TREA

Kazunori Tsujimoto

Follow

Person

  • Higashiyamato-shi, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Method and apparatus for dry etching
    • Patent number 7,071,114
    • Issue date Jul 4, 2006
    • Hitachi, Ltd.
    • Takao Kumihashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method for manufacturing semiconductor device
    • Patent number 6,713,401
    • Issue date Mar 30, 2004
    • Hitachi, Ltd.
    • Kenetsu Yokogawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and apparatus for dry etching
    • Patent number 6,562,722
    • Issue date May 13, 2003
    • Hitachi, Ltd.
    • Takao Kumihashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Surface treatment method and system
    • Patent number 6,332,425
    • Issue date Dec 25, 2001
    • Naoyuki Kofuji
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and apparatus for dry etching
    • Patent number 6,333,273
    • Issue date Dec 25, 2001
    • Hitachi, Ltd.
    • Takao Kumihashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Surface treatment method and system
    • Patent number 6,231,777
    • Issue date May 15, 2001
    • Hitachi, Ltd.
    • Naoyuki Kofuji
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and apparatus for dry etching
    • Patent number 6,136,721
    • Issue date Oct 24, 2000
    • Hitachi, Ltd.
    • Takao Kumihashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 6,033,481
    • Issue date Mar 7, 2000
    • Hitachi, Ltd.
    • Ken'etsu Yokogawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and apparatus for dry etching
    • Patent number 6,008,133
    • Issue date Dec 28, 1999
    • Hitachi, Ltd.
    • Takao Kumihashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 5,891,252
    • Issue date Apr 6, 1999
    • Hitachi, Ltd.
    • Ken'etsu Yokogawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and apparatus for dry etching
    • Patent number 5,795,832
    • Issue date Aug 18, 1998
    • Hitachi, Ltd.
    • Takao Kumihashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry etching method
    • Patent number 5,705,029
    • Issue date Jan 6, 1998
    • Hitachi, Ltd.
    • Sadayuki Okudaira
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method for dry etching
    • Patent number 5,650,038
    • Issue date Jul 22, 1997
    • Hitachi, Ltd.
    • Takao Kumihashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry etching method
    • Patent number 5,643,473
    • Issue date Jul 1, 1997
    • Hitachi, Ltd.
    • Shinichi Tachi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and apparatus for dry etching
    • Patent number 5,474,650
    • Issue date Dec 12, 1995
    • Hitachi, Ltd.
    • Takao Kumihashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry-etching method and apparatus
    • Patent number 5,409,562
    • Issue date Apr 25, 1995
    • Hitachi, Ltd.
    • Takao Kumihashi
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Dry etching apparatus and method
    • Patent number 5,368,685
    • Issue date Nov 29, 1994
    • Hitachi, Ltd.
    • Takao Kumihashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry etching method
    • Patent number 5,354,416
    • Issue date Oct 11, 1994
    • Sadayuki Okudaira
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method for dry etching
    • Patent number 5,354,418
    • Issue date Oct 11, 1994
    • Hitachi, Ltd.
    • Takao Kumihashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and apparatus for dry etching
    • Patent number 5,318,667
    • Issue date Jun 7, 1994
    • Hitachi, Ltd.
    • Takao Kumihashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Process for fabricating field effect transistor
    • Patent number 5,270,232
    • Issue date Dec 14, 1993
    • Hitachi, Ltd.
    • Shinichiro Kimura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma treatment method and apparatus
    • Patent number 5,242,539
    • Issue date Sep 7, 1993
    • Hitachi, Ltd.
    • Takao Kumihashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry etching method
    • Patent number 5,147,500
    • Issue date Sep 15, 1992
    • Hitachi, Ltd.
    • Shinichi Tachi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Dry etching method
    • Patent number 4,992,136
    • Issue date Feb 12, 1991
    • Hitachi, Ltd.
    • Shinichi Tachi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of dry etching
    • Patent number 4,986,877
    • Issue date Jan 22, 1991
    • Hitachi, Ltd.
    • Shinichi Tachi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry etching by alternately etching and depositing
    • Patent number 4,985,114
    • Issue date Jan 15, 1991
    • Hitachi, Ltd.
    • Sadayuki Okudaira
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry etching apparatus
    • Patent number 4,956,043
    • Issue date Sep 11, 1990
    • Hitachi, Ltd.
    • Masafumi Kanetomo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 4,943,344
    • Issue date Jul 24, 1990
    • Hitachi, Ltd.
    • Shinichi Tachi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma treating method and apparatus therefor
    • Patent number 4,911,812
    • Issue date Mar 27, 1990
    • Hitachi, Ltd.
    • Katsuyoshi Kudo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Process for surface treatment
    • Patent number 4,857,137
    • Issue date Aug 15, 1989
    • Hitachi, Ltd.
    • Shinichi Tachi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents