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Advanced LCD Technologies Development Center Co., Ltd.
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Plasma processing apparatus
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Kabushiki Kaisha Ekisho Sentan Gijutsu Kaihatsu Center
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Masashi Goto
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Hitachi, Ltd.
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Toshiaki Ohtani
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G11 - INFORMATION STORAGE
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Photosensitive resin composition
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Hitachi, Ltd.
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Kazufumi Azuma
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Process for forming thin film
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Patent number 4,495,218
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Hitachi, Ltd.
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Kazufumi Azuma
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