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Kazufumi Nomura
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Electrolytic processing apparatus and substrate processing method
Patent number
7,374,646
Issue date
May 20, 2008
Ebara Corporation
Hidenao Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plating method and plating apparatus
Patent number
7,169,705
Issue date
Jan 30, 2007
Ebara Corporation
Kunihito Ide
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Apparatus and method for processing a substrate
Publication number
20090045067
Publication date
Feb 19, 2009
Koji Mishima
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Cleaning method and cleaning apparatus for porous member
Publication number
20080035171
Publication date
Feb 14, 2008
Hiroyuki Kanda
B08 - CLEANING
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20050241955
Publication date
Nov 3, 2005
Koji Mishima
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Substrate processing apparatus
Publication number
20050236268
Publication date
Oct 27, 2005
Koji Mishima
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Plating method and plating apparatus
Publication number
20050164498
Publication date
Jul 28, 2005
Kunihito Ide
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Apparatus and method for processing substrate
Publication number
20050145482
Publication date
Jul 7, 2005
Hidenao Suzuki
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Apparatus and method for processing a substrate
Publication number
20050000820
Publication date
Jan 6, 2005
Koji Mishima
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electrolytic solution supply and recovery facility and liquid compo...
Publication number
20040256221
Publication date
Dec 23, 2004
Koji Mishima
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electrolytic processing apparatus and substrate processing method
Publication number
20040256238
Publication date
Dec 23, 2004
Hidenao Suzuki
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR