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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus
Patent number
11,791,171
Issue date
Oct 17, 2023
Tokyo Electron Limited
Yoshifumi Amano
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Processing liquid ejection nozzle, nozzle arm, substrate processing...
Patent number
11,776,824
Issue date
Oct 3, 2023
Tokyo Electron Limited
Yoshifumi Amano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Component of a liquid discharge nozzle for semiconductor substrate...
Patent number
D934991
Issue date
Nov 2, 2021
Tokyo Electron Limited
Yoshifumi Amano
D23 - Environmental heating and cooling
Information
Patent Grant
Liquid discharge nozzle for semiconductor substrate processing appa...
Patent number
D930796
Issue date
Sep 14, 2021
Tokyo Electron Limited
Yoshifumi Amano
D23 - Environmental heating and cooling
Information
Patent Grant
Liquid discharge nozzle for semiconductor substrate processing appa...
Patent number
D929534
Issue date
Aug 31, 2021
Tokyo Electron Limited
Yoshifumi Amano
D23 - Environmental heating and cooling
Information
Patent Grant
Substrate processing apparatus, substrate processing method and rec...
Patent number
11,024,518
Issue date
Jun 1, 2021
Tokyo Electron Limited
Norihiro Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and nozzle
Patent number
10,580,669
Issue date
Mar 3, 2020
Tokyo Electron Limited
Tsuyoshi Fukushima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method of cleaning substrate proces...
Patent number
10,486,208
Issue date
Nov 26, 2019
Tokyo Electron Limited
Nobuhiro Ogata
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus
Patent number
9,768,039
Issue date
Sep 19, 2017
Tokyo Electron Limited
Kazuhiro Aiura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid treatment apparatus
Patent number
9,768,010
Issue date
Sep 19, 2017
Tokyo Electron Limited
Norihiro Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid process apparatus and liquid process method
Patent number
9,691,602
Issue date
Jun 27, 2017
Tokyo Electron Limited
Norihiro Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid treatment apparatus and liquid treatment method
Patent number
9,640,383
Issue date
May 2, 2017
Tokyo Electron Limited
Kazuhiro Aiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Liquid treatment apparatus and liquid treatment method
Patent number
9,245,737
Issue date
Jan 26, 2016
Tokyo Electron Limited
Kazuhiro Aiura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid arm cleaning unit for substrate processing apparatus
Patent number
9,190,311
Issue date
Nov 17, 2015
Tokyo Electron Limited
Jiro Higashijima
B08 - CLEANING
Information
Patent Grant
Liquid process apparatus and liquid process method
Patent number
9,177,838
Issue date
Nov 3, 2015
Tokyo Electron Limited
Norihiro Ito
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Liquid processing apparatus and liquid processing method
Patent number
9,105,671
Issue date
Aug 11, 2015
Tokyo Electron Limited
Norihiro Itoh
B60 - VEHICLES IN GENERAL
Information
Patent Grant
Substrate liquid processing apparatus, liquid processing method, an...
Patent number
9,064,908
Issue date
Jun 23, 2015
Tokyo Electron Limited
Norihiro Itoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
8,865,483
Issue date
Oct 21, 2014
Tokyo Electron Limited
Kazuhiro Aiura
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Patents Applications
last 30 patents
Information
Patent Application
PROCESSING LIQUID EJECTION NOZZLE, NOZZLE ARM, SUBSTRATE PROCESSING...
Publication number
20210020463
Publication date
Jan 21, 2021
TOKYO ELECTRON LIMITED
Yoshifumi AMANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20200388511
Publication date
Dec 10, 2020
TOKYO ELECTRON LIMITED
Yoshifumi AMANO
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20200365422
Publication date
Nov 19, 2020
TOKYO ELECTRON LIMITED
Yoshifumi Amano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20180221925
Publication date
Aug 9, 2018
TOKYO ELECTRON LIMITED
Norihiro Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND NOZZLE
Publication number
20180033656
Publication date
Feb 1, 2018
TOKYO ELECTRON LIMITED
Tsuyoshi Fukushima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF CLEANING SUBSTRATE PROCES...
Publication number
20170361364
Publication date
Dec 21, 2017
TOKYO ELECTRON LIMITED
Nobuhiro Ogata
B08 - CLEANING
Information
Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
Publication number
20140352726
Publication date
Dec 4, 2014
Norihiro Itoh
B60 - VEHICLES IN GENERAL
Information
Patent Application
LIQUID TREATMENT APPARATUS AND LIQUID TREATMENT METHOD
Publication number
20140248774
Publication date
Sep 4, 2014
TOKYO ELECTRON LIMITED
Kazuhiro Aiura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20140137902
Publication date
May 22, 2014
TOKYO ELECTRON LIMITED
Kazuhiro Aiura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20140045281
Publication date
Feb 13, 2014
TOKYO ELECTRON LIMITED
Kazuhiro AIURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID TREATMENT APPARATUS AND LIQUID TREATMENT METHOD
Publication number
20130319476
Publication date
Dec 5, 2013
Kazuhiro Aiura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID TREATMENT APPARATUS
Publication number
20130180659
Publication date
Jul 18, 2013
TOKYO ELECTRON LIMITED
Norihiro Itoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID PROCESS APPARATUS AND LIQUID PROCESS METHOD
Publication number
20130014786
Publication date
Jan 17, 2013
TOKYO ELECTRON LIMITED
Norihiro Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
Publication number
20120312336
Publication date
Dec 13, 2012
TOKYO ELECTRON LIMITED
Norihiro ITOH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Liquid Processing Apparatus and Liquid Processing Method
Publication number
20120180828
Publication date
Jul 19, 2012
Jiro HIGASHIJIMA
B08 - CLEANING