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Kazumi Ikeda
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Mitaka, JP
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last 30 patents
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Patent Grant
Apparatus and method for chamfering wafer
Patent number
6,431,961
Issue date
Aug 13, 2002
Tokyo Seimitsu Co., Ltd.
Ichiro Katayama
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for chamfering wafer
Patent number
6,267,648
Issue date
Jul 31, 2001
Tokyo Seimitsu Co. Ltd.
Ichiro Katayama
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer chamfering method and apparatus
Patent number
6,066,031
Issue date
May 23, 2000
Tokyo Seimitsu Co., Ltd.
Etsuo Noguchi
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer positioning method and apparatus
Patent number
6,062,953
Issue date
May 16, 2000
Tokyo Seimitsu Co., Ltd.
Jun Takaya
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR