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Kazuhiko Mitsuhashi
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Chigasaki, JP
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last 30 patents
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Patent Grant
Sputtering target and method of manufacturing the same
Patent number
5,733,427
Issue date
Mar 31, 1998
Kabushiki Kaisha Toshiba
Michio Satou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering target
Patent number
5,447,616
Issue date
Sep 5, 1995
Kabushiki Kaisha Toshiba
Michio Satou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering target
Patent number
5,294,321
Issue date
Mar 15, 1994
Kabushiki Kaisha Toshiba
Michio Satou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...