Kazumitsu Nakamura

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Katsuta, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam projection aligner having position detector u...
- Patent number 5,168,166
- Issue date Dec 1, 1992
- Hitachi, Ltd.
- Hajime Hayakawa
- G02 - OPTICS
Information Patent Grant
Electron beam lithography apparatus having device for correcting be...
- Patent number 5,130,550
- Issue date Jul 14, 1992
- Hitachi, Ltd.
- Kazumitsu Nakamura
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam measuring apparatus
- Patent number 5,117,111
- Issue date May 26, 1992
- Hitachi, Ltd.
- Kazumitsu Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam lithography apparatus having external magnetic field...
- Patent number 4,973,849
- Issue date Nov 27, 1990
- Hitachi, Ltd.
- Kazumitsu Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam drawing method
- Patent number 4,853,549
- Issue date Aug 1, 1989
- Hitachi, Ltd.
- Akira Yanagisawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam lithographic method
- Patent number 4,777,369
- Issue date Oct 11, 1988
- Hitachi, Ltd.
- Kazumitsu Nakamura
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam exposure apparatus
- Patent number 4,433,243
- Issue date Feb 21, 1984
- Hitachi, Ltd.
- Kazumitsu Nakamura
- H01 - BASIC ELECTRIC ELEMENTS