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Kazuhiro Joo
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Kudamatsu-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus
Patent number
8,747,608
Issue date
Jun 10, 2014
Hitachi High-Technologies Corporation
Tatehito Usui
G01 - MEASURING TESTING
Information
Patent Grant
Plasma processing apparatus
Patent number
8,088,247
Issue date
Jan 3, 2012
Hitachi High-Technologies Corporation
Tatehito Usui
G01 - MEASURING TESTING
Information
Patent Grant
Operating method of vacuum processing system and vacuum processing...
Patent number
6,941,185
Issue date
Sep 6, 2005
Hitachi, Ltd.
Kouji Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Operating method of vacuum processing system and vacuum processing...
Patent number
6,885,906
Issue date
Apr 26, 2005
Hitachi, Ltd.
Kouji Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Operating method of vacuum processing system and vacuum processing...
Patent number
6,853,872
Issue date
Feb 8, 2005
Hitachi, Ltd.
Kouji Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Operating method of vacuum processing system and vacuum processing...
Patent number
6,714,832
Issue date
Mar 30, 2004
Hitachi, Ltd.
Kouji Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Operating method of vacuum processing system and vacuum processing...
Patent number
6,069,096
Issue date
May 30, 2000
Hitachi, Ltd.
Kouji Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Plasma Processing Apparatus
Publication number
20120101621
Publication date
Apr 26, 2012
Tatehito Usui
G01 - MEASURING TESTING
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20080216956
Publication date
Sep 11, 2008
SHIGERU NAKAMOTO
G01 - MEASURING TESTING
Information
Patent Application
Plasma processing apparatus
Publication number
20070202613
Publication date
Aug 30, 2007
Tatehito Usui
G01 - MEASURING TESTING
Information
Patent Application
Semiconductor Production Apparatus
Publication number
20070178610
Publication date
Aug 2, 2007
Tatehito Usui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor production apparatus
Publication number
20050194095
Publication date
Sep 8, 2005
Tatehito Usui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Operating method of vacuum processing system and vacuum processing...
Publication number
20020133257
Publication date
Sep 19, 2002
Kouji Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Operating method of vacuum processing system and vacuum processing...
Publication number
20020133260
Publication date
Sep 19, 2002
Kouji Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Operating method of vacuum processing system and vacuum processing...
Publication number
20020133256
Publication date
Sep 19, 2002
Kouji Nishihata
H01 - BASIC ELECTRIC ELEMENTS