sputtering apparatus
    • Patent number 9,905,401
    • Issue date Feb 27, 2018
    • Canon Anelva Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 9,779,921
    • Issue date Oct 3, 2017
    • Canon Anelva Corporation
    • Yoshimitsu Shimane
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Electronic device manufacturing method and sputtering method
    • Patent number 9,472,384
    • Issue date Oct 18, 2016
    • Canon Anelva Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Electronic device manufacturing method and sputtering method
    • Patent number 9,090,974
    • Issue date Jul 28, 2015
    • Canon Anelva Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reactive sputtering apparatus
    • Patent number 9,034,152
    • Issue date May 19, 2015
    • Canon Anelva Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering method and sputtering apparatus
    • Patent number 8,992,743
    • Issue date Mar 31, 2015
    • Canon Anelva Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Semiconductor device and method of manufacturing the same
    • Patent number 8,415,753
    • Issue date Apr 9, 2013
    • Canon Anelva Corporation
    • Takashi Nakagawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Sputtering apparatus
    • Patent number 8,147,664
    • Issue date Apr 3, 2012
    • Canon Anelva Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    ELECTRONIC DEVICE MANUFACTURING METHOD AND SPUTTERING METHOD
    • Publication number 20150364301
    • Publication date Dec 17, 2015
    • Canon ANELVA Corporation
    • Nobuo Yamaguchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20150294845
    • Publication date Oct 15, 2015
    • Canon ANELVA Corporation
    • Yoshimitsu SHIMANE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    REACTIVE SPUTTERING APPARATUS
    • Publication number 20150206714
    • Publication date Jul 23, 2015
    • Canon ANELVA Corporation
    • NOBUO YAMAGUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTRONIC DEVICE MANUFACTURING METHOD AND SPUTTERING METHOD
    • Publication number 20130048489
    • Publication date Feb 28, 2013
    • Canon ANELVA Corporation
    • Nobuo YAMAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING METHOD AND SPUTTERING APPARATUS
    • Publication number 20120234672
    • Publication date Sep 20, 2012
    • Canon ANELVA Corporation
    • Nobuo YAMAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
    • Publication number 20120199919
    • Publication date Aug 9, 2012
    • Canon ANELVA Corporation
    • Takashi Nakagawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REACTIVE SPUTTERING APPARATUS
    • Publication number 20120152736
    • Publication date Jun 21, 2012
    • Canon ANELVA Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
    • Publication number 20120043617
    • Publication date Feb 23, 2012
    • Canon ANELVA Corporation
    • Takashi Nakagawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SPUTTERING APPARATUS
    • Publication number 20100326818
    • Publication date Dec 30, 2010
    • Canon ANELVA Corporation
    • Manabu Ikemoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20100243438
    • Publication date Sep 30, 2010
    • Canon ANELVA Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...