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Plasma processing apparatus
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Patent number 6,033,481
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Issue date Mar 7, 2000
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Hitachi, Ltd.
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Ken'etsu Yokogawa
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 5,891,252
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Issue date Apr 6, 1999
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Hitachi, Ltd.
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Ken'etsu Yokogawa
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H01 - BASIC ELECTRIC ELEMENTS
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Dry etching method
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Patent number 5,705,029
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Issue date Jan 6, 1998
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Hitachi, Ltd.
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Sadayuki Okudaira
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H01 - BASIC ELECTRIC ELEMENTS
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Method for dry etching
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Patent number 5,650,038
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Issue date Jul 22, 1997
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Hitachi, Ltd.
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Takao Kumihashi
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H01 - BASIC ELECTRIC ELEMENTS
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Dry etching method
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Patent number 5,643,473
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Issue date Jul 1, 1997
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Hitachi, Ltd.
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Shinichi Tachi
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H01 - BASIC ELECTRIC ELEMENTS
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Dry-etching method and apparatus
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Patent number 5,409,562
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Issue date Apr 25, 1995
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Hitachi, Ltd.
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Takao Kumihashi
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Dry etching method
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Patent number 5,354,416
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Issue date Oct 11, 1994
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Sadayuki Okudaira
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H01 - BASIC ELECTRIC ELEMENTS
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Method for dry etching
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Patent number 5,354,418
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Issue date Oct 11, 1994
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Hitachi, Ltd.
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Takao Kumihashi
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H01 - BASIC ELECTRIC ELEMENTS
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Dry etching method
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Patent number 5,147,500
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Issue date Sep 15, 1992
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Hitachi, Ltd.
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Shinichi Tachi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Dry etching method
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Patent number 4,992,136
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Issue date Feb 12, 1991
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Hitachi, Ltd.
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Shinichi Tachi
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H01 - BASIC ELECTRIC ELEMENTS
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Method of dry etching
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Patent number 4,986,877
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Issue date Jan 22, 1991
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Hitachi, Ltd.
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Shinichi Tachi
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H01 - BASIC ELECTRIC ELEMENTS
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Dry etching apparatus
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Patent number 4,956,043
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Issue date Sep 11, 1990
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Hitachi, Ltd.
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Masafumi Kanetomo
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H01 - BASIC ELECTRIC ELEMENTS
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Etching method
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Patent number 4,943,344
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Issue date Jul 24, 1990
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Hitachi, Ltd.
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Shinichi Tachi
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H01 - BASIC ELECTRIC ELEMENTS
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Process for surface treatment
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Patent number 4,857,137
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Issue date Aug 15, 1989
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Hitachi, Ltd.
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Shinichi Tachi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...