Kazuhisa Nakashita

Person

  • Kanagawa, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Laser processing apparatus and laser processing process

    • Patent number 6,638,800
    • Issue date Oct 28, 2003
    • Semiconductor Energy Laboratory Co., Ltd.
    • Hiroaki Ishihara
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Laser processing apparatus and laser processing process

    • Patent number 5,891,764
    • Issue date Apr 6, 1999
    • Semiconductor Energy Laboratory Co., Ltd.
    • Hiroaki Ishihara
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Laser processing method and alignment

    • Patent number 5,643,801
    • Issue date Jul 1, 1997
    • Semiconductor Energy Laboratory Co., Ltd.
    • Hiroaki Ishihara
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Plasma processing method and apparatus

    • Patent number 5,283,087
    • Issue date Feb 1, 1994
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing method and apparatus

    • Patent number 5,256,483
    • Issue date Oct 26, 1993
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus and method for forming thin films

    • Patent number 5,079,031
    • Issue date Jan 7, 1992
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of manufacturing a semiconductor using plasma processing

    • Patent number 5,013,688
    • Issue date May 7, 1991
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunepi Yamazaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing method and apparatus

    • Patent number 4,987,004
    • Issue date Jan 22, 1991
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing method and apparatus

    • Patent number 4,971,667
    • Issue date Nov 20, 1990
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents