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Kanagawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Laser processing apparatus and laser processing process
Patent number
6,638,800
Issue date
Oct 28, 2003
Semiconductor Energy Laboratory Co., Ltd.
Hiroaki Ishihara
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser processing apparatus and laser processing process
Patent number
5,891,764
Issue date
Apr 6, 1999
Semiconductor Energy Laboratory Co., Ltd.
Hiroaki Ishihara
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser processing method and alignment
Patent number
5,643,801
Issue date
Jul 1, 1997
Semiconductor Energy Laboratory Co., Ltd.
Hiroaki Ishihara
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Plasma processing method and apparatus
Patent number
5,283,087
Issue date
Feb 1, 1994
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing method and apparatus
Patent number
5,256,483
Issue date
Oct 26, 1993
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for forming thin films
Patent number
5,079,031
Issue date
Jan 7, 1992
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing a semiconductor using plasma processing
Patent number
5,013,688
Issue date
May 7, 1991
Semiconductor Energy Laboratory Co., Ltd.
Shunepi Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and apparatus
Patent number
4,987,004
Issue date
Jan 22, 1991
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing method and apparatus
Patent number
4,971,667
Issue date
Nov 20, 1990
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Laser processing apparatus and laser processing process
Publication number
20070141859
Publication date
Jun 21, 2007
Semiconductor Energy Laboratory Co., Ltd.
Hiroaki Ishihara
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR