Number | Date | Country | Kind |
---|---|---|---|
60-191630 | Aug 1985 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3949228 | Ryan | Apr 1976 | |
4112305 | Goto et al. | Sep 1978 | |
4423305 | Pfeiffer | Dec 1983 | |
4445041 | Kelly et al. | Apr 1984 | |
4550258 | Omata et al. | Oct 1985 |
Entry |
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"Variable Spot Shaping for Electron-Beam Lithography", Pfeiffer, J. Vac. Sci. Tech., vol. 15, No. 3, May 1978, pp. 887-890, 250-492.23. |