Kazuhiro TAKESHITA

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method of adjusting substrate pr...
- Patent number 11,476,136
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Kenichi Shigetomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light irradiating device
- Patent number 10,877,376
- Issue date Dec 29, 2020
- Tokyo Electron Limited
- Ryo Shimada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 10,795,265
- Issue date Oct 6, 2020
- Tokyo Electron Limited
- Norihisa Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and method of adjusting substrate pr...
- Patent number 10,504,757
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Kenichi Shigetomi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Liquid processing apparatus, liquid processing method and storage m...
- Patent number 9,305,767
- Issue date Apr 5, 2016
- Tokyo Electron Limited
- Kenji Nishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 7,998,306
- Issue date Aug 16, 2011
- Tokyo Electron Limited
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of coating film, coating unit, aging unit, solvent replaceme...
- Patent number 7,205,024
- Issue date Apr 17, 2007
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating film forming apparatus and coating unit
- Patent number 7,087,118
- Issue date Aug 8, 2006
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming apparatus and coating unit
- Patent number 6,936,107
- Issue date Aug 30, 2005
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming unit
- Patent number 6,872,256
- Issue date Mar 29, 2005
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate coating unit and substrate coating method
- Patent number 6,860,945
- Issue date Mar 1, 2005
- Tokyo Electron Limited
- Shinji Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas treatment apparatus
- Patent number 6,808,567
- Issue date Oct 26, 2004
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of coating film, coating unit, aging unit, solvent replaceme...
- Patent number 6,726,775
- Issue date Apr 27, 2004
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating film forming apparatus and coating film forming method
- Patent number 6,716,478
- Issue date Apr 6, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating film forming apparatus and coating unit
- Patent number 6,676,757
- Issue date Jan 13, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas treatment apparatus
- Patent number 6,660,096
- Issue date Dec 9, 2003
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 6,627,263
- Issue date Sep 30, 2003
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming unit
- Patent number 6,616,760
- Issue date Sep 9, 2003
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating film forming apparatus
- Patent number 6,605,153
- Issue date Aug 12, 2003
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of coating film, coating unit, aging unit, solvent replaceme...
- Patent number 6,589,339
- Issue date Jul 8, 2003
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming unit
- Patent number 6,514,344
- Issue date Feb 4, 2003
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 6,416,583
- Issue date Jul 9, 2002
- Tokyo Electron Limited
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating film forming apparatus and coating film forming method
- Patent number 6,383,948
- Issue date May 7, 2002
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin coating apparatus including aging unit and solvent replacement...
- Patent number 6,248,168
- Issue date Jun 19, 2001
- Tokyo Electron Limited
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus, substrate conveying apparatus, film forming...
- Patent number 6,197,385
- Issue date Mar 6, 2001
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Gas treatment apparatus
- Patent number 6,190,459
- Issue date Feb 20, 2001
- Tokyo Electron Limited
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LIGHT IRRADIATING DEVICE
- Publication number 20200150537
- Publication date May 14, 2020
- TOKYO ELECTRON LIMITED
- Ryo Shimada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...
- Publication number 20200066559
- Publication date Feb 27, 2020
- TOKYO ELECTRON LIMITED
- Kenichi SHIGETOMI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20200041913
- Publication date Feb 6, 2020
- TOKYO ELECTRON LIMITED
- Norihisa KOGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...
- Publication number 20170170040
- Publication date Jun 15, 2017
- TOKYO ELECTRON LIMITED
- Kenichi SHIGETOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, MAINTE...
- Publication number 20170032983
- Publication date Feb 2, 2017
- TOKYO ELECTRON LIMITED
- Koshi MUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
- Publication number 20120234356
- Publication date Sep 20, 2012
- TOKYO ELECTRON LIMITED
- Kenji Nishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20090139656
- Publication date Jun 4, 2009
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
- Publication number 20060292298
- Publication date Dec 28, 2006
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating film forming apparatus and coating unit
- Publication number 20050155550
- Publication date Jul 21, 2005
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate coating unit and substrate coating method
- Publication number 20050100681
- Publication date May 12, 2005
- TOKYO ELECTRON LIMITED
- Shinji Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
- Publication number 20040156996
- Publication date Aug 12, 2004
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating film forming apparatus and coating unit
- Publication number 20040134425
- Publication date Jul 15, 2004
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Film forming unit
- Publication number 20040094089
- Publication date May 20, 2004
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Gas treatment apparatus
- Publication number 20040045184
- Publication date Mar 11, 2004
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
- Publication number 20030196595
- Publication date Oct 23, 2003
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming apparatus and film forming method
- Publication number 20020136829
- Publication date Sep 26, 2002
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate coating unit and substrate coating method
- Publication number 20020134304
- Publication date Sep 26, 2002
- TOKYO ELECTRON LIMITED
- Shinji Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming unit
- Publication number 20020124798
- Publication date Sep 12, 2002
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating film forming apparatus and coating film forming method
- Publication number 20020088393
- Publication date Jul 11, 2002
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
- Publication number 20010017103
- Publication date Aug 30, 2001
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating film forming apparatus
- Publication number 20010003967
- Publication date Jun 21, 2001
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming apparatus
- Publication number 20010003966
- Publication date Jun 21, 2001
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming unit
- Publication number 20010003968
- Publication date Jun 21, 2001
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating film forming apparatus and coating unit
- Publication number 20010003964
- Publication date Jun 21, 2001
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas treatment apparatus
- Publication number 20010000198
- Publication date Apr 12, 2001
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS

Kazuhiro TAKESHITA

Person

Patents Grantslast 30 patents

Substrate processing apparatus and method of adjusting substrate pr...

Light irradiating device

Substrate processing apparatus, substrate processing method, and st...

Substrate processing apparatus and method of adjusting substrate pr...

Liquid processing apparatus, liquid processing method and storage m...

Substrate processing apparatus

Method of coating film, coating unit, aging unit, solvent replaceme...

Coating film forming apparatus and coating unit

Coating film forming apparatus and coating unit

Film forming unit

Substrate coating unit and substrate coating method

Gas treatment apparatus

Method of coating film, coating unit, aging unit, solvent replaceme...

Coating film forming apparatus and coating film forming method

Coating film forming apparatus and coating unit

Gas treatment apparatus

Film forming apparatus and film forming method

Film forming unit

Coating film forming apparatus

Method of coating film, coating unit, aging unit, solvent replaceme...

Film forming unit

Film forming apparatus and film forming method

Coating film forming apparatus and coating film forming method

Spin coating apparatus including aging unit and solvent replacement...

Film forming apparatus, substrate conveying apparatus, film forming...

Gas treatment apparatus

Patents Applicationslast 30 patents

LIGHT IRRADIATING DEVICE

SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, MAINTE...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...

Substrate processing apparatus

Method of coating film, coating unit, aging unit, solvent replaceme...

Coating film forming apparatus and coating unit

Substrate coating unit and substrate coating method

Method of coating film, coating unit, aging unit, solvent replaceme...

Coating film forming apparatus and coating unit

Film forming unit

Gas treatment apparatus

Method of coating film, coating unit, aging unit, solvent replaceme...

Film forming apparatus and film forming method

Substrate coating unit and substrate coating method

Film forming unit

Coating film forming apparatus and coating film forming method

Method of coating film, coating unit, aging unit, solvent replaceme...

Coating film forming apparatus

Film forming apparatus

Film forming unit

Coating film forming apparatus and coating unit

Gas treatment apparatus