Kazuki Fujimoto

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,697,112
- Issue date Apr 13, 2010
- Canon Kabushiki Kaisha
- Kazuki Fujimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light source
- Patent number 7,619,233
- Issue date Nov 17, 2009
- Canon Kabushiki Kaisha
- Kazuki Fujimoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light source apparatus, exposure apparatus and device fabrication m...
- Patent number 7,518,132
- Issue date Apr 14, 2009
- Canon Kabushiki Kaisha
- Hajime Kanazawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light source unit, exposure apparatus, and device manufacturing method
- Patent number 7,170,579
- Issue date Jan 30, 2007
- Canon Kabushiki Kaisha
- Takeshi Miyachi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Gas flow measurement apparatus and method for EVU light source
- Patent number 7,080,563
- Issue date Jul 25, 2006
- Canon Kabushiki Kaisha
- Kazuki Fujimoto
- G01 - MEASURING TESTING
Information Patent Grant
Vibration actuator
- Patent number 6,198,202
- Issue date Mar 6, 2001
- Canon Kabushiki Kaisha
- Jun Tamai
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Vibration wave driving device and apparatus having the same
- Patent number 6,107,724
- Issue date Aug 22, 2000
- Canon Kabushiki Kaisha
- Jun Tamai
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Vibration wave driving apparatus and a vibration member, and manufa...
- Patent number 5,949,178
- Issue date Sep 7, 1999
- Canon Kabushiki Kaisha
- Jun Tamai
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Vibration wave actuator and system using the same
- Patent number 5,760,529
- Issue date Jun 2, 1998
- Canon Kabushiki Kaisha
- Jun Tamai
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Vibration wave driven motor
- Patent number 5,739,623
- Issue date Apr 14, 1998
- Canon Kabushiki Kaisha
- Hajime Kanazawa
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Vibration driven motor
- Patent number 5,684,353
- Issue date Nov 4, 1997
- Canon Kabushiki Kaisha
- Kazuki Fujimoto
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
LIGHT SOURCE
- Publication number 20070228303
- Publication date Oct 4, 2007
- Canon Kabushiki Kaisha
- Kazuki Fujimoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS AND DEVICE FABRICATION M...
- Publication number 20070023709
- Publication date Feb 1, 2007
- Hajime KANAZAWA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20060215136
- Publication date Sep 28, 2006
- Kazuki Fujimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Light source unit, exposure apparatus, and device manufacturing method
- Publication number 20050157279
- Publication date Jul 21, 2005
- Canon Kabushiki Kaisha
- Takeshi Miyachi
- B82 - NANO-TECHNOLOGY
Information Patent Application
Gas flow measurement apparatus and method for EVU light source
- Publication number 20050115333
- Publication date Jun 2, 2005
- Kazuki Fujimoto
- G01 - MEASURING TESTING

Kazuki Fujimoto

Person

Patents Grantslast 30 patents

Exposure apparatus and device manufacturing method

Light source

Light source apparatus, exposure apparatus and device fabrication m...

Light source unit, exposure apparatus, and device manufacturing method

Gas flow measurement apparatus and method for EVU light source

Vibration actuator

Vibration wave driving device and apparatus having the same

Vibration wave driving apparatus and a vibration member, and manufa...

Vibration wave actuator and system using the same

Vibration wave driven motor

Vibration driven motor

Patents Applicationslast 30 patents

LIGHT SOURCE

LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS AND DEVICE FABRICATION M...

Exposure apparatus and device manufacturing method

Light source unit, exposure apparatus, and device manufacturing method

Gas flow measurement apparatus and method for EVU light source